Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Development of sensor integration concept for mass production processes
Rost, F.; Arnold, B.; Decker, R.; Bauer, A.; Tsapkolenko, A.; Rzepka, S.; Mehner, J.; Kroll, L.
Conference Paper
2017Increase of functional density of hybrid structures by integration of micro and nano systems
Schueller, M.; Otto, T.; Mehner, J.; Troeltzsch, J.; Kroll, L.
Conference Paper
2017Prozess- und Zustandsüberwachung von Leichtbaustrukturen durch Sensorintegration
Rost, F.; Arnold, B.; Decker, R.; Mehner, J.; Kroll, L.; Rzepka, S.; Otto, T.
Conference Paper
2016Towards nanoreliability of sensors incorporating interfaces between single-walled carbon nanotubes and metals: Molecular dynamics simulations and in situ experiments using electron microscopy
Hartmann, S.; Hermann, S.; Bonitz, J.; Heggen, M.; Hölck, O.; Shaporin, A.; Mehner, J.; Schulz, S.E.; Gessner, T.; Wunderle, B.
Journal Article
2015Carbon Nanotube based sensors in MEMS/NEMS
Hermann, S.; Bonitz, J.; Boettger, S.; Hartmann,S; Shaporin, A.; Mehner, J.; Wunderle, B.; Schulz, S.E.; Gessner, T.
Conference Paper
2015Funktionale Hybridstrukturen mit aktiven Metallfilamenten
Auerswald, Christian; Drossel, Welf-Guntram; Elibol, Cagatay; Helbig, Frank; Mehner, Jan; Senf, Björn; Wagner, Martin Franz-Xaver
Poster
2015Mechanical stress induced in Si sensors during bonding and packaging processes
Rost, F.; Schindler-Saefkow, F.; Schaufuß, J.; Vogel, D.; Michel, B.; Mehner, J.; Rzepka, S.
Conference Paper
2015Preliminary Investigations of Processing Impact on Microelectronic Devices by Injection Moulding Technology
Nossol, P.; Schaufuss, J.; Tsapkolenko, A.; Rost,F; Arnold, B.; Kroll, L.; Mehner, J.; Gessner, T.
Conference Paper
2015Towards nanoreliability of CNT-based sensor applications: Investigations of CNT-metal interfaces combining molecular dynamics simulations, advanced in situ experiments and analytics
Hartmann, S.; Shaporin, A.; Hermann, S.; Bonitz, J.; Heggen, M.; Meszmer, P.; Sturm, H.; Hölck, O.; Blaudeck, T.; Schulz, S.E.; Mehner, J.; Gessner, T.; Wunderle, B.
Conference Paper
2014 System-level-model development of an SWCNT based piezoresistive sensor in VHDL-AMS
Kolchuzhin, V.; Mehner, J.; Markert, E.; Heinkel, U.; Wagner, C.; Schuster, J.; Gessner, T.
Conference Paper
2014Adaptive Verbundbauteile aus faserverstärktem Kunststoff und Formgedächtnislegierung
Senf, Björn; Drossel, Welf-Guntram; Bucht, Andre; Auerswald, Christian; Schaufuß, Jörg; Mehner, Jan; Wagner, Martin Franz-Xaver; Elibol, Cagatay; Dura Brisa, Vicente Jaime; Helbig, Frank
Conference Paper
2014Advanced Coil Design for Electromagnetic Pulse Technology. Report on the methodology of coil design
: Psyk, Verena; Scheffler, Christian; Drossel, Welf-Guntram; Kolchuzhin, Vladimir; Mehner, Jan; Faes, Koen; Zaitov, Oleg; Bossche, Alex van den; Bozalakov, Dimitar
Report
2014Carbon nanotubes under strain: Ab-initio investigations and compact models
Wagner, C.; Kolchuzhin, V.; Markert, E.; Schuster, J.; Mehner, J.; Gessner, T.
Abstract
2014Closed loop control for shape memory alloy actuators
Auerswald, Christian; Senf, Björn; Mehner, Jan; Drossel, Welf-Guntram
Conference Paper
2014Entwicklung eines intelligenten, textilen Halbzeugs
Schaufuss, J.; Decker, R.; Walther, M.; Tsapkolenko, A.; Dienel, M.; Schueller, M.; Kroll, L.; Gessner, T.; Mehner, J.
Conference Paper
2013Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments
Schondelmaier, G.; Hartmann, S.; May, D.; Shaporin, A.; Voigt, S.; Rodriguez, R.D.; Gordan, O.D.; Zahn, D.R.T.; Mehner, J.; Hiller, K.; Wunderle, B.
Conference Paper
2013Wafer-level technology for piezoresistive electro-mechanical transducer based on Carbon Nanotubes
Shaporin, A.; Hermann, S.; Kaufmann, C.; Schulz, S.E.; Gessner, T.; Voigt, S.; Mehner, J.; Hartmann, S.; Wunderle, B.; Bonitz, J.
Conference Paper
2012Out of plane capacitive transducer in air gap insulation microstructures technology for high precision monolithic 3-axis sensors
Reuter, D.; Nowack, M.; Shaporin, A.; Rockstroh, J.; Haas, S.; Bertz, A.; Mehner, J.; Gessner, T.
