Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Modelling of sputtering yield amplification in serial reactive magnetron co-sputtering
Kubart, T.; Schmidt, R.M.; Austgen, M.; Nyberg, T.; Pflug, A.; Siemers, M.; Wuttig, M.; Berg, S.
Journal Article
2011Sputter yield amplification by tungsten doping of Al2O 3 employing reactive serial co-sputtering: Process characteristics and resulting film properties
Austgen, M.; Koehl, D.; Zalden, P.; Kubart, T.; Nyberg, T.; Pflug, A.; Siemers, M.; Berg, S.; Wuttig, M.
Journal Article
2010Modelling of sputtering yield amplification effect in reactive deposition of oxides
Kubart, T.; Nyberg, T.; Pflug, A.; Siemers, M.; Austgen, M.; Koehl, D.; Wuttig, M.; Berg, S.
Journal Article
2009Increase of the deposition rate in reactive sputtering of metal oxides using a ceramic nitride target
Severin, D.; Kappertz, O.; Nyberg, T.; Berg, S.; Pflug, A.; Wuttig, M.
Journal Article
2008Sputtering yield amplification for targets operated in reactive mode
Kubart, T.; Nyberg, T.; Pflug, A.; Kohl, D.; Wuttig, M.; Berg, S.
Conference Paper
2006Plasma stabilization and structure formation during reactive sputtering of metal oxides
Severin, D.; Wuttig, M.; Kappertz, O.; Nyberg, T.; Pflug, A.; Siemers, M.
Conference Paper
2006Process stabilization and increase of the deposition rate in reactive sputtering of metal oxides and oxynitrides
Severin, D.; Kappertz, O.; Kubart, T.; Nyberg, T.; Berg, S.; Pflug, A.; Siemers, M.; Wuttig, M.
Journal Article
2005Heuristische Simulation der Plasma-Impedanz beim reaktiven Magnetron-Sputtern
Pflug, A.; Siemers, M.; Szyszka, B.; Kappertz, O.; Nyberg, T.; Berg, S.; Severin, D.; Wuttig, M.
Conference Paper
2005Modeling of the plasma impedance in reactive magnetron sputtering for various target materials
Pflug, A.; Siemers, M.; Szyszka, B.; Kappertz, O.; Nyberg, T.; Berg, S.
Conference Paper
2005Modelling of sputter erosion rate enhancement from ceramic targets
Nyberg, T.; Kappertz, O.; Rosen, D.; Kubart, T.; Severin, D.; Pflug, A.; Berg, S.
Conference Paper
2004Heuristic model of the plasma impedance in magnetron sputtering
Pflug, A.; Szyszka, B.; Berg, S.; Nyberg, T.; Kappertz, O.
Conference Paper