Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1997Characterization of Nanocrystalline Ta(N,O) - Diffusions Barriers for Use in Semiconductor Metallization with Scanning Force Microscopy
Fischer, D.; Meissner, O.; Stavrev, M.; Wenzel, C.; Köhler, B.; Schreiber, J.
Conference Paper
1997Characterization of Nanocrystalline Ta(N,O) - Diffusions Barriers for Use in Semiconductor Metallization and Cu/Ta-Stacks with Scanning Force Microscopy
Meissner, O.; Fischer, D.; Schreiber, J.; Stavrev, M.; Wenzel, C.
Conference Paper
1997Innere Spannungen und Relaxionseffekte in metallischen Leitbahnen mikroelektronischer Bauelemente
Schreiber, J.; Köhler, B.; Meissner, O.; Melov, V.G.
Conference Paper
1997Investigations of relaxation effects in Cu-lines on Si-substrates
Köhler, B.; Meissner, O.; Melov, V.G.; Schreiber, J.
Conference Paper
1997Materials Characterization Using High-Frequency Atomic Force Microscopy and Friction Force Microscopy
Meissner, O.; Arnold, W.; Janser, K.; Rabe, U.; Scherer, V.
Conference Paper