Conference Paper
2011Crack propagation in micro-chevron-test samples of direct bonded silicon-silicon wafers
Vogel, K.; Wuensch, D.; Shaporin, A.; Mehner, J.; Billep, D.; Wiemer, M.
Journal Article
2010Gütebestimmung von MEMS-Strukturen im Zeitbereich mittels Laser Doppler Vibrometer und einem Logarithmierer
Voigt, S.; Tenholte, D.; Franke, D.; Reuter, D.; Hiller, K.; Gessner, T.; Mehner, J.
Conference Paper
2009Novel test structures for characterization of microsystems parameters at wafer level
Shaporin, A.; Streit, P.; Specht, H.; Mehner, J.; Dötzel, W.
Conference Paper
2008Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
Forke, R.; Scheibner, D.; Mehner, J.E.; Gessner, T.; Dötzel, W.
Conference Paper, Journal Article
2008Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Doetzel, W.; Mehner, J.
Journal Article
2008Technology dependent design and characterization of silicon vibration sensors with linear tunable band selectivity
Shaporin, A.; Forke, R.; Dienel, M.; Naumann, M.; Scheibner, D.; Dötzel, W.; Mehner, J.
Conference Paper
2008Technology dependent design and characterization of silicon vibration sensors with linear tunable band selectivity
Shaporin, A.; Forke, R.; Dienel, M.; Naumann, M.; Scheibner, D.; Dötzel, W.; Mehner, J.
Conference Paper
2008Tunable Frequency Selective Vibration Detection with MEMS Force Coupled Oscillators
Forke, R.; Scheibner, D.; Doetzel, W.; Mehner, J.
Conference Paper
2007Adjustable Force Coupled Sensor-Actuator System for Low Frequency Resonant Vibration Detection
Forke, R.; Scheibner, D.; Mehner, J.; Gessner, T.; Dötzel, W.
Conference Paper
2007Application of higher order derivatives method to parametric simulation of MEMS
Kolchuzhin, V.; Mehner, J.; Gessner, T.; Doetzel, W.
Conference Paper
2007Determination of dimensional parameters in MEMS components by vibration analyses
Kurth, S.; Mehner, J.; Shaporin, A.V.; Michael, S.; Ebert, M.; Gessner, T.
Conference Paper
2007enversys - Towards a Competence Center for Advanced Engineering and Verification Techniques for Heterogeneous Systems
Specht, H.; Mehner, J.; Otto-Adamczak, T.; Cristiano, D.; Winkler, T.; Neugebauer, R.; Gessner, T.
Abstract
2007Laser Trimming of MEMS
Bleul, K.; Bonitz, J.; Haenel, J.; Kaufmann, C.; Keiper, B.; Mehner, J.; Petsch, T.
Conference Paper
2007Laser-Display-System auf Basis von MEMS-Scannern
Specht, H.; Kurth, S.; Kaufmann, C.; Hahn, R.; Dötzel, W.; Gessner, T.; Mehner, J.
Conference Paper
2007MEMS Characterization Technique Based on Special Designed Test-Structures
Shaporin, A.; Forke, R.; Doetzel, W.; Mehner, J.
Conference Paper
2007Performance and reliability test of MEMS optical scanners
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2007Spektrale Vibrationsmessung mit mikromechanischen kraftgekoppelten Silizium-Schwingern
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Dötzel, W.; Mehner, J.
Conference Paper
2007Test-Structure based MEMS Characterization Technique
Shaporin, A.V.; Hanf M.; Forke, R.; Mehner, J.; Gessner, T.; Dötzel, W.
Conference Paper
2006Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
Forke, R.; Scheibner, D.; Mehner, J.; Geßner, T.; Doetzel, W.
Conference Paper
2006Micromachined force coupled sensor actuator system for frequency selective vibration monitoring
Forke, R.; Scheibner, D.; Mehner, J.; Geßner, T.; Doetzel, W.
Conference Paper
2006Parametric finite element analysis for reduced order modeling of MEMS
Kolchuzhin, V.; Mehner, J.E.; Gessner, T.; Doetzel, W.
Conference Paper
2006Parametric simulation of MEMS based on automatic differentiation of finite element codes
Kolchuzhin, V.; Mehner, J.; Gessner, T.; Doetzel, W.
Conference Paper
2006Smart Systems Integration - Eine Herausforderung für zukünftige Mikro- und Nanotechnologien
Gessner, T.; Baum, M.; Hiller, K.; Mehner, J.; Wiemer, M.; Otto, T.; Saupe, R.; Nestler, J.
Conference Paper
2006A tunable resonant vibration measurement unit based on a micromachined force coupled sensor-actuator system
Mehner, J.; Gessner, T.; Forke, R.; Scheibner, D.; Doetzel, W.
Conference Paper
2005Analyzing and simulation of MEMS in VHDL-AMS based on reduced order FE-models
Schlegel, M.; Bennini, F.; Mehner, J.; Herrmann, G.; Mueller, D.; Dötzel, W.
