Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2003Enhancement of rotordynamic performance of high-speed micro- rotors for power MEMS applications by precision deep reactive ion etching
Miki, N.; Teo, C.J.; Ho, L.C.; Zhang, X.
Journal Article
2003Multistack silicon-direct wafer bonding for 3D MEMS manufacturing
Miki, N.; Zhang, X.; Khanna, R.; Ayon, A.A.; Ward, D.; Spearing, S.M.
Journal Article
2003Preliminary development of a hydrocarbon-fueled catalytic micro-combustor
Spadaccini, C.M.; Zhang, X.; Cadou, C.P.; Miki, N.; Waitz, I.A.
Journal Article