Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1988Effects of different recrystallization processes on the electrical characteristics of underlying MOS devices
Buchner, R.; Panish, P.; Haberger, K.; Seegebrecht, P.
Conference Paper
1988Fast CO2 laser recrystallization for 3D integration
Haberger, K.; Panish, P.; Buchner, R.; Steinberger, H.
Conference Paper
1988STACHMOS - a basic 3-dimensional CMOS process
Haberger, K.; Panish, P.; Buchner, R.; Seegebrecht, P.
Conference Paper
1987High troughput CO2 laser recrystallization for 3D integrated devices
Haberger, K.; Panish, P.; Buchner, R.; Steinberger, H.
Conference Paper