Journal Article
2005Finite element based reduced order modeling for micro electro mechanical systems (MEMS)
Mehner, J.; Kolchuzhin, V.; Schaporin, A.; Dötzel, W.; Gessner, T.
Conference Paper
2005Geometrically parameterized finite element model of a silicon strain gauge
Kolchuzhin, V.; Mehner, J.; Doetzel, W.
Conference Paper
2005Mikromechanisches gekoppeltes Schwingsystem für frequenzselektive Vibrationsmessungen
Forke, R.; Mehner, J.; Doetzel, W.; Geßner, T.
Conference Paper
2005Model building, control design and practical implementation of a high precision, high dynamical MEMS acceleration sensor
Wolfram, H.; Schmiedel, R.; Hiller, K.; Aurich, T.; Günther, W.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2005A novel 24-kHz resonant scanner for high-resolution laser display
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2005Novel modeling techniques of MEMS sensors and actuators for electronic and system design in automotive applications
Mehner, J.E.; Shaporin, A.; Kolchuzhin, V.; Doetzel, W.; Gessner, T.
Conference Paper, Journal Article
2005Parametric model extraction for MEMS based on variational finite element techniques
Mehner, J.E.; Schaporin, A.; Kolchuzhin, V.; Doetzel, W.; Gessner, T.
Conference Paper
2005Ein resonanter 24 kHz Scanner für hoch auflösende Laserdisplays
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2005A spectral vibration detection system based on tunable micromechanical resonators
Scheibner, D.; Mehner, J.; Reuter, D.; Gessner, T.; Dötzel, W.
Conference Paper, Journal Article
2005Variational finite element technologies for parametric model
Mehner, J.; Schaporin, A.; Kolchuzhin, V.; Dötzel, W.; Gessner, T.
Conference Paper
2004Advanced Technologies for Microsystems Design
Mehner, J.; Dötzel, W.; Geßner, T.
Book Article
2004Characterization and self-test of electrostatically tunable resonators for frequency selective vibration measurements
Scheibner, D.; Mehner, J.; Reuter, D.; Kotarsky, U.; Geßner, T.; Dötzel, W.
Conference Paper, Journal Article
2004Electrostatic driven scanning micro mirrors applied in spectral sensing devices
Saupe, R.; Otto, T.; Mehner, J.; Kurth, S.; Kaufmann, C.; Geßner, T.
Journal Article
2004A novel microactuator based on the working principle of a step-by-step switchgear
Schröter, B.; Mehner, J.; Hiller, K.; Geßner, T.; Dötzel, W.
Conference Paper
2004Parametric variational finite element method for MEMS electrostatic problems
Shaporin, A.; Kolchuzhin, V.; Mehner, J.; Dötzel, W.
Conference Paper
2004Sensor-actuator-arrays for dynamic atomic force microscopy and their application in temporary MESFET devices
Müller, A.-D.; Müller, F.; Mehner, J.; Geßner, T.; Hietschold, M.
Conference Paper
2003Reduced order of fluid structural interactions in MEMS based on modal projection techniques
Mehner, J.; Dötzel, W.; Schauwecker, B.; Ostergard, D.
Conference Paper
2001Abstimmbare Siliziumsensoren zur Vibrationsanalyse mit elektromagnetischer Selbsttest-Funktionalität
Scheibner, D.; Mehner, J.; Brämer, B.; Gessner, T.; Dötzel, W.
Conference Paper
2001Micromachined pressure gauge for the vacuum range based on damping of a resonator
Kurth, S.; Hiller, K.; Zichner, N.; Mehner, J.; Iwert, T.; Biehl, S.; Dötzel, W.; Gessner, T.
Conference Paper
2000A resonance method for the determination of Young's modulus and residual stress of thin microstructures
Mehner, J.; Kehr, K.; Schröter, B.; Kaufmann, C.; Dötzel, W.; Gessner, T.
Conference Paper
1999Abstimmbare resonante Sensorarrays in oberflächennaher Si-Bulk-Mikromechanik
Wibbeler, J.; Steiniger, C.; Wolf, K.; Symanzik, H.; Dötzel, W.; Mehner, J.
Conference Paper
1999Analogously working micromirror arrays
Kehr, K.; Kurth, S.; Mehner, J.; Kaufmann, C.; Hahn, R.; Dötzel, W.; Gessner, T.
Conference Paper
1999Investigation of heat transfer in micromirrors
Kehr, K.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
1999Resonante Siliziumsensoren mit elektrostatischer Abstimmung für die Vibrationsanalyse
Wibbeler, J.; Küchler, M.; Steiniger, C.; Bertz, A.; Wolf, K.; Mehner, J.; Gessner, T.
Conference Paper
1999Synchronously working micromirrors for beam steering
Kurth, S.; Kehr, K.; Mehner, J.; Kaufmann, C.; Hahn, R.; Seidel, R.; Dötzel, W.; Gessner, T.
Conference Paper
1995Application of indentation testing devices for determination of elastic properties of micromechanical components
Petzold, M.; Heinzelmann, M.; Billep, D.; Mehner, J.
Conference Paper