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| 2012 | Bonding technologies for standard bulk PZT ceramics without the need of after process-polarization especially on thin silicon membranes
Helke, C.; Schueller, M.; Hiller, K.; Schulze, R.; Braeuer, J.; Nestler, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2012 | Chip-based optical sensor to determine the arterial oxygen concentration
Möbius, M.; Weiss, A.; Otto, T.; Gessner, T. | Conference Paper |
| 2012 | Comparison of lumped and finite element modeling for thermoelectric devices
Streit, P.; Schulze, R.; Billep, D.; Otto, T.; Gessner, T. | Conference Paper |
| 2012 | Design and manufacturing of micro synthetic jet actuators
Gebauer, C.; Schueller, M.; Hiller, K.; Schulze, R.; Otto, T.; Gessner, T. | Conference Paper |
| 2012 | Highly-integrated lab-on-chip system for point-of-care multiparameter analysis
Schumacher, Soeren; Nestler, Jörg; Otto, Thomas; Wegener, Michael; Ehrentreich-Förster, Eva; Michel, Dirk; Wunderlich, Kai; Palzer, Silke; Sohn, Kai; Weber, Achim; Burgard, Matthias; Grzesiak, Andrzej; Teichert, Andreas; Brandenburg, Albrecht; Koger, Birgit; Albers, Jörg; Nebling, Eric; Bier, Frank F. | Journal Article |
| 2012 | Laser micromachining and micro hot embossing for highly integrated lab-on-chip systems
Enderlein, T.; Baum, M.; Nestler, J.; Otto, T.; Besser, J.; Wiemer, M.; John, B.; Hänel, J.; Gessner, T. | Conference Paper |
| 2012 | Laserbasierter Multilayer-Fügeprozess zur Erzeugung heterogener und druckstabiler mikrofluidischer Systeme
Geidel, S.; Enderlein, T.; Morschhauser, A.; Nestler, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2012 | LoC Integrationsstrategien für aufgerollte Sensoren
Harazim, S.; Helke, C.; Enderlein, T.; Morschhauser, A.; Nestler, J.; Sanchez, S.; Grimm, D.; Otto, T.; Schmidt, O.; Gessner, T. | Conference Paper |
| 2012 | Membrane based sample preparation chip
Morschhauser, A.; Stiehl, C.; Große, A.; Nestler, J.; Otto, T.; Gessner, T. | Conference Paper, Journal Article |
| 2012 | Nanosensor technology based on semiconductor nanocrystals
Martin, J.; Staudinger, U.; Demir, E.; Spudat, C.; Pötschke, P.; Voit, B.; Otto, T.; Gessner, T. | Conference Paper |
| 2012 | Smart Systems for Different Applications from Fraunhofer ENAS
Vogel, M.; Braeuer, J.; Wiemer, M.; Nestler, J.; Kurth, S.; Otto, T.; Gessner, T. | Book Article |
| 2012 | Towards integration of silica membrand based DNA extraction on chip
Morschhauser, A.; Stiehl, C.; Geidel, S.; Nestler, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2011 | Fabrication of an all-spin-coated CdSe/ZnS quantum dot light-emitting diode
Weiss, A.; Martin, J.; Piasta, D.; Otto, T.; Gessner, T. | Conference Paper |
| 2011 | Fabrication of an all-spincoated CdSe/ZnS quantum dot light-emitting diode
Weiss, A.; Martin, J.; Piasta, D.; Otto, T.; Gessner, T. | Conference Paper |
| 2011 | The fluorescence of semiconductor nanocrystals - from basics to nanosensor technology
Martin, J.; Piasta, D.; Weiss, A.; Otto, T.; Gessner, T. | Conference Paper |
| 2011 | Influence of charges on the photoluminescence of semiconductor nanocrystals
Martin, J.; Piasta, D.; Otto, T.; Gessner, T. | Conference Paper |
| 2011 | Materialintegrierte Sensorschicht basierend auf Quantum-Dot Lumineszenz
Martin, J.; Piasta, D.; Kießling, T.; Otto, T.; Geßner, T.; Staudinger, U.; Demir, E.; Pötschke, P.; Voit, B. | Conference Paper |
| 2011 | Model based design of micro actuators for flow control applications
Schueller, M.; Schulze, R.; Zeising, V.; Gebauer, C.; Otto, T.; Gessner, T. | Conference Paper |
| 2011 | Netzwerkmodellierung von Doppelwandler Synthetic Jet Aktoren. Poster
