Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2002Investigation of macroscopic uniformity during CH4/H2 reactive ion etching of InP and its improvement by use of a guard ring
Janiak, K.; Niggebrugge, U.
Journal Article
1996Investigation of macroscopic uniformity during CH4/H2 reactive ion etching of InP and improvement using a guard ring
Janiak, K.; Niggebrugge, U.
Conference Paper
1991Recent advances in dry etching processes for InP-based materials
Niggebrugge, U.
Conference Paper
1990Dry chemical etching processes for the production of InP-based components
Niggebrugge, U.; Muller, R.
Conference Paper
1987Self-aligned low-loss totally reflecting waveguide mirrors in InGaAsP/InP
Niggebrugge, U.; Albrecht, P.; Doldissen, W.; Nolting, H.-P.; Schmid, H.
Conference Paper
1986Electro-optic modulators in GaInAsP/InP
Krauser, J.; Albrecht, P.; Bornholdt, C.; Doldissen, W.; Niggebrugge, U.; Nolting, H.-P.; Schlak, M.
Conference Paper
1986A novel process for reactive ion etching on InP, using CH4/H2
Niggebrugge, U.; Klug, M.; Garus, G.
Conference Paper
1985High-efficiency phase modulators in InGaAsP/InP
Bornholdt, C.; Doldissen, W.; Franke, D.; Krauser, J.; Niggebrugge, U.; Nolting, H.-P.; Schmitt, F.
Conference Paper
1983Light guiding and electrooptical modulation in InGaAsP/InP double heterostructures
Albrecht, P.; Bach, H.G.; Bornholdt, C.; Doldissen, W.; Franke, D.; Grote, N.; Krauser, J.; Niggebrugge, U.; Nolting, H.P.; Schlak, M.; Tiedke, I.; Logan, R.A.; Reinhart, F.K.
Conference Paper
1983Passive optical GaInAsP/InP waveguides
Bornholdt, C.; Doldissen, W.; Franke, D.; Grote, N.; Krauser, J.; Niggebrugge, U.; Nolting, H.P.; Schlak, M.; Tiedke, I.
Journal Article