Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2013High rate PECVD of a-C:H coatings in a hollow cathode arc plasma
Zimmermann, Burkhard; Fietzke, Fred; Klostermann, Heidrun; Lehmann, Jan; Munnik, Frans; Möller, Wolfhard
Conference Paper
2012Electrical evaluation of Ru-W(-N), Ru-Ta(-N) and Ru-Mn films as Cu diffusion barriers
Wojcik, H.; Kaltofen, R.; Merkel, U.; Krien, C.; Strehle, S.; Gluch, J.; Knaut, M.; Wenzel, C.; Preusse, A.; Bartha, J.W.; Geidel, M.; Adolphi, B.; Neumann, V.; Liske, R.; Munnik, F.
Journal Article
2012High rate deposition of amorphous hydrogenated carbon films by hollow cathode arc PECVD
Zimmermann, Burkhard; Fietzke, Fred; Klostermann, Heidrun; Lehmann, Jan; Munnik, Frans; Möller, Wolfhard
Journal Article
2012Physical characterization of PECVD and PEALD Ru(-C) films and comparison with PVD ruthenium film properties
Wojcik, H.; Junige, M.; Bartha, W.; Albert, M.; Neumann, V.; Merkel, U.; Peeva, A.; Gluch, J.; Menzel, S.; Munnik, F.; Liske, R.; Utess, D.; Richter, I.; Klein, C.; Engelmann, H.J.; Ho, P.; Hossbach, C.; Wenzel, C.
Journal Article
2010Low temperature silicon dioxide by thermal atomic layer deposition: Investigation of material properties
Hiller, D.; Zierold, R.; Bachmann, J.; Alexe, M.; Yang, Y.; Gerlach, J.W.; Stesmans, A.; Jivanescu, M.; Müller, U.; Vogt, J.; Hilmer, H.; Löper, P.; Künle, M.; Munnik, F.; Nielsch, K.; Zacharias, M.
Journal Article
2009The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity
Stenzel, O.; Wilbrandt, S.; Kaiser, N.; Vinnichenko, M.; Munnik, F.; Kolitsch, A.; Chuvilin, A.; Kaiser, U.; Ebert, J.; Jakobs, S.; Kaless, A.; Wuethrich, S.; Treichel, O.; Wunderlich, B.; Bitzer, M.; Grössl, M.
Journal Article
2009Deposition of functional coatings on polyethylene terephthalate films by magnetronplasma-enhanced chemical vapour deposition
Fahland, M.; Vogt, T.; Meyer, B.; Fahlteich, J.; Schiller, N.; Vinnichenko, M.; Munnik, F.
Journal Article
2009Highly dense amorphous Nb2O5 films with closed nanosized pores
Vinnichenko, M.; Rogozin, A.; Grambole, D.; Munnik, F.; Kolitsch, A.; Möller, W.; Stenzel, O.; Wilbrandt, S.; Chuvilin, A.; Kaiser, U.
Journal Article