Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2000Enhanced depth-resolution analysis with medium energy ion scattering (MEIS) for shallow junction profiling
Tajima, J.; Park, Y.K.; Fujita, M.; Takai, M.; Schork, R.; Frey, L.; Ryssel, H.
Conference Paper
2000Field emitter array fabricated using focused ion and electron beam induced reaction
Yavas, O.; Ochiai, C.; Takai, M.; Park, Y.K.; Lehrer, C.; Lipp, S.; Frey, L.; Ryssel, H.; Hosono, A.; Okuda, S.
Journal Article
1999Comparison of FIB-induced physical and chemical etching
Park, Y.K.; Paszti, F.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Conference Paper
1999Impurity incorporation during beam assisted processing analyzed using nuclear microprobe
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article, Conference Paper
1999Investigation of Cu films by focused ion beam induced deposition using nuclear microprobe
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1998Fabrication of field emitter array using focused ion and electron beam induced reaction
Takai, M.; Kishimoto, T.; Morimoto, H.; Park, Y.K.; Lipp, S.; Lehrer, C.; Frey, L.; Ryssel, H.; Hosono, A.; Kawabuchi, S.
Conference Paper
1998Microanalysis of masklessly fabricated microstructures using nuclear microprobe
Park, Y.K.; Takai, M.; Nagai, T.; Kishimoto, T.; Seidl, A.; Lehrer, C.; Frey, L.; Ryssel, H.
Conference Paper, Journal Article
1998Microprobe analysis of Pt films deposited by beam induced reaction
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article