Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Comparison of low damage sputter deposition techniques to enable the application of very thin a-Si passivation films
Linss, V.; Bivour, M.; Iwata, H.; Ortner, K.
Conference Paper
2019Deposition of thick piezoelectric films by gas flow sputtering
Ortner, Kai
Abstract
2019DSMC - simulation of the influence of hydrogen addition on the properties of silicon deposited by HWCVD
King, H.; Pflug, A.; Ortner, K.; Höfer, M.; Harig, T.; Sittinger, V.
Journal Article
2018Influence of the oxygen flow rate on gas flow sputtered thermal barrier coatings
Rösemann, N.; Ortner, K.; Bäker, M.; Petersen, J.; Bräuer, G.; Rösler, J.
Journal Article
2018Pizoelektrischer Stapelaktuator und Verfahren zur Herstellung desselben
Bandorf, Ralf; Kaden, Dirk; Ortner, Kai; Quenzer, Hans-Joachim
Patent
2017Gas flow sputtering for manufacture of high quality hard magnetic films
Bandorf, R.; Gröninger, A.; Ortner, K.; Gerdes, H.; Bräuer, G.
Journal Article
2017Influence of substrate temperature on morphology and behavior under cyclic thermal load of gas flow sputtered zirconia coatings
Rösemann, N.; Ortner, K.; Petersen, J.; Stöwer, M.; Bäker, M.; Bräuer, G.; Rösler, J.
Journal Article
2017Microstructure of gas flow sputtered thermal barrier coatings
Rösemann, N.; Ortner, K.; Petersen, J.; Bäker, M.; Bräuer, G.; Rösler, J.
Journal Article
2016Gas flow sputtering for manufacture of high-quality hard magnetic films
Bandorf, R.; Gröninger, A.; Ortner, K.; Gerdes, H.; Bräuer, G.
Conference Paper
2015Influence of bias voltage and oxygen flow rate on morphology and crystallographic properties of gas flow sputtered zirconia coatings
Rösemann, N.; Ortner, K.; Petersen, J.; Schadow, T.; Bäker, M.; Bräuer, G.; Rösler, J.
Journal Article
2015Metal-supported palladium membranes for hydrogen separation
Haydn, M.; Ortner, K.; Franco, T.; Schafbauer, W.; Behrens, A.; Dittmar, B.; Hummel, S.; Sulik, M.; Rüttinger, M.; Venskutonis, A.; Sigl, L.S.
Journal Article
2014Metal-supported palladium membranes for hydrogen separation
Haydn, M.; Ortner, K.; Franco, T.; Schafbauer, W.; Behrens, A.; Dittmar, B.; Hummel, S.; Sulik, M.; Rüttinger, M.; Venskutonis, A.; Sigl, L.S.
Conference Paper
2014Multi-layer thin-film electrolytes for metal supported solid oxide fuel cells
Haydn, M.; Ortner, K.; Franco, T.; Uhlenbruck, S.; Menzler, N.H.; Stöver, D.; Bräuer, G.; Venskutonis, A.; Sigl, L.S.; Buchkremer, H.-P.; Vaßen, R.
Journal Article
2013Development of metal supported solid oxide fuel cells based on powder metallurgical manufacturing route
Haydn, M.; Ortner, K.; Franco, T.; Menzler, N.H.; Venskutonis, A.; Sigl, L.S.
Journal Article
2012Coatings of Ti and TiO2 with defined roughness for implants by gas flow sputtering
Lembke, U.; Körtge, A.; Neumann, H.-G.; Ortner, K.; Jung, T.; Lange, R.; Beck, U.
Conference Paper
2011Entwicklung und Integration eines Hochratensputterprozesses für Blei-Zirkonat-Titanat-Dünnschichten
Kaden, D.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T.; Jakob, A.; Tiefensee, F.
Conference Paper
2010High-rate sputtering of thick PZT thin films for MEMS
Jacobsen, H.; Prume, K.; Wagner, B.; Ortner, K.; Jung, T.
Journal Article
2010Preparation and characterization of Cu'Me"'
Polenzky, C.; Ortner, K.; Szyszka, B.
Conference Paper
2010Preparation of photocatalytic TiO2-coatings by hollow cathode gas-flow sputtering
Koeßler, D.; Ortner, K.; Höfer, M.; Szyszka, B.; Jung, T.
Conference Paper
2009Erosionsschutzschichten für Flugtriebwerke
Ortner, K.; Kohns, A.; Turley, F.; Jung, T.
Journal Article
2009Hollow cathode gas flow sputtering of NixAly coatings on Ti-6Al-2Sn-4Zr-6Mo: Mechanical properties and microstructures
Kohns, A.; Ortner, K.; Jung, T.
Journal Article
2008Vorrichtung und Verfahren zum Hochleistungs-Puls-Gasfluss-Sputtern
Bandorf, R.; Jung, T.; Ortner, K.
Patent
2007Development of a piezoelectric lead titanate thin film process on silicon substrates by high rate gas flow sputtering
Jacobsen, H.; Jung, T.; Ortner, K.; Schiffmann, K.I.; Quenzer, H.-J.; Wagner, B.
Journal Article
2007High rate deposition of magnetic material by gas flow sputtering
Bandorf, R.; Bloche, A.; Ortner, K.; Lüthje, H.; Jung, T.
Conference Paper, Journal Article
2007High rate deposition of soft magnetic thick films by gas flow sputtering
Bandorf, R.; Bloche, A.; Ortner, K.; Jung, T.
Conference Paper
2007Influence of bias voltage on the structure of lead zirconate titanate piezoelectric films prepared by gas flow sputtering
Ortner, K.; Koeßler, D.; Jung, T.; Jacobsen, H.; Quenzer, H.-J.
Conference Paper, Journal Article
2007Smart coatings - materials, deposition, and applications
Bandorf, R.; Lüthje, H.; Biehl, S.; Sick, J.-H.; Ortner, K.; Jung, T.
Conference Paper
2007Thick PZT layers deposited by gas flow sputtering
Jacobsen, H.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T.
Conference Paper, Journal Article
2006High-rate sputtering of thick PZT layers for MEMS actuators
Jacobsen, H.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T.
Conference Paper
2005Dynamic PACVD coating of strip metal with silicon oxide, titanium oxide and amorphous carbon films
Ortner, K.; Jung, T.; Klages, C.-P.; Lindner, B.; Strauss, B.; Sämann, N.
Journal Article
2004Hochdurchsatz-Screening von katalytisch aktiven Materialien durch Katalysator-Herstellung mittels Gasfluss-Sputtern
Jung, T.; Ortner, K.; Köhnlein, H.; Löbbecke, S.; Krause, H.
Conference Paper
2003Neue Entwicklungen beim Hohlkatoden-Gasflusssputtern
Ortner, K.; Birkholz, M.; Jung, T.
Journal Article