Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
20193D applicable ALD film for humidity detection
Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Hermetical sealing of pressure sensor diaphragms by CVD of Si1-XGeX with minimized cavity deposition
Walk, Christian; Netaev, Alexander; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Hermeticity of SI1-XGeX diaphragms for the fabrication of a capacitive post-CMOS pressure sensor
Walk, Christian; Netaev, Alexander; Wiemann, Matthias; Görtz, Michael; Vogt, Holger; Mokwa, Wilfried; Seidl, Karsten
Conference Paper
2018Current controlled CMOS stimulator with programmable pulse pattern for a retina implant
Raffelberg, Pascal; Burkard, Roman; Viga, Reinhard; Mokwa, Wilfried; Walter, Peter; Grabmaier, Anton; Kokozinski, Rainer
Conference Paper
2018Development of a MEMS technology for the monolithic post-CMOS integration of capacitive pressure sensors
Walk, Christian
: Vogt, Holger (Erstgutachter); Mokwa, Wilfried
Dissertation
2018Development of a post-CMOS compatible nanoporous thin film layer based on Al2O3
Dogan, Özgü; Buschhausen, Andre; Walk, Christian; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2018Die-level patterning of parylene F by laser-ablation for further processing with ALD functional layers
Dogan, Özgü; Mokwa, Wilfried; Mai, Lukas; Devi, Anjana; Vogt, Holger
Conference Paper
2018Fabrication and characterization of bending-independent capacitive CMOS pressure sensor stacks
Fischer, Roland; Ditler, Heinrich; Görtz, Michael; Mokwa, Wilfried
Journal Article, Conference Paper
2018Post-CMOS MEMS capacitive pressure sensor: Porous ALD membrane for sacrificial layer release and diaphragm sealing
Walk, Christian; Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2017Design of a CMOS image sensor and stimulation IC for a wide-angle retina implant
Raffelberg, Pascal; Waschkowski, Florian; Viga, Reinhard; Mokwa, Wilfried; Walter, Peter; Kokozinski, Rainer
Conference Paper
2017DRUGAS: Implantable telemetric system for measuring the portal venous pressure: Assembly aspects
Fischer, Roland; Weidenmüller, Jens; Görtz, Michael; Göttsche, Thorsten; Mokwa, Wilfried
Journal Article
2017Gedünnte kapazitive Silizium-Drucksensoren in flexiblen und dehnbaren extra weichen Substraten für haptische Messungen
Fischer, Roland; Weichsel, Lisa; Mokwa, Wilfried; Görtz, Michael
Conference Paper
2017Intelligente Implantate. Geringere Abmessungen bei höherer Komplexität und Funktionalität
Mokwa, Wilfried; Görtz, Michael
Journal Article
2017A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2016Nanomaterial-modified flexible micro-electrode array by electrophoretic deposition of carbon nanotubes
Winkin, Nadine; Gierth, Uta; Mokwa, Wilfried; Schneider, Michael
Journal Article
2016Properties of retinal precursor cells grown on vertically aligned multiwalled carbon nanotubes generated for the modification of retinal implant-embedded microelectrode arrays
Johnen, Sandra; Meißner, Frank; Krug, Mario; Baltz, Thomas; Endler, Ingolf; Mokwa, Wilfried; Walter, Peter M.
Journal Article
2016Technischer Aufbau epiretinaler Netzhautimplantate
Mokwa, Wilfried; Görtz, Michael
Journal Article
2015Telemetriesystem zur nichtinvasiven Glukosemessung in der Tränenflüssigkeit
Fischer, Roland; Hennig, Andreas; Lauko, Jan; Wilson, Christopher; Görtz, Michael; Mokwa, Wilfried
Conference Paper
2014Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
Gembaczka, Pierre; Görtz, Michael; Celik, Yusuf; Jupe, Andreas; Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger; Mokwa, Wilfried; Kraft, Michael
Journal Article
2014Nano-modified flexible multi-electrode array with an integrated flexible CMOS-chip for medical and biological applications
Winkin, Nadine; Gierth, Uta; Mokwa, W.; Schneider, Michael
Book Article
2014Eine offene Telemetrieplattform für implantierbare Medizintechnik
Wallrodt, M.; Harnack, M.; Görtz, Michael; Fischer, R.; Mokwa, Wilfried; Biela, S.; Pfennig, M.; Schmitz-Rode, Thomas
Journal Article
2013A flexible micro-electrode array with an embedded flexible CMOS-chip for medical applications
Winkin, N.; Gierth, U.; Michaelis, A.; Mokwa, W.
