Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1996Arbeiten zur Röntgentiefenlithographie
Scheunemann, H.U.; Oertel, H.K.; Huber, H.L.
Book Article
1994Adhesion problems in deep-etch X-ray lithography caused by fluorescence radiation from the plating-base
Pantenburg, F.J.; El-Kholi, A.; Mohr, J.; Schulz, J.; Oertel, H.K.; Chlebek, J.; Huber, H.-L.
Journal Article
1993Nanostructure patterning with SOR X-ray lithography
Chlebek, J.; Huber, H.-L.; Oertel, H.K.; Reimer, K.
Conference Paper
1993Process latitude for sub-200 nanometer synchroton orbital radiation X-ray lithography
Oertel, H.K.; Chlebek, J.; Weiß, M.
Journal Article, Conference Paper
1992Simulation of resist development on wafer topography in x-ray lithography
Weiß, M.; Oertel, H.K.; Krauser, J.
Conference Paper
1991Investigation of the process latitude for sub-half-micron pattern replication in x-ray lithography
Oertel, H.K.; Huber, H.-L.; Weiß, M.
Conference Paper
1991Status of the compact synchrotron radiation source cosy and first exposure experiments
Schmidt, M.; Oertel, D.W.; Hartrott, M.v.; Weihreter, E.; Oertel, H.K.; Huber, H.-L.
Conference Paper
1990Percolation theory and resist development in XRL
Oertel, H.K.; Dammel, R.; Theis, J.; Weiß, M.
Conference Paper