Schüller, M.; Schulze, R.; Gebauer, C.; Lipowski, M.; Kaulfersch, E.; Nestler, J.; Otto, T.; Geßner, T. | Conference Paper |
| 2011 | Smart systems
Gessner, T.; Vogel, M.; Otto, T.; Schulz, S.E.; Baumann, R. | Conference Paper |
| 2010 | Challenges of smart system integration
Gessner, T.; Vogel, M.; Hiller, K.; Otto, T.; Bertz, A.; Billep, D. | Conference Paper |
| 2010 | Highly-integrated, low-cost in-vitro diagnostic platform for miniaturized assay development
Nestler, J.; Morschhauser, A.; Otto, T.; Koger, B.; Brandenburg, A.; Wunderlich, K.; Ehrentreich-Förster, E.; Bier, F.F.; Gessner, T. | Conference Paper |
| 2010 | LEM based design optimization of SJAs
Schueller, M.; Schulze, R.; Billep, D.; Otto, T.; Gessner, T. | Conference Paper |
| 2010 | MEMS temperature scanner system: Principle, advances and applications
Otto, T.; Saupe, R.; Stock, V.; Gessner, T. | Conference Paper |
| 2010 | Micro/nano technologies towards smart systems integration
Gessner, T.; Vogel, M.; Kaufmann, C.; Hiller, K.; Kurth, S.; Nestler, J.; Otto, T. | Conference Paper |
| 2010 | Mikrofluidvorrichtung und Verfahren zum Herstellen derselben
Otto, T.; Nestler, J.; Geßner, T. | Patent |
| 2010 | Polymer lab-on-chip systems with integrated electrochemical pumps suitable for large-scale fabrication
Nestler, J.; Morschhauser, A.; Hiller, K.; Otto, T.; Bigot, S.; Auerswald, J.; Knapp, H.F.; Gavillet, J.; Gessner, T. | Conference Paper, Journal Article |
| 2010 | Self-contained microfluidic cartridges for in-vitro diagnostic applications: Recent advances and improvements
Nestler, J.; Otto, T.; Sommer, J.-P.; Michel, B.; Gessner, T.; Bier, F.F. | Conference Paper |
| 2010 | Sensitive Feuchtesensoren auf der Basis von Nanokompositen
Martin, J.; Piasta, D.; Hammacher, J.; Wegener, M.; Dittrich, C.; Otto, T. | Conference Paper |
| 2010 | Thermoelectric generators based on polymers and nanocomposites
Martin, J.; Schwittlinsky, M.; Piasta, D.; Streit, P.; Billep, D.; Otto, T.; Gessner, T. | Conference Paper |
| 2009 | Ferroelectric P(VDF-TrFE) as a large-scale piezoelectric sensor in a table-tennis racquet
Wegener, M.; Greco, T.; Arlt, K.; Schuberth, R.; Morschhauser, A.; Otto, T. | Conference Paper |
| 2009 | Integrated point of care testing system based on low cost polymer biochips
Brandenburg, A.; Curdt, F.; Nestler, J.; Otto, T.; Wunderlich, K.; Michel, D. | Conference Paper |
| 2009 | Low-cost in-vitro diagnostic cartridges with integrated sensor, micropumps and reagents
Nestler, J.; Schueller, M.; Morschhauser, A.; Otto, T.; Gessner, T.; Brandenburg, A.; Michel, D.; Bier, F.F. | Conference Paper |
| 2009 | MEMS analyzer for fast determination of mixed gases
Otto, T.; Saupe, R.; Weiß, A.; Stock, V.; Throl, O.; Grählert, W.; Kaskel, S.; Schreck, H.; Gessner, T. | Conference Paper |
| 2009 | A novel method for the fabrication of deep-submicron structure
Jia, C.; Wiemer, M.; Grunert, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2009 | Two lithography-based technologies for the fabrication of submicron to deep-submicron structures
Jia, C.; Wiemer, M.; Werner, T.; Otto, T. | Conference Paper |
| 2008 | Dual-detector optical MEMS spectrum analyzer: advances, applications, and prospects
Otto, T.; Saupe, R.; Weiss, A.; Stock, V.; Wiesner, K.; Lampe, U.; Fleischer, M.; Gessner, T. | Conference Paper |
| 2008 | Fabrication of a low-frequency ultrasonic transducer
Jia, C.; Wiemer, M.; Hiller, K.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Fabrication of magnetic polymer membranes with microfluidic functionality
Morschhauser, A.; Nestler, J.; Baum, M.; Schüller, M.; Jänig, O.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Fuel gas determination using a MEMS gas analyser
