Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Analysis of 28 nm SRAM cell stability under mechanical load applied by nanoindentation
Clausner, André; Schlipf, Simon; Kurz, G.; Otto, M.; Paul, J.; Giering, Kay-Uwe; Warmuth, Jens; Lange, André; Jancke, Roland; Aal, A.; Rosenkranz, Rüdiger; Gall, Martin; Zschech, Ehrenfried
Conference Paper
2018Prediction of SRAM reliability under mechanical stress induced by harsh environments
Warmuth, Jens; Giering, Kay-Uwe; Lange, André; Clausner, André; Schlipf, Simon; Kurz, Gottfried; Otto, Michael; Paul, Jens; Jancke, Roland; Aal, Andreas; Gall, Martin; Zschech, Ehrenfried
Conference Paper
2017Motion Capturing
Bockholt, Ulrich; Bochtler, Thomas; Enderlein, Volker; Olbrich, Manuel; Otto, Michael; Prieur, Michael; Sauerbier, Richard; Stechow, Roland; Wehe, Andreas; Wirsching, Hans-Joachim
Book Article
2015Black silicon photovoltaics
Otto, Martin; Algasinger, Michael; Branz, Howard; Gesemann, Thomas; Gimpel, T.; Füchsel, Kevin; Käsebier, Thomas; Kontermann, S.; Koynov, S.; Li, X.; Naumann, Volker; Oh, J.; Sprafke, A.N.; Ziegler, J.; Zilk, Matthias; Wehrspohn, Ralf B.
Journal Article
2015Black Silicon Photovoltaics
Füchsel, K.; Kroll, M.; Otto, M.; Steglich, M.; Bingel, A.; Käsebier, T.; Wehrspohn, R.; Kley, E.-B.; Pertsch, T.; Tünnermann, A.
Book Article
2015Investigations on specimen design and mounting for Split Hopkinson Tension Bar (SHTB) experiments
Ledford, Noah; Paul, Hanna; Ganzenmüller, Georg; May, Michael; Höfemann, Matthias; Otto, Manuel; Petrinic, Nikica
Conference Paper
2014Direct determination of sulfur species in coals from the Argonne Premium Sample Program by solid sampling electrothermal vaporization inductively coupled plasma optical emission spectrometry
Bauer, Daniela; Vogt, Thomas; Klinger, Mathias; Masset, Patrick J.; Otto, Matthias
Journal Article
2013Activation of Al2O3 passivation layers on silicon by microwave annealing
Ziegler, J.; Otto, M.; Sprafke, A.N.; Wehrspohn, R.B.
Journal Article
2013Opto-electronic properties of different black silicon structures passivated by thermal ALD deposited Al2O3
Otto, M.; Kroll, M.; Käsebier, T.; Li, X.; Gesemann, B.; Füchsel, K.; Ziegler, J.; Sprafke, A.; Wehrspohn, R.B.
Conference Paper
2013Passivation of different black silicon surfaces by ALD deposited Al 2O3
Otto, M.; Kroll, M.; Kasebier, T.; Li, X.; Gesemann, B.; Fuchsel, K.; Ziegler, J.; Sprafke, A.N.; Wehrspohn, R.B.
Conference Paper
2013Passivation of optically black silicon by atomic layer deposited Al 2O3
Otto, M.; Kroll, M.; Käsebier, T.; Ziegler, J.; Sprafke, A.N.; Wehrspohn, R.B.
Conference Paper
2012Assessment of a FOUP conditioning equipment for advanced semiconductor application
Otto, M.; Rioufrays, S.; Favre, A.; Leibold, A.; Altmann, R.; Gennaro, S.; Dell'Anna, R.; Canteri, R.; Pfitzner, L.
Conference Paper
2012Black silicon for solar cell applications
Kroll, Matthias; Otto, Martin; Käsebier, Thomas; Füchsel, Kevin; Wehrspohn, Ralf; Kley, Ernst-Bernhard; Tünnermann, Andreas; Pertsch, Thomas
Conference Paper
2012Black silicon photovoltaics
Füchsel, K.; Kroll, M.; Käsebier, T.; Otto, M.; Pertsch, T.; Kley, E.-B.; Wehrspohn, R.B.; Kaiser, N.; Tünnermann, A.
Conference Paper
2012Chemical and structural study of electrically passivating Al2O3/Si interfaces prepared by atomic layer deposition
Naumann, V.; Otto, M.; Wehrspohn, R.B.; Hagendorf, C.
Journal Article
2012Conformal Al2O3 coatings on black silicon by thermal ALD for surface passivation
Otto, M.; Kroll, M.; Käsebier, T.; Salzer, R.; Wehrspohn, R.B.
Conference Paper, Journal Article
2012Extremely low surface recombination velocities in black silicon passivated by atomic layer deposition
Otto, M.; Kroll, M.; Käsebier, T.; Salzer, R.; Tünnermann, A.; Wehrspohn, R.B.