Conference Paper
2013Kapazitive integrierte Drucksensoren für ein implantierbares System zur drahtlosen Druckmessung in der Pulmonalarterie
Gembaczka, Pierre; Görtz, Michael; Kordas, Norbert; Lerch, Renee G.; Müntjes, Jutta A.; Kraft, Michael; Mokwa, Wilfried
Conference Paper
2013Ongoing development and first long-term trials of a cardiac output monitoring system in the pulmonary artery (COMPASS)
Pfennig, M.; Cleven, Nina J.; Biela, S.; Urbaszek, Albrecht; Ooyen, A. van; Görtz, Michael; Mokwa, Wilfried; Schmitz-Rode, Thomas
Journal Article, Conference Paper
2013State of the art telemetric implantable sensors and their encapsulation
Kraft, Michael; Görtz, Michael; Müntjes, Jutta A.; Mokwa, Wilfried; Cleven, Nina J.; Schmitz-Rode, Thomas
Conference Paper
2013Studies on thinned flexible integrated capacitive pressure sensors in tactile sensor arrays for the use in robotics and prosthetics
Müntjes, Jutta A.; Häfner, Joachim; Görtz, Michael; Mokwa, Wilfried
Conference Paper
2013Verkapselungstechniken für implantierbare integrierte MEMS Drucksensoren
Görtz, Michael; Betz, Wolfgang; Mokwa, Wilfried; Vogt, Holger; Kraft, Michael
Conference Paper
2012A novel fully implantable wireless sensor system for monitoring hypertension patients
Cleven, Nina J.; Müntjes, Jutta A.; Fassbender, Holger; Urban, Ute; Görtz, Michael; Vogt, Holger; Gräfe, Maik; Göttsche, Thorsten; Penzkofer, Tobias; Schmitz-Rode, Thomas; Mokwa, Wilfried
Journal Article
2012Thinned CMOS pressure sensors for tactile sensing in prosthetics
Häfner, Joachim; Görtz, Michael; Mokwa, Wilfried
Conference Paper
2011Aufbau- und Verbindungstechnik für intelligente Implantate am Beispiel eines Druckmesssystems für die Pulmonalarterie (COMPASS)
Müntjes, J.; Meine, S.; Görtz, M.; Mokwa, W.
Conference Paper
2011Flexibles taktiles Sensorarray für Robotik- und Prothetikanwendungen
Häfner, J.; Görtz, M.; Mokwa, W.
Conference Paper
2011Implantable sensor for continuous pulmonary artery hemodynamic monitoring in heart failure patients (COMPASS)
Urbaszek, Albrecht; Görtz, Michael; Traulsen, Tim; Mokwa, Wilfried; Schmitz-Rode, Thomas
Conference Paper
2011Tactile CMOS-based sensor array for applications in robotics and prosthetics
Häfner, J.; Görtz, M.; Mokwa, W.
Conference Paper
2010Entwicklung eines implantierbaren Drucksensors zum kontinuierlichen Monitoring des pulmonalarteriellen Drucks bei Herzinsuffizienzpatienten
Urbaszek, Albrecht; Trieu, Hoc-Khiem; Traulsen, Tim; Mokwa, Wilfried
Conference Paper, Journal Article
2010Monitoring intravascular pressure with a pulmonary artery pressure sensor system - assembly aspects
Müntjes, J.; Meine, S.; Flach, E.; Görtz, M.; Hartmann, R.; Schmitz-Rode, T.; Trieu, H.-K.; Mokwa, W.
Conference Paper
2009Endoskop zum Erfassen von optischen Bildinformationen an einem distalen Ende und zum Bereitstellen entsprechender elektronischer Bildinformationssignale an einem proximalen Ende
Mokwa, W.; Trieu, H.
Patent
2009Fully implantable blood pressure system: Implantation experiences
Urban, U.; Fassbender, H.; Fürst, P.; Göttsche, T.; Bender, B.; Becker, R.; Mokwa, W.; Trieu, H.-K.; Osypka, P.; Glocker, R.; Steinseifer, U.; Schmitz-Rode, T.
Conference Paper
2009HYPER-IMS: A fully implantable blood pressure sensor for hypertensive patients
Gräfe, M.; Göttsche, T.; Osypka, P.; Görtz, M.; Trieu, H.-K.; Fassbender, H.; Mokwa, W.; Urban, U.; Schmitz-Rode, T.; Bender, B.; Glocker, R.; Fähnle, M.
Conference Paper
2009Implantation and explantation of a wireless epiretinal retina implant device
Roessler, G.; Laube, T.; Brockmann, C.; Kirschkamp, T.; Mazinani, B.; Görtz, M.; Koch, C.; Krisch, I.; Sellhaus, B.; Trieu, H.-K.; Weis, J.; Bornfeld, N.; Röthgen, H.; Messner, A.; Mokwa, W.; Walter, P.
Journal Article
2009Implants for epiretinal stimulation of retinitis pigmentosa patients
Trieu, H.-K.; Görtz, M.; Koch, C.; Mokwa, W.; Walter, P.
Conference Paper
2008The EPI-RET-3 wireless intraocular retina implant system
Koch, C.; Görtz, M.; Trieu, H.-K.; Mokwa, W.
Conference Paper
2008Fabrication and assembly techniques for a 3rd generation wireless epiretinal prosthesis
Koch, C.; Fassbender, H.; Nolten, U.; Görtz, M.; Mokwa, W.
Conference Paper
2008First results of a study on a completely implanted retinal prosthesis in blind humans
Koch, C.; Görtz, M.; Walter, P.; Mokwa, W.
Conference Paper
2008Fully implantable blood pressure sensor for hypertonic patients
Fassbender, H.; Mokwa, W.; Görtz, M.; Trieu, H.-K.; Urban, U.; Schmitz-Rode, T.; Göttsche, T.; Osypka, P.
Conference Paper
2008Intraocular epiretinal prosthesis to restore vision in blind humans
Mokwa, W.; Görtz, M.; Koch, C.; Krisch, I.; Trieu, H.-K.; Walter, P.