Otto, T.; Saupe, R.; Weiss, A.; Throl, O.; Stock, V.; Gessner, T. | Conference Paper |
| 2008 | Highly integrated polymer-based technology platform for in-vitro diagnostics
Otto, Thomas; Nestler, Jörg; Morschhauser, Andreas; Schüller, Martin; Geßner, T.; Krissler, Jan; Ebling, Frank; Wegener, Michael; Grzesiak, Andrzej; Burgard, Matthias; Brandenburg, Albrecht; Sulz, Gerd; Nebling, Eric; Hintsche, Rainer; Wirth, Ingo; Godlinski, Dirk; Tovar, Günter E.M.; Weber, Achim; Ehrentreich-Förster, Eva; Gajovic-Eichelmann, Nenad; Bier, Frank F. | Conference Paper |
| 2008 | Low cost valveless magnetic micropumps suitable for array applications
Schüller, M.; Nestler, J.; Morschhauser, A.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Low-cost micro valves based on electrolysis inside hydrogels
Nestler, J.; Hiller, K.; Morschhauser, A.; Schüller, M.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Low-cost, fully integrated liquid handling platform for protein assays
Nestler, J.; Hiller, K.; Morschhauser, A.; Bigot, S.; Griffiths, C.; Auerswald, J.; Gavillet, J.; Nonglaton, G.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | MEMS-based spectroscopic ellipsometry
Saupe, R.; Otto, T.; Gruska, B.; Weiss, A.; Stock, V.; Gessner, T. | Conference Paper |
| 2008 | Micro Actuators based on Structured Water
Nestler, J.; Hiller, K.; Otto, T.; Gessner, T. | Journal Article |
| 2008 | Micro machining technologies for non silicon materials
Baum, M.; Rota, A.; Salk, N.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Microfluidic cartridge with integrated pumps and liquid position feedback design for running protein assays
Nestler, J.; Enderlein, T.; Hiller, K.; Otto, T.; Gessner, T.; Auerswald, J.; Knapp, H.F.; Griffiths, C.; Bigot, S. | Conference Paper |
| 2008 | Mikrofluidische Schnittstellen durch Laserstrukturierung
Baum, M.; Keiper, B.; Hänel, J.; Otto, T.; Gessner, T. | Journal Article |
| 2008 | Mikropumpe und Verfahren zum Pumpen eines Fluids
Otto, T.; Schüller, M.; Nestler, J.; Gessner, T.; Baum, M.; Morschhauser, A. | Patent |
| 2008 | Spectroscopic ellipsometry study of thin diffusion barriers of TaN and Ta for Cu interconnects in integrated circuits
Baum, M.; Letsch, H.; Shaporin, A.V.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Vorrichtung und Verfahren zum Hin- und Herbewegen einer Fluessigkeit ueber eine vorbestimmte Flaeche
Otto, T.; Schüller, M.; Nestler, J.; Gessner, T.; Morschhauser, A. | Patent |
| 2008 | Vorrichtung und Verfahren zur Ermittlung von Informationen über eine in einem Strömungskanal strömende Flüssigkeit
Schüller, M.; Otto, T.; Geßner, T.; Nestler, J.; Morschhauser, A. | Patent |
| 2007 | Demonstration des Einsatzes flächiger low-cost-Sensoren am Beispiel eines trainingsunterstützenden Tischtennisschlägers
Schuberth, R.; Otto, T.; Schwerdtner, R.; Bach, D.; Wegener, M.; Gessner, T. | Conference Paper |
| 2007 | Design and fabrication of a micromechanical vertical resonator
Jia, C.; Wiemer, M.; Kurth, S.; Otto, T.; Gessner, T | Conference Paper |
| 2007 | Development and characterization of Cu to Cu bonding technology
Baum, M.; Letsch, H.; Shaporin, A.V.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Electrochemical microfluidic pumps based on super absorbing polymers
Nestler, J.; Morschhauser, A.; Hiller, K.; Bigot, S.; Auerswald, J.; Gavillet, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Flexible taktile Sensorarrays auf Basis verschiedener piezoelektrischer Funktionspolymere
Schwerdtner, R.; Geßner, T.; Schuberth, R.; Bach, D.; Otto, T.; Wagner, M.; Danz, R.; Wegener, M. | Conference Paper |
| 2007 | Flexile taktile Sensorarrays auf Basis verschiedener piezoelektrischer Funktionspolymere
