Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental deposition
Tonneau, Romain; Moskovkin, Pavel; Müller, Jérôme; Melzig, Thomas; Haye, Emile; Konstantinidis, Stephanos; Pflug, Andreas; Lucas, Stéphane
Journal Article
2020Device and method for coating substrates with planar or shaped surfaces by magnetron sputtering
Vergöhl, Michael; Pflug, Andreas; Bruns, Stefan; Kaiser, André; Melzig, Thomas; Zickenrott, Tobias