Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2008Strained silicon on wafer level by waferbonding: Materials processing, strain measurements and strain relaxation
Reiche, M.; Moutanabbir, O.; Himcinschi, C.; Christiansen, S.; Erfurth, W.; Gösele, U.; Mantl, S.; Buca, D.; Zhao, Q.; Loo, R.; Nguyen, D.; Muster, F.; Petzold, M.
Conference Paper
2007Strain relaxation in nanopatterned strained silicon round pillars
Himcinschi, C.; Singh, R.; Radu, I.; Milenin, A.P.; Erfurth, W.; Reiche, M.; Gösele, U.; Christiansen, S.H.; Muster, F.; Petzold, M.
Journal Article
2007Uniaxially strained silicon by wafer bonding and layer transfer
Himcinschi, C.; Radu, I.; Muster, F.; Singh, R.; Reiche, M.; Petzold, M.; Gösele, U.; Christiansen, S.H.
Conference Paper, Journal Article
2007Untersuchung der Biegebruchfestigkeit beschichteter Hartmetall-Mikrofräser
Muster, F.; Füting, M.; Theumer, T.; Petzold, M.
Conference Paper