Schwerdtner, R.; Otto, T.; Schuberth, R.; Bach, D.; Wegener, M.; Danz, R.; Gessner, T. | Conference Paper |
| 2007 | Forensische Untersuchungen mittels MEMS-Spektrometern
Otto, T.; Saupe, R.; Weiss, A.; Stock, V.; Gessner, T. | Conference Paper |
| 2007 | Fully integrated polymer based microfluidic pumps and valves in Lab-on-Chip systems for Point-of-Care use
Nestler, J.; Morschhauser, A.; Hiller, K.; Auerswald, J.; Knapp, H.F.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Integrated polymer multimode waveguides for microfluidic sensing applications
Otto, T.; Nestler, J.; Baum, M.; Schroeder, H.; Ebling, F.; Bruch, R.; Gessner, T. | Conference Paper |
| 2007 | Low-Temperature Ti-Si bonding and its application in micro-device fabrication
Jia, C.; Hiller, K.; Wiemer, M.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Mikrospiegelspektrometer für den Nahinfraroten Spektralbereich - Applikationen & Trends
Otto, T.; Saupe, R.; Weiss, A.; Stock, V.; Gessner, T. | Conference Paper |
| 2007 | Mikrostrukturierung von Kunststoffen durch Heißprägen und Laserablation
Baum, M.; Mann, M.; Ebling, F.; Keiper, B.; Haenel, J.; Otto, T.; Gessner, T | Conference Paper |
| 2007 | Miniaturisierung in der instrumentellen Analytik dank Mikrospiegeln
Otto, T.; Saupe, R.; Weiss, A.; Stock, V.; Gessner, T. | Journal Article |
| 2007 | Modeling of mass printed organic field effect transistors
Martin, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Packaging aspects of MEMS-based optical systems
Saupe, R.; Otto, T.; Weiss, A.; Stock, V.; Gessner, T. | Conference Paper |
| 2007 | Permanentmagnetische Membranen für mikrofluidische Aktorik
Morschhauser, A.; Nestler, J.; Voigt, S.; Schueller, M.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Polymer Lab-on-Chip systems with integrated electrochemical pumps
Nestler, J.; Morschhauser, A.; Hiller, K.; Otto, T.; Bigot, S.; Gessner, T. | Conference Paper |
| 2007 | Small spectrometer with big future
Otto, T. | Abstract, Journal Article |
| 2007 | Smart Hip Joint Implants
Baum, M.; Schaufuß, J.; Boese-Landgraf, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Verfahren und Vorrichtung zum Abformen von Strukturen
Otto, T.; Froemel, J.; Nestler, J.; Gessner, T. | Patent |
| 2007 | Verfahren zur Herstellung von elektrisch und/oder magnetisch ansteuerbaren Membranen sowie magnetischer Aktor mit einer derartigen Membran
Otto, T.; Morschhauser, A.; Nestler, J.; Gessner, T.; Voigt, S. | Patent |
| 2006 | Microfluidic bubble actuators based on hydrogels
Nestler, J.; Hiller, K.; Otto, T.; Gessner, T. | Conference Paper |
| 2006 | Principle and applications of a new MOEMS spectrometer
Otto, T.; Saupe, R.; Weiss, A.; Stock, V.; Bruch, R.; Gessner, T. | Conference Paper |
| 2006 | Smart Systems Integration - Eine Herausforderung für zukünftige Mikro- und Nanotechnologien
Gessner, T.; Baum, M.; Hiller, K.; Mehner, J.; Wiemer, M.; Otto, T.; Saupe, R.; Nestler, J. | Conference Paper |
| 2005 | Fabrication and characterization of a micro-machined ultrasonic transducer
Jia, C.; Wiemer, M.; Zichner, N.; Otto, T.; Gessner, T. | Conference Paper |
| 2005 | Fabrication of embedded micro-channels by intended under-etching and trench filling
Jia, Chenping; Wiemer, M.; Müller, R.; Otto, T.; Geßner, T. | Conference Paper |
| 2005 | Improved silicon master tools for hot embossing
Baum, M.; Nestler, J.; Rost, D.; Weissmantel, S.; Otto, T.; Reisse, G.; Gessner, T. | Conference Paper |
| 2005 | Mikrofluidische Vorrichtung fuer die optische Analyse
Otto, T.; Nestler, J.; Baum, M.; Gessner, T. | Patent |
| 2005 | A novel dual-detector micro spectrometer
Otto, T.; Saupe, R.; Stock, V.; Bruch, R.; Gruska, B.; Gessner, T. | Conference Paper |
