Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1993Deposition of TiN using tetrakis/dimethylamindo/-titanium in an electron-cyclotron-resonance plasma process
Weber, A.; Nikulkski, R.; Klages, C.-P.
Journal Article
1993ECR plasma deposition of cubic nitride using n-trimethylborazine
Bringmann, U.; Nikulkski, R.; Klages, C.-P.; Weber, A.
Conference Paper
1993Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazine
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P.
Journal Article, Conference Paper
1993Growth of cubic Boron Nitride and Boron-Carbon-Nitrogen coatings using N-Trimethylborazine in an ECR plasma process
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P.
Conference Paper
1993Influence of a substrate bias on the formation of cubic boron nitride in an ECR plasma CVD process
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P.
Conference Paper
1993Low temperature deposition of TiN in an ECR plasma enhanced process
Weber, A.; Bringmann, U.; Nikulkski, R.; Pöckelmann, R.; Klages, C.-P.; Gross, M.E.; Brown, W.L.; Charatan, R.M.; Dons, E.; Eaglesham, D.J.
Conference Paper