Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1997Micromechanical ultrasonic liquid nebulizer
Paneva, R.; Temmel, G.; Burte, E.P.; Ryssel, H.
Journal Article
1996A micro fluid system for liquid dosage and nebulization
Kluge, S.; Woias, P.; Paneva, R.; Hermes, T.; Temmel, G.
Conference Paper
1996A micro mechanical system for liquid dosage and nebulization
Kluge, S.; Hermes, T.; Paneva, R.; Temmel, G.; Woias, P.
Conference Paper
1996A micro mechanical system for liquid dosage and nebulization
Temmel, G.; Hermes, T.; Paneva, R.; Kluge, S.; Woias, P.
Conference Paper
1996Micromechanical ultrasonic liquid nebulizer
Paneva, R.; Temmel, G.; Burte, E.P.; Ryssel, H.
Conference Paper
1996Mikrodosierung und Zerstäubung von Flüssigkeiten im µl-Bereich
Paneva, R.; Temmel, G.
Book Article
1996Mikromechanisch hergestellter Zerstäuber für kleine Flüssigkeitsmengen
Paneva, R.
Dissertation
1995Nitrogen implanted etch-stop layers in silicon
Paneva, R.; Temmel, G.; Ryssel, H.; Burte, E.P.
Conference Paper
1995Ultrasonic transducer with silicon membrane for liquid nebulization
Paneva, R.; Temmel, G.
Conference Paper
1995Ultrasonic transducer with silicon. A well known material with new applications
Paneva, R.; Temmel, G.; Ryssel, H.
Conference Paper