Conference Paper
2006Production processes and applications for the passive alignment of microcomponents
Brecher, C.; Lange, S.; Peschke, C.; Weinzierl, M.; Spanier, G.; Mokwa, W.
Conference Paper, Journal Article
2005Pressure sensor capsule to control the treatment of abdominal aorta aneurisms
Schlierf, R.; Görtz, M.; Rode, T.S.; Mokwa, W.; Schnakenberg, U.; Trieu, H.-K.
Conference Paper
2005Produktionsprozesse und Anwendungen für die passive Justage von Mikrobauteilen
Brecher, C.; Mokwa, W.; Peschke, C.; Spanier, G.
Conference Paper
2004Intravascular pressure monitoring system
Schnakenberg, U.; Krüger, C.; Pfeffer, J.G.; Mokwa, W.; Bögel, G. vom; Günther, R.; Schmitz-Rode, T.
Conference Paper, Journal Article
2003Biochemical transducers at Fraunhofer IMS
Köster, O.; Mokwa, W.; Trieu, H.-K.
Book Article
2003Development and functional test of an epiretinal prosthesis
Krisch, I.; Görtz, M.; Trieu, H.-K.; Mokwa, W.; Hosticka, B.J.
Conference Paper
2003Retina implantate - zum Stand der Forschung in Deutschland
Laube, T.; Mokwa, W.; Müller-Kämpf, S.; Richter, H.A.; Schanze, T.; Schnakenberg, U.; Sellighaus, B.; Stieglitz, T.; Walter, P.
Journal Article
2003Vascular capsule for telemetric monitoring of blood pressure
Schmitz-Rode, T.; Schnakenberg, U.; Pfeffer, J.G.; Piroth, W.; Bögel, G. vom; Mokwa, W.; Günther, R.W.
Journal Article
2002Capacitive pressure sensor with monolithically integrated CMOS readout circuit for high temperature applications
Kasten, K.; Kordas, N.; Kappert, H.; Mokwa, W.
Journal Article
2002Fully CMOS compatible capacitive differential pressure sensors with on-chip programmabilities and temperature compensation
Trieu, H.-K.; Kordas, N.; Mokwa, W.
Conference Paper
2002Integrated flow sensor with monocrystalline silicon membrane operating in Thermal Time-of-Flight mode
Hariadi, I.; Trieu, H.-K.; Mokwa, W.; Vogt, H.
Conference Paper
2002Intravascular pressure monitoring system
Schnakenberg, U.; Krüger, C.; Pfeffer, J.-G.; Mokwa, W.; Bögel, G. vom; Günther, R.; Schmitz-Rode, T.
Conference Paper
2002Intravascular pressure monitoring system
Krüger, C.; Pfeffer, J.G.; Mokwa, W.; Bögel, G. vom; Günther, R.; Schmitz-Rhode, T.; Schnakenberg, U.
Conference Paper
2002Investigations on silicon thermal flow sensors with mesa structures
Hariadi, I.; Trieu, H.-K.; Mokwa, W.; Vogt, H.
Conference Paper
2002Transponder system for non-invasive measurement of intravascular pressure
Schnakenberg, U.; Krüger, C.; Pfeffer, J.G.; Mokwa, W.; Bögel, G. vom; Günther, R.; Schmitz-Rhode, T.
Conference Paper
2001A foldable artificial lens with an integrated transponder system for measuring intraocular pressure
Ullerich, S.; Mokwa, W.; Bögel, G. vom; Schnakenberg, U.
Conference Paper
2001Micro-transponder systems for medical applications
Mokwa, W.; Schnakenberg, U.
Journal Article
2001A programmable intraocular CMOS pressure sensor system implant
Stangel, K.; Kolnsberg, S.; Hammerschmidt, D.; Hosticka, B.J.; Trieu, H.-K.; Mokwa, W.
Conference Paper
2001Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy
Köster, O.; Schuhmann, W.; Vogt, H.; Mokwa, W.
Conference Paper, Journal Article
2001SENSOR ZUR BESTIMMUNG DES FEUCHTEGEHALTS
Kersjes, R.; Mokwa, W.
Patent
20001% genaue Absolutdrucksensorfamilie mit zweidimensionaler Kalibration
Weiler, D.; Machul, O.; Hammerschmidt, D.; Amelung, J.; Hosticka, B.J.; Mokwa, W.
Conference Paper
2000CMOS microtransceivers in ophthalmology
Kolnsberg, S.; Stangel, K.; Hammerschmidt, D.; Schwarz, M.; Hosticka, B.J.; Ewe, L.; Trieu, H.-K.; Mokwa, W.
Conference Paper
2000CMOS-compatible capacitive high temperature pressure sensors
Kasten, K.; Amelung, J.; Mokwa, W.
Journal Article
2000Development of a completely encapsulated intraocular pressure sensor
Walter, P.; Schnakenberg, U.; VomBögel, G.; Ruokonen, P.; Krüger, C.; Dinslage, S.; Lüdtke Handjery, H.C.; Richter, H.; Mokwa, W.; Diestelhorst, M.; Krieglstein, G.K.
