Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Mechanical test structures for the determination of normal stress in multilayer freestanding MEMS-membranes
Michel, Marvin D.; Vogt, Holger
Conference Paper
2019Modeling of thermal conductivity for a CMOS-compatible MEMS-ROIC contact by TiN nanotubes
Michel, Marvin D.; Vogt, Holger
Journal Article
2018Digital uncooled IRFPAs based on microbolometers with 17 μm and 12μm pixel pitch
Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Stein, Matthias; Michel, Marvin D.; Kuhl, Andreas; Lerch, Renee G.; Petermann, Martin; Geruschke, Thomas; Blaeser, Sebastian; Weyers, Sascha; Vogt, Holger
Conference Paper
2018High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout
Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Stein, Matthias; Michel, Marvin D.; Würfel, Daniel; Lerch, Renee G.; Petermann, Martin; Geruschke, Thomas; Blaeser, Sebastian; Weyers, Sascha; Vogt, Holger
Conference Paper