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| 2011 | Micro- and nano-electromechanical resonators based on SiC and group III-nitrides for sensor applications
Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Foerster, C.; Cimalla, V.; Stephan, R.; Pezoldt, J.; Stauden, T.; Ambacher, O.; Hein, M.A. | Journal Article |
| 2010 | AlGaN/GaN based heterostructures for MEMS and NEMS applications
Cimalla, V.; Röhlig, C.-C.; Lebedev, V.; Ambacher, O.; Tonisch, K.; Niebelschütz, F.; Brueckner, K.; Hein, M.A. | Conference Paper |
| 2010 | Elastic properties of nanowires
Röhlig, C.-C.; Niebelschütz, F.; Brueckner, P.; Tonisch, K.; Ambacher, O.; Cimalla, V. | Journal Article, Conference Paper |
| 2010 | InN nanocolumns
Grandal, J.; Sánchez-García, M.A.; Calleja, E.; Lazic, S.; Gallardo, E.; Calleja, J.M.; Luna, E.; Trampert, A.; Niebelschütz, F.; Cimalla, V.; Ambacher, O. | Book Article |
| 2010 | Piezoelectric actuated epitaxially grown AlGaN/GaN-resonators
Niebelschütz, F.; Brueckner, K.; Tonisch, K.; Stephan, R.; Cimalla, V.; Ambacher, O.; Hein, M.A. | Journal Article, Conference Paper |
| 2010 | Transport properties of InN
Cimalla, V.; Lebedev, V.; Ambacher, O.; Polyakov, V.M.; Schwierz, F.; Niebelschütz, F.; Ecke, G.; Myers, T.H.; Schaff, W.J. | Book Article |
| 2009 | Composition and interface chemistry dependence in ohmic contacts to GaN HEMT structures on the Ti/Al ratio and annealing conditions
Kolaklieva, L.; Kakanakov, R.; Stefanov, P.; Cimalla, V.; Maroldt, S.; Ambacher, O.; Tonisch, K.; Niebelschütz, F. | Conference Paper, Journal Article |
| 2009 | Performance modification of SiC MEMS
Niebelschütz, F.; Brueckner, K.; Cimalla, V.; Hein, M.A.; Pezoldt, J. | Conference Paper, Journal Article |
| 2009 | Resonant piezoelectric ALGAN/GAN mems sensors in longitudinal mode operation
Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Stephan, R.; Cimalla, V.; Ambacher, O.; Hein, M.A. | Conference Paper |
| 2009 | Wide band gap based MEMS for harsh environment applications
Cimalla, V.; Lebedev, V.; Röhlig, C.-C.; Ambacher, O.; Niebelschütz, F.; Tonisch, K.; Pezoldt, J.; Brueckner, K.; Hein, M. | Conference Paper |
| 2008 | Electric field distribution in GaN/AlGaN/GaN heterostructures with two-dimensional electron and hole gas
Buchheim, C.; Goldhahn, R.; Gobsch, G.; Tonisch, K.; Cimalla, V.; Niebelschütz, F.; Ambacher, O. | Journal Article |
| 2008 | Integration of thin-film-fracture-based nanowires into microchip fabrication
Jebril, S.; Elbahri, M.; Titazu, G.; Subannajui, K.; Essa, S.; Niebelschütz, F.; Röhlig, C.-C.; Cimalla, V.; Ambacher, O.; Schmidt, B.; Kabiraj, D.; Avasti, D.; Adelung, R. | Journal Article |
| 2008 | Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication
Niebelschütz, F.; Pezoldt, J.; Stauden, T.; Cimalla, V.; Tonisch, K.; Brueckner, K.; Hein, M.; Ambacher, O.; Schober, A. | Conference Paper |
| 2008 | Piezoelectric actuation of (GaN/)AlGaN/GaN heterostructures
Tonisch, K.; Buchheim, C.; Niebelschütz, F.; Schober, A.; Gobsch, G.; Cimalla, V.; Ambacher, O.; Goldhahn, R. | Journal Article |
| 2008 | The role of Ti/Al ratio in nanolayered ohmic contacts for GaN/AlGaN HEMTs
Kolaklieva, L.; Kakanakov, R.; Cimalla, V.; Maroldt, S.; Niebelschütz, F.; Tonisch, K.; Ambacher, O. | Conference Paper |
| 2008 | Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators
Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Michael, S.; Dadgar, A.; Krost, A.; Cimalla, V.; Ambacher, O.; Stephan, R.; Hein, M.A. | Journal Article |