Journal Article
2000Initial investigations on systems for measuring intraocular pressure
Schnakenberg, U.; Walter, P.; Bögel, G. vom; Krüger, C.; Lüdtke-Handjery, H.C.; Richter, H.A.; Specht, W.; Ruokonen, P.; Mokwa, W.
Journal Article
2000Investigation of the properties of a single-chip potentiostat supporting three electrode cells for its operation with voltammetric and AC modes
Köster, O.; Schuhmann, W.; Vogt, H.; Mokwa, W.
Conference Paper
2000Micro coils for an advanced system for measuring intraocular pressure
Ullerich, S.; Mokwa, W.; VomBögel, G.; Schnakenberg, U.
Conference Paper
2000Micro implantable visual prostheses
Schwarz, M.; Ewe, L.; Hijazi, N.; Hosticka, B.J.; Huppertz, J.; Kolnsberg, S.; Mokwa, W.; Trieu, H.-K.
Conference Paper
2000Monolithic integrated surface micromachined absolute pressure sensors with programmable linearization and temperature compensation
Köster, O.; Trieu, H.-K.; Knier, M.; Kappert, H.; Schmidt, M.; Mokwa, W.
Conference Paper
2000Monolithic integrated surface micromachined pressure sensors with analog on-chip linearization and temperature compensation
Trieu, H.-K.; Knier, M.; Köster, O.; Kappert, H.; Schmidt, M.; Mokwa, W.
Conference Paper
2000A programmable intraocular CMOS pressure sensor system implant
Stangel, K.; Kolnsberg, S.; Hammerschmidt, D.; Hosticka, B.J.; Trieu, H.-K.; Mokwa, W.
Conference Paper
2000Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy
Köster, O.; Schuhmann, W.; Vogt, H.; Mokwa, W.
Conference Paper
2000Single chip CMOS imagers and flexible microelectronic stimulators for a retina implant system
Schwarz, M.; Ewe, L.; Hauschild, R.; Hosticka, B.J.; Huppertz, J.; Kolnsberg, S.; Mokwa, W.; Trieu, H.-K.
Journal Article
2000Strömungssensorkomponente
Kersjes, R.; Mokwa, W.; Zimmer, G.; Vogt, H.
Patent
1999Basic investigations on a system for measuring intraocular pressure
Schnakenberg, U.; Walter, P.; VomBögel, G.; Krüger, C.; Lüdtke Handjery, H.C.; Richter, H.A.; Specht, W.; Ruokonen, P.; Mokwa, W.
Conference Paper
1999Implantable microdevices
Mokwa, W.; Schnakenberg, U.
Conference Paper
1999MIKROSYSTEM UND VERFAHREN ZUM HERSTELLEN EINES MIKROSYSTEMS
Trieu, H.K.; Mokwa, W.; Ewe, L.
Patent
1999Surface micromachined high temperature pressure sensors on SIMOX-substrates
Kasten, K.; Amelung, J.; Mokwa, W.
Conference Paper
1998Development of a retina implant for epiretinal ganglion cell stimulation for patients suffering from retinitis pigmentosa
Schwarz, M.; Ewe, L.; Hauschild, R.; Hosticka, B.J.; Huppertz, J.; Kneip, T.; Kolnsberg, S.; Mokwa, W.; Trieu, H.-K.
Conference Paper
1998Flexible silicon structures for a retina implant
Trieu, H.-K.; Ewe, L.; Mokwa, W.; Schwarz, M.; Hosticka, B.J.
Conference Paper
1998Flow sensors for gases
Kersjes, R.A.; Mokwa, W.
Book Article
1998A generalized model describing corner undercutting by the experimental analysis of TMAH/IPA
Trieu, H.-K.; Mokwa, W.
Conference Paper
1998A generalized model describing corner undercutting by the experimental analysis of TMAH/IPA
Trieu, H.-K.; Mokwa, W.
Conference Paper
1998Highly sensitive hydrogen detection for quality control of sheet metals
Dura, H.-G.; Mokwa, W.
Book Article
1998Implantable retina stimulator for a retina implantat
Mokwa, W.; Trieu, H.-K.; Ewe, L.
Conference Paper
1998Integrated surface micromachined pressure sensor for high pressure applications
Dudaicevs, H.; Hell, S.; Mokwa, W.; Schmidt, M.
Conference Paper
1998A microstructured silicon substrate for low power multi gas sensor applications
Dura, H.-G.; Mokwa, W.; Werno, J.
Conference Paper
1998Modelling of the effect of corner undercutting in wet silicon anisotropic etching
Trieu, H.-K.; Mokwa, W.
Book Article
1998On-chip microsystems for medical applications
Mokwa, W.; Schnakenberg, U.
Conference Paper
1998Potential control of amperometric chemical and biochemical sensors by a single-chip CMOS potentiostat
Köster, O.; Dura, H.-G.; Mokwa, W.
Book Article
1998Silicon microsystems: merging sensors, circuits and systems
Manoli, Y.; Mokwa, W.
Conference Paper
1998Single-Chip CMOS Potentiostat für amperometrische chemische Sensoren
Köster, O.; Dura, H.-G.; Mokwa, W.; Kakerow, R.
Conference Paper
1997A generalized model describing corner undercutting by the experimental analysis of TMAH/IPA
Trieu, H.-K.; Mokwa, W.
Conference Paper
1997Microsensor techniques for cardiovascular systems
Kersjes, R.A.; Mokwa, W.