Journal Article
2012Interface and material characterization of thin ALD-Al2O3 layers on crystalline silicon
Naumann, V.; Otto, M.; Wehrspohn, R.B.; Werner, M.; Hagendorf, C.
Conference Paper, Journal Article
2012Passivation of optically black silicon wafers by atomic layer deposited Al2O3 films
Otto, M.; Kroll, M.; Käsebier, T.; Salzer, R.; Ziegler, J.; Sprafke, A.; Wehrspohn, R.B.
Conference Paper
2012Reference samples for ultra trace analysis of organic compounds on substrate surfaces
Nutsch, A.; Beckhoff, B.; Borionetti, G.; Codegoni, D.; Grasso, S.; Hoenicke, P.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.-L.
Conference Paper
2011Analysis of contaminated oxide-silicon interfaces
Polignano, M.L.; Codegoni, D.; Castellano, L.; Greco, S.; Borionetti, G.; Bonoli, F.; Nutsch, A.; Altmann, R.; Leibold, A.; Otto, M.; Monge, P.; Riva, C.
Conference Paper
2011Conduction mechanisms and environmental sensitivity of solution-processed silicon nanoparticle layers for thin-film transistors
Weis, S.; Körmer, R.; Jank, M.P.M.; Lemberger, M.; Otto, M.; Ryssel, H.; Peukert, W.; Frey, L.
Journal Article
2011EPR investigations of non-oxidized silicon nanoparticles from thermal pyrolysis of silane
Körmer, R.; Otto, M.; Wu, J.; Jank, M.P.M.; Frey, L.; Peukert, W.
Journal Article
2011The impact of organic contamination on the oxide-silicon interface
Codegoni, D.; Polignano, M.L.; Castellano, L.; Borionetti, G.; Bonoli, F.; Nutsch, A.; Leibold, A.; Otto, M.
Conference Paper
2011Surface passivation of black silicon by thermal ALD deposited aluminum oxide
Otto, M.; Kroll, M.; Käsebier, T.; Ernst, M.; Salzer, R.; Wehrspohn, R.B.
Conference Paper
2011Transparent conductive oxide photonic crystals on textured substrates
Upping, J.; Salzer, R.; Otto, M.; Beckers, T.; Steidl, L.; Zentel, R.; Carius, R.; Wehrspohn, R.B.
Journal Article
2010Conformal transparent conducting oxides on black silicon
Otto, M.; Kroll, M.; Käsebier, T.; Lee, S.-M.; Putkonen, M.; Salzer, R.; Miclea, P.T.; Wehrspohn, R.B.
Journal Article
2010Optical modeling of needle like silicon surfaces produced by an ICPRIE process
Kroll, M.; Käsebier, T.; Otto, M.; Salzerc, R.; Wehrspohn, R.; Kley, E.-B.; Tünnermann, A.; Pertsch, A.
Conference Paper
2009Characterization of Organic Contamination during Semiconductor Manufacturing Processing Employing Near Edge X-Ray Absorption Fine Structure Spectroscopy
Mueller, M.; Beckhoff, B.; Bedana, P.; Borionetti, G.; Corradi, A.; Frey, L.; Guerinoni, G.; Leibold, A.; Otto, M.; Nutsch, A.; Müller, M.; Beckhoff, B.; Bedana, P.; Borionetti, G.; Corradi, A.; Frey, L.; Guerinoni, G.; Leibold, A.; Otto, M.; Nutsch, A.
Abstract
2009Characterization of organic contamination in semiconductor manufacturing processes
Nutsch, A.; Beckhoff, B.; Bedana, G.; Borionetti, G.; Codegoni, D.; Grasso, S.; Guerinoni, G.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.; Simone, D. de; Frey, L.
Conference Paper
2009Complementary metrology within a European joint laboratory
Nutsch, A.; Beckhoff, B.; Altmann, R.; Berg, J.A. van den; Giubertoni, D.; Hoenicke, P.; Bersani, M.; Leibold, A.; Meirer, F.; Müller, M.; Pepponi, G.; Otto, M.; Petrik, P.; Reading, M.; Pfitzner, L.; Ryssel, H.
Conference Paper
2009Detection of Acidic Substances of H-X Type in Clean Room Air
Kames, J.; Leibold, A.; Nutsch, A.; Otto, M.
Conference Paper
2009Monitoring system for airborne molecular contamination (AMC) in semiconductor manufacturing areas and micro-environments
Otto, M.; Leibold, A.; Wulf, L.; Hurlebaus, M.; Pfitzner, L.
Conference Paper
2007Device and circuit simulation of printed polymer electronics
Bartzsch, M.; Kempa, H.; Otto, M.; Hübler, A.; Zielke, D.
Journal Article
2002Metallbindende, proteinhaltige Verbindungen, Verfahren zu deren Gewinnung und ihre Verwendung
Kuehn, M.; Otto, M.; Wiesner, W.
