Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2010Modeling of double patterning interactions in litho-cure-litho-etch (LCLE) processes
Erdmann, A.; Shao, F.; Fuhrmann, J.; Fiebach, A.; Patsis, G.P.; Trefonas, P.
Conference Paper
2009Advanced lithography models for strict process control in the 32 nm technology node
Patsis, G.P.; Drygiannakis, D.; Raptis, I.; Gogolides, E.; Erdmann, A.
Conference Paper, Journal Article