Journal Article
1997Multianalyt sensor for the simulteanous determination of glucose, L-lactate and uric acid based on a microelectrode array
Frebel, H.; Chemnitius, G.-C.; Cammann, K.; Kakerow, R.; Rospert, M.; Mokwa, W.
Journal Article
1997Silicon thin film sensor for measurement of dissolved oxygen
Wittkampf, M.; Chemnitius, G.-C.; Cammann, K.; Rospert, M.; Mokwa, W.
Journal Article
1996Compatible CMOS microsystems for automotive and for medical applications
Kersjes, R.A.; Mokwa, W.
Conference Paper
1996Drucksensor
Mokwa, W.; Kandler, M.; Amelung, J.
Patent
1996Hardware architecture of a neural net based retina implant for patients suffering from retinitis pigmentosa
Schwarz, M.; Hosticka, B.J.; Hauschild, R.; Mokwa, W.; Scholles, M.; Trieu, H.-K.
Conference Paper
1996An invasive catheter flow sensor with on-chip CMOS read-out electronics for the online determination of blood flow
Liebscher, F.F.; Spiegel, E.; Manoli, Y.; Mokwa, W.; Kersjes, R.A.
Conference Paper
1996Monolithisches Dünnfilmsensorarray zur Analyse von Gasgemischen
Werno, J.; Mokwa, W.
Book Article
1996Multianalyt sensor for the simultaneous determination of glucose, L-lactate and uric acid based on a microelectronic array
Frebel, H.; Chemnitius, G.; Cammann, K.; Kakerow, R.; Rospert, M.; Mokwa, W.
Conference Paper
1996Novel MOS based sensor system for detection of dissolved hydrogen in transformer oils
Dura, H.-G.; Mokwa, W.; Ritter, K.; Kean, J.J.
Conference Paper
1996Produktion von Si-Mikrosysstemen als Dienstleistung im Rahmen des EU-Projekts EUROPRACTICE
Mokwa, W.; Kersjes, R.A.
Book Article
1996Results of the development of sensors and myTAS-modules
Hinkers, H.; Conrath, N.; Czupor, N.; Frebel, H.; Hüwel, S.; Köckemann, K.; Trau, D.; Wittkampf, M.; Chemnitius, G.; Knoll, M.; Spener, F.; Rospert, M.; Kakerow, R.; Köster, O.; Lerch, T.; Mokwa, W.; Woias, P.; Richter, M.; Abel, T.; Meixner, L.
Conference Paper
1996Silicon thin film sensor for measurement of dissolved oxygen
Wittkampf, M.; Chemnitius, G.; Cammann, K.; Rospert, M.; Mokwa, W.
Conference Paper
1995A fast liquid flow sensor with thermal isolation by oxide filled tranches
Kersjes, Ralf A.; Mokwa, Wilfried
Journal Article
1995A fully integrated surface micromachined pressure sensor with low temperature dependency
Dudaicevs, H.; Manoli, Y.; Mokwa, W.; Schmidt, W.; Spiegel, E.
Conference Paper
1995Grundlagen und Anwendungen chemischer Festkörpergassensoren
Mokwa, W.
Conference Proceedings
1995Hochempfindlicher Wasserstoffsensor mit geringer Leistungsaufnahme
Dura, H.-G.; Mokwa, W.
Book Article
1995An invasive catheter flow sensor with on-chip CMOS read-out electronics for the online determination of blood flow
Liebscher, F.F.; Spiegel, E.; Manoli, Y.; Mokwa, W.; Kersjes, R.A.
Conference Paper
1995Kalorimetrischer low-cost-Mikrodurchflußmesser für Flüssigkeiten
Kersjes, R.A.; Mokwa, W.; Klein, J.
Journal Article
1995Ein Mikroelektronik-System für fluide Messungen in Blutgefäßen
Manoli, Y.; Mokwa, W.
Book Article
1995Mikromechanisches Bauelement und Verfahren zur Herstellung desselben.
Zimmer, G.; Mokwa, W.
Patent
1995Mikrosystemtechnik. Entwicklungsstand und Marktumsetzung
Mokwa, W.
Conference Paper
1995Monolithisch integrierter Drucksensor mit Ausleseelektronik
Schmidt, M.; Dudaicevs, H.; Machul, O.; Manoli, Y.; Mokwa, W.; Spiegel, E.
Conference Paper
1995Qualitätssicherungsstrategie bei der Kleinstserienfertigung von Wasserstoffsensoren auf der Basis von MOS-Bauelementen
Dura, H.-G.; Mokwa, W.; Vogt, H.
Conference Paper
1995Readout electronics for wide temperature range with integrated surface micromachined capacitive pressure sensor
Schmidt, M.; Spiegel, E.; Dudaicevs, H.; Manoli, Y.; Mokwa, W.
Conference Paper
1995Schneller Strömungssensor für die Dosiertechnik
Mokwa, W.; Kersjes, R.A.
Book Article
1995Sensormatrix zur Bestimmung chemischer und biochemischer Parameter
Kakerow, R.; Manoli, Y.; Mokwa, W.; Rospert, M.; Meyer, H.; Drewer, H.; Gründig, B.; Cammann, K.
