Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016Multiple scale modeling of PVD sputter processes
Turowski, M.; Jupé, M.; Melzig, T.; Pflug, A.; Demircan, A.; Ristau, D.
Conference Paper
2016Thin-film deposition processes
Pflug, A.; Siemers, M.; Melzig, T.; Keunecke, M.; Schäfer, L.; Bräuer, G.
Book Article
2015Growth condition of amorphous ZTO films from rotatable targets
Sittinger, V.; Pflug, A.; Schulz, C.; Siemers, M.; Melzig, T.; Meyer, B.; Kronenberger, A.; Oberste Berghaus, J.; Bosscher, W. de
Journal Article, Conference Paper
2015Heuristic modeling of the doping efficiency in sputtered TCO layers
Pflug, A.; Siemers, M.; Melzig, T.; Sittinger, V.; Schäfer, L.
Journal Article, Conference Paper
2015Modeling of gas flow and deposition profile in HWCVD processes
Pflug, A.; Höfer, M.; Harig, T.; Armgardt, M.; Britze, C.; Siemers, M.; Melzig, T.; Schäfer, L.
Journal Article, Conference Paper
2015Multiple scale modeling of Al2O3 thin film growth in an ion beam sputtering process
Turowski, M.; Jupé, M.; Melzig, T.; Pflug, A.; Ristau, D.
Conference Paper
2015Practice-oriented optical thin film growth simulation via multiple scale approach
Turowski, M.; Jupé, M.; Melzig, T.; Moskovkin, P.; Daniel, A.; Pflug, A.; Lucas, S.; Ristau, D.
Journal Article, Conference Paper
2015Simulation in thin film technology
Turowski, M.; Jupe, M.; Ehlers, H.; Melzig, T.; Pflug, A.; Ristau, D.
Conference Paper
20142D PIC-MC Simulation of Reactive Dual Magnetron Discharges on Ti02
Melzig, T.; Siemers, M.; Pflug, A.
Conference Paper
20143D PIC-MC simulation of anode effects in dual magnetron discharges
Melzig, T.; Siemers, M.; Pflug, A.; Rank, R.
Journal Article, Conference Paper
2014Model based investigation of Ar+ ion damage in DC magnetron sputtering
Siemers, M.; Pflug, A.; Melzig, T.; Gehrke, K.; Weimar, A.; Szyszka, B.
Journal Article, Conference Paper
2014Numerical optimization of baffles for sputtering optical precision filters
Pflug, A.; Siemers, M.; Melzig, T.; Rademacher, D.; Zickenrott, T.; Vergöhl, M.
Journal Article, Conference Paper
2014PIC-MC simulation of magnetron discharges
Pflug, A.; Siemers, M.; Melzig, T.; Schäfer, L.; Gehrke, K.
Conference Paper
2014Simulation of linear magnetron discharges in 2D and 3D
Pflug, A.; Siemers, M.; Melzig, T.; Schäfer, L.; Bräuer, G.
Journal Article, Conference Paper
2014Simulation von Plasma-Beschichtungsprozessen
Pflug, A.; Siemers, M.; Melzig, T.; Schäfer, L.
Journal Article
2013Numerical shaper optimization for sputtered optical precision filters
Pflug, A.; Siemers, M.; Melzig, T.; Rademacher, D.; Zickenrott, T.; Vergöhl, M.
Journal Article