| 2005 | Verschleißmonitoring bei Hüftgelenkendoprothesen durch integrierte Mikrosensorik
Baum, M.; Hientzsch, M.; Boese-Landgraf, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2004 | Electrostatic driven scanning micro mirrors applied in spectral sensing devices
Saupe, R.; Otto, T.; Mehner, J.; Kurth, S.; Kaufmann, C.; Geßner, T. | Journal Article |
| 2004 | Infrared micro mirror spektrometer for gas analysis
Otto, T.; Saupe, R.; Kaufmann, C.; Geßner, T. | Conference Paper |
| 2004 | Packaging and characterization of micro-opto-electro-mechanical systems
Saupe, R.; Otto, T.; Stock, V.; Fritzsch, U.; Geßner, T. | Conference Paper |
| 2004 | Packaging and characterization of miniaturized spectral sensing devices
Otto, T.; Saupe, R.; Stock, V.; Fritzsch, U.; Bruch, R.; Gessner, T. | Conference Paper |
| 2004 | Potentials for Microsystems in Biotechnology and Healthcare
Nestler, J.; Baum, M.; Otto, T.; Geßner, T. | Conference Paper, Journal Article |
| 2004 | Wafer Bonding in Micro Mechanics and Microelectronics
Wiemer, M.; Froemel, J.; Gessner, T.; Otto, T. | Book Article |
| 2003 | Hot embossing for MEMS using silicon tools
Küchler, M.; Otto, T.; Gessner, T.; Ebling, F.; Schröder, H. | Journal Article, Conference Paper |
| 2003 | Novel possibilities in physical analytics employing miniaturized devices
Otto, T.; Saupe, R.; Geßner, T. | Conference Paper |
| 2003 | Polymer BioMEMs with integrated optical and fluidic functionality
Windhorn, K.; Meixner, L.; Drost, S.; Schröder, H.; Kilgus, E.; Scheel, W.; Ebling, F.; Otto, T.; Küchler, M.; Nestler, J.; Geßner, T. | Conference Paper |
| 2002 | Development of a microspectrometer for the infrared range
Otto, T.; Saupe, R.; Bruch, R.; Gessner, T. | Conference Paper |
| 2002 | Occurrence of phthalates and bisphenol A and F in the environment
Fromme, H.; Küchler, T.; Otto, T.; Pilz, K.; Müller, J.; Wenzel, A. | Journal Article |
| 2001 | Closed-form formulae for frequency-dependent 3-D interconnect inductance
Zhu, Z.; Xiao, X.; Streiter, R.; Ruan, G.; Otto, T.; Wolf, H.; Gessner, T. | Journal Article |
| 2001 | Einsatz von Niedertemperaturbondverfahren für die Fertigung von Sensoren
Wiemer, M; Otto, T.; Gessner, T.; Hiller, K.; Kapser, K.; Seidel, H.; Bagdahn, J.; Petzold, M. | Conference Paper |
| 2001 | Implementation of a low temperature wafer bonding process for acceleration sensors
Wiemer, M.; Otto, T.; Gessner, T.; Hiller, K.; Kapser, K.; Seidel, H.; Bagdahn, J.; Petzold, M. | Conference Paper |
| 2001 | Micro-metalforming with silicon dies
Böhm, J.; Schubert, A.; Otto, T.; Burkhardt, T. | Journal Article |
| 2001 | Übersicht zur Mikrosystemtechnik: Definition, Technologien, Markt und Probleme in 2001
Wiemer, M.; Otto, T.; Gessner, T. | Journal Article |
| 2000 | Fabrication of micro-optical components by high-precision embossing
Otto, T.; Schubert, A.; Böhm, J.; Gessner, T. | Conference Paper |
| 2000 | Micro-metalforming with silicon dies
Böhm, J.; Schubert, A.; Otto, T.; Burkhardt, T. | Conference Paper |
| 2000 | Modelling and simulation for dielectric constant of aerogel
Xiao, X.; Streiter, R.; Ruan, G.; Song, R.R.; Otto, T.; Gessner, T. | Journal Article |
| 2000 | Numerical simulation of time delay and cross-talk noise for the interconnect in VLSI circuits
Ruan, G.; Xiao, X.; Song, R.R.; Streiter, R.; Otto, T.; Gessner, T. | Journal Article |
| 1999 | Process and equipment simulation of dry silicon etching in the absence of ion bombardment
Otto, T.; Wolf, H.; Streiter, R.; Dehoff, A.; Wandel, K.; Gessner, T. | Journal Article |
| 1999 | Simulation of dry silicon etching in the absence of ion bombardment
Otto, T.; Hofmann, M.; Wolf, H.; Streiter, R.; Schubert, A.; Gessner, T. | Conference Paper |