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2020 | Bauelement und Verfahren zum Herstellen eines Bauelements Kirbach, Sven; Weinreich, Wenke; Mart, Clemens; Zybell, Sabine; Haufe, Nora | Patent |
2020 | Piezoelectric Response of Polycrystalline Silicon-Doped Hafnium Oxide Thin Films Determined by Rapid Temperature Cycles Mart, Clemens; Kämpfe, Thomas; Hoffmann, Raik; Eßlinger, Sophia; Kirbach, Sven; Kühnel, Kati; Czernohorsky, Malte; Eng, Lukas M.; Weinreich, Wenke | Journal Article |
2019 | Antiferroelektrische, eingebettete Dünnschichtkondensatoren als Energiespeicher für autarke Sensorelemente Czernohorsky, Malte; Weder, Andreas; Mart, Clemens; Falidas, K.; Kühnel, K.; Viegas, A.E.; Holland, H.-J.; Weinreich, W. | Conference Paper |
2019 | Doping hafnium oxide by in-situ precursor mixing Weinreich, Wenke; Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Czernohorsky, Malte | Presentation |
2019 | Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films Mart, Clemens; Kämpfe, Thomas; Müller, Johannes; Pätzold, Björn; Rudolph, Matthias; Czernohorsky, Malte; Weinreich, Wenke | Presentation |
2019 | Ferroelectric and pyroelectric properties of polycrystalline La-doped HfO2 thin films Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke | Journal Article |
2019 | High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates Kühnel, Kati; Czernohorsky, M.; Riedel, Steffen; Mart, Clemens; Weinreich, Wenke | Journal Article |
2019 | Pyroelectric Energy Conversion in Doped Hafnium Oxide (HfO2) Thin Films on Area-Enhanced Substrates Hanrahan, Brendan; Mart, Clemens; Kämpfe, Thomas; Czernohorsky, M.; Weinreich, Wenke; Smith, A. | Journal Article |
2019 | Sensoranordnung und Verfahren zum Herstellen einer Sensoranordnung Mart, Clemens; Polakowski, Patrick; Kämpfe, Thomas; Weinreich, Wenke | Patent |
2018 | 3D Analysis of Thin Layers by ToF-SIMS Mohammadian Kia, Alireza; Esmaeili, Sajjad; Mart, Clemens; Utriainen, Mikko; Haufe, Nora; Puurunen, Riikka L.; Weinreich, Wenke | Poster |
2018 | CMOS compatible pyroelectric applications enabled by doped HfO2 films on deep-trench structures Mart, Clemens; Weinreich, Wenke; Czernohorsky, Malte; Riedel, Stefan; Zybell, Sabine; Kühnel, Kati | Conference Paper |
2018 | Frequency domain analysis of pyroelectric response in silicon-doped hafnium oxide (HfO2) thin films Mart, Clemens; Czernohorsky, Malte; Zybell, Sabine; Kämpfe, Thomas; Weinreich, Wenke | Journal Article |
2018 | Layer thickness scaling and wake-up effect of pyroelectric response in Si-doped HfO2 Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke | Journal Article |
2018 | Reliable high-density energy storage in Si-doped HfO2 thin films on 3D-structures Kühnel, Kati; Riedel, Stefan; Mart, Clemens; Weinreich, Wenke | Presentation |
2018 | Wake-up effect of pyroelectric response in doped HfO2 Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke | Abstract |
2017 | Capacitance maximization of ultra-thin Si-capacitors by atomic layer deposition of anti-ferroelectric HfO2 in high aspect ratio structures Riedel, Stefan; Weinreich, Wenke; Mart, Clemens; Müller, Johannes | Presentation |
2017 | Enhanced reliability and capacitance stability of ZrO2-based decoupling capacitors by interface doping with Al2O3 Mart, Clemens; Zybell, Sabine; Riedel, Stefan; Czernohorsky, Malte; Seidel, Konrad; Weinreich, Wenke | Journal Article, Conference Paper |
2017 | Erhöhung der Zuverlässigkeit von High-k Dielektrika für integrierte hochkapazitive Kondensatoren Mart, Clemens : Weber, Jörg (Gutachter); Lakner, Hubert (Gutachter); Weinreich, Wenke (Betreuer) | Master Thesis |