Patent
1998Suprastrukturiertes Chitin/Chitosan, Derivate und Konfektionen davon fuer die umweltvertraegliche Materialtechnik, Hochleistungsverbundwerkstoffe und bionische Werkstoffe
Wissler, J.H.; Gorovoj, L.F.; Kosyakov, V.N.; Otto, M.K.
Patent
1998Verfahren zur selektiven Bestimmung der Konzentration von geloesten Substanzen in enzymatischen Reaktionen
Otto, M.; Bauser, H.
Patent
1995Verfahren und Vorrichtung zur Bestimmung der Formaldehydkonzentration in waessrigen Medien
Kuehn, M.; Janke, H.D.; Otto, M.K.; Chmiel, H.; Bryniok, D.; Knackmuss, H.-J.
Patent
1993Verfahren zur Messung des Dipolmoments von in einem Fluid eingebrachten Molekuelen und/oder der Konzentration von Molekuelen mit einem Dipolmoment in einem Fluid
Bauser, H.; Gunsilius, H.; Hellwig, G.; Otto, M.
Patent
1992Chitosan polyphosphate matrices versatile for immobilization, controlled release and stabilization of proteins
Mezger, K.-P.; Weyrauch, H.; Otto, M.K.; Wissler, J.H.
Journal Article
1992An iodide potential sensor with utmost sensitivity
Otto, M.K.; Wissler, J.H.
Journal Article
1991Development of an extraction scheme and a cellular testing system for screening of immune modulating and antitumoral carbohydrate derivatives from microorganisms and plants
Müller-Kehrmann, H.; Otto, M.K.; Kulbe, K.-D.
Book Article
1991New bacteria and enzymes for degradation and modification of natural and low molecular weight heparins
Bohn, J.R.; Otto, M.K.; Kulbe, K.-D.
Book Article
1991Preparation of defined Heparin fragments by enzymatic fragmentation of Heparin.
Bohn, J.R.; Otto, M.K.
Conference Paper
1991Purification and characterization of 2-halocarboxylic acid dehalogenase II from Pseudomonas spec. CBS 3.
Kulbe, K.-D.; Mörsberger, F.-M.; Müller, R.; Otto, M.K.
Journal Article
1991A sensitive photometric pyrogen assay.
Otto, M.K.
Conference Paper
1990Aspects of enzymatic dehalogenation of 2-halocarbonic acids with regard to biotechnical application
Kulbe, K.-D.; Mörsberger, F.-M.; Otto, M.
Conference Paper
1990Bacterial enzymes in halogenation processes
Kulbe, K.-D.; Otto, M.K.; Wiesner, W.
Book Article
1990Enzymatic synthesis of L-ascorbic acid 3. L-galactono-Gamma-lactone oxidase from yeasts
Haller, C.-P.; Kulbe, K.-D.; Otto, M.
Conference Paper
1989Continuous bromination of barbituric acid by chlorperoxidase from pseudomonas pyrrocinia
Wiesner, W.; Otto, M.K.; Kulbe, K.-D.
Conference Paper
1989Evidence for a new pathway in the bacterial degradation of 4-fluorobenzoate
Lingens, F.; Müller, R.; Oltmanns, R.; Otto, M.K.
Journal Article
1988Bacterial enzymes in halogenation processes
Wiesner, W.; Otto, M.K.; Kulbe, K.-D.
Conference Paper
1988Simplified detection of biological dehalogenation with a halide sensor
Otto, M.K.; Mörseberger, F.; Müller, R.; Schenk, T.; Thiele, J.; Kulbe, K.-D.
Conference Paper
1987Heparin-abbauende Enzyme aus Mikroorganismen
Otto, M.K.; Kimmerle, I.; Hartmann, H.; Weber, H.; Kulbe, K.-D.
Conference Paper
1987Heparin-degrading enzymes - screening, selection and mutation of new microorganisms
Kimmerle, I.; Hartmann, H.; Otto, M.K.; Weber, H.; Kulbe, K.-D.
Conference Paper
1987Microbial enzymes for the production of low molecular weight heparins with different biological activity
Kimmerle, I.; Hartmann, H.; Otto, M.K.; Weber, H.; Kulbe, K.-D.
Conference Paper
1987Simplified detection of biological halogenation and dehalogenation with a halide sensor
Otto, M.K.; Müller, R.; Chmiel, H.; Kulbe, K.-D.
Conference Paper
1987Vereinfachte Messung biologischer Halogenisierungsreaktionen mit einem Halogenidsensor
Otto, M.K.; Müller, R.; Schenk, T.; Thiele, J.; Kulbe, K.-D.
Conference Paper
1986Continuous enzymatic conversion of glucose-fructose mixtures into gluconic acid and sorbitol or mannitol within a hollow fiber membrane reactor
Kulbe, K.-D.; Schwab, U.; Gudernatsch, W.; Hasenfratz, H.; Howaldt, M.; Kimmerle, K.; Otto, M.K.
Book Article