Conference Paper
1995Two-dimensional imaging of O2, H2O2, and glucose distributions by an array of 400 individually addressable microelectrodes
Meyer, H.; Drewer, H.; Cammann, K.; Kakerow, R.; Manoli, Y.; Mokwa, W.; Rospert, M.; Gründig, B.
Journal Article
1994Array of individually addressable microelectrodes as transducer for enzyme-based sensors.
Meyer, H.; Drewer, H.; Krause, J.; Cammann, K.; Kakerow, R.; Manoli, Y.; Mokwa, W.; Rospert, M.
Abstract
1994Chemical and biochemical sensor array for two-dimensional imaging of analyte distributions
Meyer, H.; Drewer, H.; Krause, J.; Cammann, K.; Kakerow, R.; Manoli, Y.; Mokwa, W.; Rospert, M.
Journal Article
1994A CMOS-compatible monolithic conductivity sensor with integrated electrodes
Kordas, N.; Manoli, Y.; Mokwa, W.; Rospert, M.
Conference Paper
1994Development and characterization of microelectrode arrays by means of electrochemical and surface analysis methods.
Wittkampf, M.; Naendorf, B.; Cammann, K.; Rospert, M.; Mokwa, W.; Hagenhoff, B.; Benninghoven, A.; Amrein, M.; Reichelt, R.; Gründig, B.
Conference Paper
1994Diffusionsstabilität von Drucksensoren in Oberflächenmikromechanik
Amelung, J.; Kandler, M.; Mokwa, W.
Book Article
1994Entwicklung eines miniaturisierten Feuchtesensors auf der Basis der Silizium-Technologie
Werno, J.; Mokwa, W.; Steegmanns, A.; Vogt, H.
Book Article
1994A fast liquid flow sensor with thermal isolation by oxide filled tranches.
Mokwa, W.; Kersjes, R.A.
Conference Paper
1994A fully CMOS-compatible infrared sensor fabricated on SIMOX substrates
Müller, M.; Gottfried-Gottfried, Ralf; Kück, Heinz; Mokwa, Wilfried
Journal Article, Conference Paper
1994Halbleiterbauelement, insbesondere zur Ionendetektion
Kunath, C.; Kurth, E.; Kueck, H.; Mokwa, W.
Patent
1994Integrierbarer, kapazitiver Drucksensor und Verfahren zum Herstellen desselben
Zimmer, G.; Eichholz, J.; Mokwa, W.; Kandler, M.; Manoli, Y.
Patent
1994Kleinste mechanische Elemente für die monolithische Integration in Mikrosystemen
Mokwa, W.
Journal Article
1994A monolithic sensor array of individually addressable microelectrodes
Kakerow, R.; Manoli, Y.; Mokwa, W.; Rospert, M.; Meyer, H.; Drewer, H.; Krause, J.; Cammann, K.
Conference Paper
1994Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A.
Journal Article
1994Reduzierung des Wärmeverlustes von Si-Membranen durch Trenchisolierung
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A.
Book Article
1994Silizium - Werkstoff der Mikrosystemtechnik
Dudaicevs, H.; Mokwa, W.
Conference Paper
1994Strömungsmessung mit invasal einsetzbarem multisensoriellen Herzkathetersystem
Mokwa, W.; Kersjes, R.A.
Book Article
1994Surface micromachined pressure sensors with integrated CMOS read-out electronics
Dudaicevs, H.; Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.
Conference Paper
1994Temperaturkompensation von Sensorsystemen durch CMOS-Schaltungen
Hammerschmidt, D.; Sprotte, A.; Schnatz, F.V.; Brockherde, W.; Hosticka, B.J.; Dura, H.-G.; Dudaicevs, H.; Mokwa, W.
Conference Paper
1993A CMOS-compatible monolithic conductivity sensor with integrated electrodes
Kordas, N.; Manoli, Y.; Mokwa, W.; Rospert, M.
Conference Paper
1993Drucksensoranordnung mit einem Drucksensor, einem Referenzelement und einer Messschaltung
Zimmer, G.; Eichholz, J.; Mokwa, W.; Kandler, M.; Manoli, Y.
Patent
1993Dünne Membranen aus Silizium
Mokwa, W.; Dura, H.-G.
Book
1993Fabrication of sensors and microsystems on SIMOX substrates
Gottfried-Gottfried, R.; Köhler, R.; Kück, H.; Mokwa, W.; Vogt, H.
Conference Paper
1993A fully CMOS compatible infrared sensor fabricated on SIMOX-substrates
Müller, M.; Gottfried-Gottfried, R.; Kück, H.; Mokwa, W.
Conference Paper
1993An integrated sensor for invasive blood velocity measurement
Eichholz, J.; Langerbein, A.; Manoli, Y.; Mokwa, W.; Kersjes, R.A.
Conference Paper
1993Ein integrierter Sensor zur intravasalen Blutgeschwindigkeitsmessung
Eichholz, J.; Manoli, Y.; Mokwa, W.; Kersjes, R.A.
Book Article
1993Intelligente Sensorsysteme auf Siliziumbasis
Mokwa, W.
Conference Paper
1993Microelectrode arrays as transducers for chemical and biochemical sensors
Meyer, H.; Naendorf, B.; Wittkampf, M.; Krause, J.; Cammann, K.; Kakerow, R.; Manoli, Y.; Mokwa, W.; Rospert, M.
