Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1988Application of SiC-X-ray masks for fabrication submicron devices
Mackens, U.; Lüthje, H.; Mescheder, U.; Mund, F.; Pongratz, S.
Conference Paper
1988Subhalf micron critical dimension control in X-ray lithography mask technology
Mescheder, U.; Mund, F.; Trube, J.; Windbracke, W.; Huber, H.-L.; Pongratz, S.
Conference Paper
1987Linewidth metrology for X-rax masks with subhalfmicron feature size
Huber, H.-L.; Mescheder, U.; Mund, F.
Journal Article