Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Functional integration - structure-integrated wireless sensor technology targeting smart mechanical engineering applications
Rülke, Steffen; Beyer, Volkhard; Zorn, Wolfgang; Meinig, Marco; Wecker, Julia; Reuter, Danny; Deicke, Frank; Clausner, André; Werner, Thomas
Conference Paper
2018Mikro- und Nanotechnologien zur Herstellung steuerbarer optischer Komponenten
Hiller, K.; Helke, C.; Seifert, M.; Seiler, J.; Kurth, S.; Meinig, M.; Wecker, J.
Conference Paper
2017Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: An example for Match 1:1-, eBeam-, and nanoimprint lithography
Helke, C.; Hiller, K.; Erben, J.W.; Reuter, D.; Meinig, M.; Kurth, S.; Nowak, C.; Kleinjans, H.; Otto, T.
Conference Paper
2017Large-scale fabrication of LP-CVD Si3N4 photonic crystal structures as freestanding reflectors with 1 mm aperture for Fabry-Pérot interferometers
Helke, C.; Hiller, K.; Werner, T.; Reuter, D.; Meinig, M.; Kurth, S.; Nowak, C.; Kleinjans, H.; Otto, T.
Conference Paper
2016MEMS tunable Fabry-Pérot filters for infrared microspectrometer applications
Neumann, N.; Ebermann, M.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2016Oxygen detection system consisting of a millimeter wave Fabry-Pérot resonator and an integrated SiGe front-end
Wecker, J.; Bauch, A.; Kurth, S.; Mangalgiri, G.; Gaitzsch, M.; Meinig, M.; Gessner, T.; Nasr, I.; Weigel, R.; Kissinger, D.; Hackner, A.; Prechtel, U.
Conference Paper
2016Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers
Meinig, M.; Kurth, S.; Seifert, M.; Hiller, K.; Wecker, J.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper
2016Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: A review
Ebermann, M.; Neumann, N.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2016VIS Fabry-Pérot-Interferometer with (HL)4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy
Helke, C.; Meinig, M.; Seifert, M.; Seiler, J.; Hiller, K.; Kurth, S.; Martin, J.; Gessner, T.
Conference Paper
2015Electrically tunable Fabry-Pérot interferometer with inherent compensation of the influence of gravitation and vibration
Meinig, M.; Kurth, S.; Helke, C.; Seifert, M.; Hiller, K.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper
2015A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases
Ebermann, M.; Neumann, N.; Binder, S.; Meinig, M.; Seifert, M.; Kurth, S.; Hiller, K.
Conference Paper
2015Oxygen Detection by Rotational Spectroscopy with a Small Size Millimeter Wave Resonator
Wecker, J.; Mangalgiri, G.; Kurth, S.; Meinig, M.; Hackner, A.; Prechtel, U.; Gessner, T.
Journal Article
2015Subwavelength Grating Reflectors for Fabrication Cost Reduction of Fabry-Perot Infrared Filters
Rupprecht, J.; Kurth, S.; Hiller, K.; Seifert, M.; Besser, J.; Meinig, M.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper, Journal Article
2014Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gases
Ebermann, M.; Neumann, N.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2014Smart monitoring systems for a green future
Saupe, R.; Stock, V.; Otto, T.; Kurth, S.; Hiller, K.; Meinig, M.; Neumann, N.; Gessner, T.
Conference Paper
2014Subwavelength grating reflectors in MEMS tunable Fabry-Perot infrared filters with large aperture
Kurth, S.; Hiller, K.; Meinig, M.; Besser, J.; Seifert, M.; Ebermann, M.; Neumann, N.; Schlachter, F.; Gessner, T.
Conference Paper
2014Technology approaches for tuneable IR Fabry-Perot-Filters applied in gas sensing microspectrometers
Hiller, K.; Meinig, M.; Kurth, S.; Seifert, M.; Helke, C.; Neumann, N.; Ebermann, M.
Book Article
2013Determination of parameters with uncertainties for quality control in MEMS fabrication
Gennat, M.; Meinig, M.; Shaporin, A.; Kurth, S.; Rembe, C.; Tibken, B.
Journal Article
2012Fabry-Perot tunable infrared filter based on structured reflectors
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Specht, H.; Meinig, M.; Gessner, T.
Conference Paper
2012Spektral abstimmbare IR-Sensoren für die industrielle Prozessmesstechnik und die medizinische Gasanalyse
Ebermann, M.; Neumann, N.; Hiller, K.; Meinig, M.
Journal Article
2012Tunable Fabry-Pérot Interferometers for Infrared Spectroscopy
Kurth, S.; Hiller, K.; Meinig, M.; Gessner, T.
Book Article
2012Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers
Ebermann, M.; Neumann, N.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2011Autarkes Sensornetzwerk zur Überwachung von Hochspannungsleitungen
Voigt, S.; Nowack, M.; Bertz, A.; Leidich, S.; Meinig, M.; Kurth, S.; Gessner, T.; Grosser, V.; Braunschweig, M.; Krumm, R.
Conference Paper
2011Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers
Meinig, M.; Ebermann, M.; Neumann, N.; Kurth, S.; Hiller, K.; Gessner, T.
Conference Paper
2011Neuartiger frequenz- und amplitudenabstimmbarer Infrarotfilter
Specht, H.; Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Neumann, N.; Gittler, E.; Gessner, T.
Conference Paper
2011Tiny MID- and long-wave infrared spectrometer module with a MEMS dual-band Fabry-Pérot filter
Ebermann, M.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E.; Neumann, N.
Conference Paper
2011Tunable micromachined Fabry-Pérot Filters for infrared spectroscopy: Current state and prospects
Ebermann, M.; Neumann, N.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E.
Conference Paper
2011Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors
Meinig, M.; Kurth, S.; Hiller, K.; Neumann, N.; Ebermann, M.; Gittler, E.; Gessner, T.
Conference Paper
2010Entwurf und Technologie eines Dualband Fabry-Pérot-Filters für den mittleren Infrarotbereich mit zwei beweglichen Reflektoren
Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Gittler, E.; Gessner, T.
Conference Paper
2010Miniaturisiertes Spektrometermodul für den mittleren und langwelligen Infrarotbereich mit mikromechanischem Dual-Band Fabry-Pérot Filter
Ebermann, M.; Neumann, N.; Hoppe, S.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2010Recent advances in expanding the spectral range of MEMS Fabry-Pérot filters
Ebermann, M.; Neumann, N.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2010Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range
Neumann, N.; Ebermann, M.; Gittler, E.; Meinig, M.; Kurth, S.; Hiller, K.
Conference Paper
2009Exploring microsystems - measurement and test in fabrication and R&D
Kurth, S.; Faust, W.; Specht, H.; Meinig, M.; Fernholz, G.
Journal Article
2009Resonant mode detection for fast determination of structural and material parameters of MEMS
Meinig, M.; Kurth, S.; Shaporin, A.; Bauer, W.; Gessner, T.
Conference Paper
2009Time efficient test method for dimensional parameter determination based on resonant mode detection
Meinig, M.; Kurth, S.; Shaporin, A.; Giessmann, S.; Gessner, T.
Conference Paper