Conference Paper
1993Mikrodrucksensoren in Siliziumtechnologie
Mokwa, W.; Dudaicevs, H.
Book
1993Mikrostrukturiertes Sensorsubstrat für ultradünne Schichten
Mokwa, W.; Werno, J.
Book
1993A monolithic sensor array for measuring chemical and biochemical parameters
Krause, J.; Meyer, H.; Cammann, K.; Kakerow, R.; Manoli, Y.; Mokwa, W.; Rospert, M.
Conference Paper
1993Monolithic single-chip sensor array for two-dimensional imaging of analyte distribution
Meyer, H.; Drewer, H.; Krause, J.; Cammann, K.; Kakerow, R.; Manoli, Y.; Mokwa, W.; Rospert, M.
Conference Paper
1993Monolithisch integrierbares Sensorsystem zur Messung der elektrolytischen Leitfähigkeit
Kordas, N.; Manoli, Y.; Mokwa, W.; Rospert, M.
Conference Paper
1993A new microstructured silicon substrate for ultrathin gas-sensitive films
Schütze, A.; Weber, U.; Zacheja, J.; Kohl, D.; Mokwa, W.; Rospert, M.; Werno, J.
Conference Paper
1993Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A.
Conference Paper
1993Silizium-Mikrosysteme für medizinische Anwendungen
Mokwa, W.
Conference Paper
1993Strömungssensoren
Mokwa, W.; Kersjes, R.A.
Book
1993Surface micromachined pressure sensors with integrated CMOS read-out electronics
Dudaicevs, H.; Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.
Conference Paper
1993Temperatursensor
Mokwa, W.
Book
1993Ein thermoelektrischer Infrarotsensor als Beispiel für den Einsatz von SIMOX-Substraten für die Herstellung von Sensoren und Mikrosystemen
Müller, M.; Köhler, R.; Gottfried-Gottfried, R.; Kück, H.; Mokwa, W.; Vogt, H.
Conference Paper
1993Ultramikroelektrodenarrays für Sauerstoffsensoren
Mokwa, W.; Rospert, M.
Book
1992A CMOS sensor and signal conversion chip for monitoring arterial blood pressure and temperature
Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.
Conference Paper
1992Gassensoren auf Siliziumbasis
Kohl, D.; Mokwa, W.
Journal Article
1992Geringes Gewicht, kleinste Abmessungen durch Integration auf kleinstem Raum
Mokwa, Wilfried; Vogt, Holger
Journal Article
1992Mikrosensoren beweisen Stärke. Die neuesten Trends in der Mikrosystemtechnik
Mokwa, W.
Journal Article
1992A miniature single chip pressure and temperature sensor
Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.; Vogt, H.
Conference Paper
1992A miniature single-chip pressure and temperature sensor
Kandler, Michael; Manoli, Yiannakis; Mokwa, Wilfried; Spiegel, Egbert; Vogt, Holger
Journal Article
1992Oberflächenmikromechanik für die Herstellung von Silizium-Drucksensoren
Dudaicevs, H.; Kandler, M.; Mokwa, W.
Conference Paper
1992Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning
Dura, H.-G.; Hosticka, B.J.; Mokwa, W.; Schöneberg, U.; Vogt, H.
Conference Paper
1992Silicon technologies for sensor fabrication
Mokwa, W.
Book Article
1992SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 1
Dura, H.-G.; Gassel, H.; Mokwa, W.; Vogt, H.
Conference Paper
1992SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 2
Dura, H.-G.; Gassel, H.; Mokwa, W.; Vogt, H.
Conference Paper
1991Application of the silicon technology for microsystems in the medical techniques
Mokwa, W.
Conference Paper
1991Chemische Festkörpersensoren für Gase
Kohl, D.; Heiland, G.; Mokwa, W.
Journal Article
1991CMOS-compatible magnetic field sensors fabricated in standard and in silicon on insulator technologies
Gottfried-Gottfried, R.; Mokwa, W.; Zimmer, G.
Conference Paper
1991Drucksensoranordnung mit einem Drucksensor und einem Referenzelement
Zimmer, G.; Eichholz, J.; Mokwa, W.; Kandler, M.; Manoli, Y.
Patent
1991Der intelligente Herzkatheter. Sensoren und Signalvorverarbeitung auf einem Chip
Manoli, Y.; Mokwa, W.
Journal Article
1991Low-drift gas sensor with on-chip instrumentation
Dura, H.-G.; Hosticka, B.J.; Mokwa, W.; Schöneberg, U.
Conference Paper
1991Multifunktionaler Herzkatheter
Eichholz, J.; Kandler, M.; Kordas, N.; Langerbein, A.; Manoli, Y.; Mokwa, W.
Conference Paper
1991Multisensor catheter for invasive measurement of blood parameters
Fähnle, M.; Eichholz, J.; Kandler, M.; Kordas, N.; Langerbein, A.; Manoli, Y.; Mokwa, W.; Liebscher, F.F.
Conference Paper
1991Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning
Dura, H.-G.; Hosticka, B.J.; Mokwa, W.; Schöneberg, U.; Vogt, H.
Conference Paper
1991Trends in der Sensorik durch Einsatz verschiedener Mikrotechnologien. Seminar 05.12.1991
: Mokwa, W.; Zimmer, G.
