Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016Blistering during the atomic layer deposition of iridium
Genevee, P.; Ahiavi, E.; Janunts, N.; Pertsch, T.; Oliva, M.; Kley, E.-B.; Szeghalmi, A.
Journal Article
2015High efficiency blazed gratings in resonance domain
Oliva, M.
Dissertation
2013Highly efficient broadband blazed grating in resonance domain
Oliva, Maria; Michaelis, Dirk; Fuchs, Frank; Tünnermann, Andreas; Zeitner, Uwe Detlef
Journal Article
2013Optical design including characteristics of manufactured nano-structures
Wächter, Christoph; Müller, Martin; Förster, Erik; Oliva, Maria; Michaelis, Dirk
Conference Paper
2013Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling
Savenko, Alexey Yu; Yildiz, Izzet; Petersen, Dirch Hjorth; Bøggild, Peter; Bartenwerfer, Malte; Krohs, Florian; Oliva, Maria; Harzendorf, Torsten
Journal Article
2012High performance diffraction gratings made by e-beam lithography
Zeitner, Uwe D.; Oliva, Maria; Fuchs, Frank; Michaelis, Dirk; Benkenstein, Tino; Harzendorf, Torsten; Kley, Ernst-Bernhard
Journal Article
2012Twyman-Green-type integrated laser interferometer array for parallel MEMS testing
Oliva, Maria; Michaelis, Dirk; Dannberg, Peter; Józwik, Michal; Lizewski, Kamil; Kujawiñska, Malgorzata; Zeitner, Uwe Detlef
Journal Article
2011Effects of metallic nanoparticle arrays in Si solar cell structures
Benkenstein, T.; Flämmich, M.; Harzendorf, T.; Käsebier, T.; Michaelis, D.; Oliva, M.; Wächter, C.; Zeitner, U.D.
Conference Paper
2011Multilevel blazed gratings in resonance domain: An alternative to the classical fabrication approach
Oliva, M.; Harzendorf, T.; Michaelis, D.; Zeitner, U.D.; Tünnermann, A.
Journal Article
2011Nano-optical gratings for integrated laser interferometer arrays
Michaelis, D.; Oliva, M.; Benkenstein, T.; Harzendorf, T.; Matthes, A.; Zeitner, U.
Conference Paper
2010Highly efficient three-level blazed grating in the resonance domain
Oliva, M.; Michaelis, D.; Benkenstein, T.; Dunkel, J.; Harzendorf, T.; Matthes, A.; Zeitner, U.D.
Journal Article
2010Smart technology for blazed multilevel gratings in resonance domain
Oliva, M.; Benkenstein, T.; Dunkel, J.; Harzendorf, T.; Matthes, A.; Michaelis, D.; Zeitner, U.D.
Conference Paper
2009AFM characterization of large area micro-optical elements
Oliva, M.; Benkenstein, T.; Flemming, M.; Zeitner, U.D.
Conference Paper