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| 2019 | Enhanced Material Quality in SMART Moni-Si Block Cast Ingots by Introduction of Functional Defects
Riepe, S.; Krenckel, P.; Hayama, Y.; Hess, A.; Trötschler, T.; Kutsukake, K.; Maus, S.; Schindler, F.; Usami, N. | Conference Paper |
| 2019 | Impact of POCl3 Diffusion Process Parameters on Oxygen Precipitation in Czochralski-Grown Silicon
Maus, S.; Lohmüller, S.; Mu, D.; Schön, J.; Niewelt, T.; Wolf, A.; Preu, R. | Conference Paper |
| 2018 | Stress-free bonding technology with bondable thin glass layer for MEMS based pressure sensor
Hu, Xiaodong; MacKowiak, P.; Zhang, Y.; Ehrmann, O.; Lang, K.-D.; Schneider-Ramelow, M.; Hansen, U.; Maus, S.; Gyenge, O.; Meng, M.; Ngo, H.-D. | Conference Paper |
| 2017 | A novel wafer-level packaging method for a direct-backside-exposure pressure sensor anodically bonded to a silicon-interposer with a thin-film glass layer
Hu, X.; Bäuscher, M.; Mukhopadhyay, B.; Mackowiak, P.; Ehrmann, O.; Lang, K.-D.; Fritz, M.; Hansen, U.; Maus, S.; Gyenge, O.; Ngo, H.-D. | Conference Paper |
| 2016 | 20% efficient n-type Cz-Si MWT solar cells with adjustable reverse behavior
Lohmüller, E.; Werner, S.; Maus, S.; Brand, A.; Jäger, U.; Clement, F. | Journal Article |
| 2016 | Characterization of anodic bondable LTCC for wafer-level packaging
Hu, Xiaodong; Bäuscher, Manuel; MacKowiak, Piotr; Zhang, Yucheng; Hoelck, Ole; Walter, Hans; Ihle, Martin; Ziesche, Steffen; Hansen, Ulli; Maus, Simon; Gyenge, Oliver; Mukhopadhyay, Biswajit; Ehrmann, Oswin; Lang, Klausdieter; Ngo, Haduong | Conference Paper |
| 2016 | Investigation of residual stress effect during the anodic bonding process with different bondable materials for wafer level packaging design
Hu, X.; Meng, M.; Baeuscher, M.; Hansen, U.; Maus, S.; Gyenge, O.; Mackowiak, P.; Mukhopadhyay, B.; Vokmer, N.; Ehrmann, O.; Dieter Lang, K.; Ngo, H.-D. | Conference Paper |
| 2016 | Simplified fabrication of n-type Cz-Si HIP-MWT+ solar cells with 20% efficiency using laser structuring
Lohmüller, E.; Werner, S.; Maus, S.; Brand, A.; Jäger, U.; Nekarda, J.; Clement, F. | Journal Article, Conference Paper |
| 2014 | Klassifizierung von Liegepositionen mittels kapazitiver Näherungssensorik
Maus, Steffen
: Kuijper, Arjan (1. Gutachter); Rus, Silvia (2.Gutachterin) | Bachelor Thesis |
| 2013 | Hermetic wafer-level glass sealing enabling reliable low cost sensor packaging
Hansen, U.; Maus, S.; Töpper, M. | Conference Paper |
| 2011 | Low temperature glass-thin-films for use in power applications
Leib, J.; Gyenge, O.; Hansen, U.; Maus, S.; Hauck, K.; Ndip, I.; Toepper, M. | Conference Paper |
| 2011 | Wafer-level glass-caps for advanced optical applications
Leib, J.; Gyenge, O.; Hansen, U.; Maus, S.; Hauck, K.; Zoschke, K.; Toepper, M. | Conference Paper |
| 2010 | Anodic bonding at low voltage using microstructured borosilicate glass thin-films
Leib, J.; Hansen, U.; Maus, S.; Feindt, H.; Hauck, K.; Zoschke, K.; Toepper, M. | Conference Paper |
| 2010 | Hermetic BSG thin film coatings for harsh environment applications
Maus, S.; Hansen, U.; Leib, J.; Toepper, M. | Conference Paper |
| 2010 | Novel hermetic and low cost glass-capping technology for wafer-level-packaging of optical devices
Hansen, U.; Maus, S.; Leib, J.; Toepper, M. | Conference Paper |
| 2010 | Wafer-level glass capping with optical integration
Hansen, U.; Maus, S.; Leib, J.; Toepper, M. | Conference Paper |
| 2009 | A Hermetic Advanced Packaging Solution for Optical Devices Using a Glass-Capping Technology on Wafer-Level
Maus, S.; Hansen, U.; Leib, J.; Töpper, M. | Conference Paper, Journal Article |
| 2009 | Robust and Hermetic Borosilicate Glass Coatings by E-Beam Evaporation
Hansen, U.; Maus, S.; Leib, J.; Töpper, M. | Conference Paper, Journal Article |
| 2009 | Thin hermetic borosilicate glass layers for highly reliable chip-passivations in wafer-level-packaging
Hansen, U.; Leib, J.; Maus, S.; Gyenge, O.; Töpper, M. | Conference Paper |
| 2009 | Thin hermetic passivation of semiconductors using low temperature borosilicate glass - Benchmark of a new wafer-level packaging technology
Leib, J.; Gyenge, O.; Hansen, U.; Maus, S.; Fischer, T.; Zoschke, K.; Toepper, M. | Conference Paper |
| 2007 | Wafer-level glass capping as drop-in for miniaturized, advanced optical COB packaging
Seidemann, V.; Gyenge, O.; Hansen, U.; Heuser, T.; Maus, S.; Mund, D.; Espertshuber, K.; Wilke, R.; Leib, J. | Conference Paper |