Book
1991Umweltschutz durch Mikroelektronik, Anwendungen, Chancen, Forschungs- und Entwicklungsbedarf
: Hiessl, H.; Angerer, G.; Fiedler, H.-L.; Mokwa, W.
Book
1990Batch process for the production of single crystal silicon membranes by the use of SIMOX-wafers
Belz, J.; Dura, H.-G.; Mokwa, W.; Vogt, H.; Zimmer, G.
Conference Paper
1990Capacitive silicon pressure sensor for invasive measurement of blood pressure
Kandler, M.; Mokwa, W.
Conference Paper
1990CMOS compatible capacitive pressure sensor with read-out electronics
Eichholz, J.; Kandler, M.; Manoli, Y.; Mokwa, W.
Conference Paper
1990CMOS compatible magnetic field sensors fabricated in standard and in silicon on insulator technology
Gottfried-Gottfried, R.; Mokwa, W.; Zimmer, G.
Conference Paper
1990CMOS kompatibler Drucksensor in planarer Ätztechnik mit integrierter Ausleseelektronik
Eichholz, J.; Kandler, M.; Manoli, Y.; Mokwa, W.
Conference Paper
1990CMOS-kompatibler Temperatursensor
Eichholz, J.; Kordas, N.; Langerbein, A.; Manoli, Y.; Mokwa, W.
Book Article
1990A digital output monolithic temperature sensor for invasive applications
Eichholz, J.; Kordas, N.; Langerbein, A.; Manoli, Y.; Mokwa, W.
Conference Paper
1990Gasempfindliche MOS-Kapazitäten mit integrierter Signalverarbeitung
Dura, H.-G.; Hosticka, B.J.; Mokwa, W.; Schöneberg, U.
Book Article
1990Improved long-term stability of MOS gas sensors using on-chip switched-capacitorreadout techniques
Dura, H.-G.; Hosticka, B.J.; Mokwa, W.; Schöneberg, U.
Conference Paper
1990Microelectrodes for a planar "Clark-type" oxygen sensor made by silicon integrated circuit technologies
Cammann, K.; Mokwa, W.; Rospert, M.
Conference Paper
1990Mikrolabor im Inneren eines Herzkatheters
Manoli, Y.; Mokwa, W.
Book
1990Neue Entwicklung in der Mechatronik durch Einsatz der Mikroelektronik
Mokwa, W.; Zimmer, G.
Conference Paper
1990Neural based multi-sensory system
Hosticka, B.J.; Mokwa, W.; Richert, P.
Conference Paper
1990New method for achieving very high sensitivities of MOSFET gas sensors
Dobos, K.; Mokwa, W.; Zhang, Y.; Zimmer, G.
Conference Paper
1990Planare Drucksensoren in CMOS Technologie
Kandler, M.; Mokwa, W.
Book Article
1990Silicon microsystems
Brockherde, W.; Hosticka, B.J.; Manoli, Y.; Mokwa, W.
Conference Paper
1990Smart CMOS pressure sensor
Eichholz, J.; Kandler, M.; Manoli, Y.; Mokwa, W.
Conference Paper
1990Smart silicon system for a multi sensor catheter
Eichholz, J.; Kandler, M.; Kordas, N.; Langerbein, A.; Manoli, Y.; Mokwa, W.
Conference Paper
1989Intelligenter Herzkatheter
Eichholz, J.; Kandler, M.; Kordas, N.; Langerbein, A.; Manoli, Y.; Mokwa, W.
Book Article
1989Methoden zur Verbesserung der Langzeitstabilität von CMOS-Gassensoren
Dobos, K.; Dura, H.-G.; Mokwa, W.
Book Article
1989New method for achieving very high sensitivities of MOSFET gas sensors
Dobos, K.; Mokwa, W.; Zhang, Y.; Zimmer, G.
Conference Paper
1988MOSFET gas sensor with integrated temperature measurement and heating elements fabricated with standard CMOS technology
Dobos, K.; Mokwa, W.; Vogt, H.; Zhang, Y.; Zimmer, G.; Xiao, G.
Conference Paper
1988Sensor '88
Mokwa, W.
Book Article
1988Sensoren für Umweltgrößen
Dobos, K.; Mokwa, W.; Zimmer, G.
Journal Article
1988Sensoren und Mikroelektronik
Mokwa, W.
Conference Paper
1987MOS-Gas-Sensoren
Dobos, K.; Mokwa, W.; Zimmer, G.
Journal Article
1987Der Nachweis von Hydriden mit SnOx-Dünnfilmen unterschiedlicher Schichtdicke
Mokwa, W.
Book Article
1987Palladium gate MOS devices for arsine detection
Dobos, K.; Mokwa, W.; Zimmer, G.
Conference Paper
1986MOS-Gassensoren mit strukturierten- und unstrukturierten GATE-Elektronen
Dobos, K.; Mokwa, W.; Zimmer, G.
Journal Article
1985Detection of arsine by MOS devices and oxide films - a comparison
Kohl, D.; Heiland, G.; Dobos, K.; Mokwa, W.; Zimmer, G.
Conference Paper
1985Palladium gate MOS devices for arsine detection
Dobos, K.; Mokwa, W.; Zimmer, G.
Conference Paper