Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2006Multilayer and single-surface reflectors for x-ray optics
Braun, S.; Mai, H.
Book Article
2006Multilayers for x-ray optical purposes
Braun, S.; Mai, H.
Book Article
2006X-ray optical systems
Braun, S.; Mai, H.
Book Article
2005Optisches System mit einer Strahlungsquelle fuer elektromagnetische Strahlung im extremen ultravioletten Bereich und einem reflektierenden Element
Braun, S.; Mai, H.
Patent
2004Konzeption und Erprobung eines Labor-Reflektometersystems für Röntgenoptiken
Beyer, E.; Loyen, L. van; Mai, H.; Holz, T.; Böttger, T.; Friedrich, W.
Report
2004Vorrichtung und Verfahren zur Ausbildung von Gradientenschichten auf Substraten in einer Vakuumkammer
Braun, S.; Mai, H.
Patent
2004Vorrichtung zur Erzeugung eines gepulsten Plasmas innerhalb einer Vakuumkammer mittels eines Festkoerpertargets, mit mindestens einer Debris-Blende
Loyen, L.v.; Boettger, T.; Braun, S.; Mai, H.
Patent
2003Grenzflächen-optimierte Mo/Si Multischichten als Reflektoren für den EUV Spektralbereich
Braun, S.; Foltyn, T.; Mai, H.; Moss, M.; Leson, A.
Journal Article
2003Lichtstarke Röntgenspiegel - Interferenz-Multischichten zwingen Röntgenstrahlen in produktive Bahnen
Braun, S.; Loyen, L. von; Mai, H.; Leson, A.
Journal Article
2003Multilayer and single-surface reflectors for X-ray optics
Braun, S.; Mai, H.
Book Article
2003Multilayer for X-ray optical purposes
Braun, S.; Mai, H.
Book Article
2003New laboratory EUV reflectometer for large optics using a laser plasma source
Loyen, L. van; Böttger, T.; Braun, S.; Mai, H.; Leson, A.; Scholze, F.; Tümmler, J.; Ulm, G.; Legall, H.; Nickles, P.-V.; Sandner, W.; Stiel, H.; Rempel, C.; Schulze, M.; Brutscher, J.; Macco, F.; Müllender, S.
Conference Paper
2003Thermal stability of Mo/Si multilayers with boron carbide interlayers
Böttger, T.; Meyer, D.C.; Paufler, P.; Braun, S.; Moss, M.; Mai, H.; Beyer, E.
Journal Article
2003X-ray optical systems
Braun, S.; Mai, H.
Book Article
2002High-precision nm-multilayers for EUV and x-ray optical application
Braun, S.; Dietsch, R.; Foltyn, T.; Holz, T.; Mai, H.; Moss, M.; Weißbach, D.; Leson, A.
Conference Paper
2002Microstructure of Mo/Si multilayers with barrier layers
Braun, S.; Mai, H.; Moss, M.; Scholz, R.
Conference Paper
2002Mo/Si multilayers with different barrier layers for applications as extreme ultraviolet mirrors
Braun, S.; Mai, H.; Moss, M.; Scholz, R.; Leson, A.
Journal Article
2001Comparative study of interfaces of Fe-Al multilayers prepared by direct and crossed-beam pulsed laser deposition
Levin, A.A.; Meyer, D.C.; Gorbunov, A.; Tselev, A.; Gawlitza, P.; Mai, H.; Pompe, W.; Paufler, P.
Journal Article
2001Mo/Si multilayers with different barrier layers for applications as EUV mirrors
Braun, S.; Mai, H.; Moss, M.; Scholz, R.
Conference Paper
2001Mo/Si-multilayers for EUV applications prepared by pulsed laser deposition (PLD)
Braun, S.; Dietsch, R.; Haidl, M.; Holz, T.; Mai, H.; Müllender, S.; Scholz, R.
Journal Article
2001Nanometer multilayer coatings for applications in the X-ray range
Leson, A.; Braun, S.; Dietsch, R.; Holz, T.; Mai, H.
Conference Paper
2001Nanometer-Multischichten für die Röntgenanalytik
Dietsch, R.; Holz, T.; Leson, A.; Mai, H.; Bahr, D.; Brügemann, L.; Lange, J.; Hofmann, A.; Pink, F.
Journal Article
2001Ultrapräzise nm-Schichtstapel als Grundlagen moderner Röntgentechnologien
Mai, H.; Dietsch, R.; Holz, T.
Journal Article
2000Application of Ni/C Goebel mirrors
Holz, T.; Dietsch, R.; Mai, H.; Brügemann, L.
Journal Article
2000Multilayer x-ray optics for energies E greater than 8 keV and their application in x-ray analysis
Dietsch, R.; Braun, S.; Holz, T.; Mai, H.; Scholz, R.; Brügemann, L.
Conference Paper
2000Nanostructured carbon films
Schultrich, B.; Scheibe, H.J.; Mai, H.
Journal Article
2000Ultrapräzise nm-Schichtstapel als Grundlage moderner Röntgentechnologien
Mai, H.; Dietsch, R.; Holz, T.
Conference Paper
2000Verfahren und Vorrichtung zur Innenwandbeschichtung von Hohlkoerpern, insbesondere kleiner Abmessungen
Dietsch, R.; Mai, H.; Mucha, A.
Patent
1999Herstellung und Charakterisierung nanodisperser Kohlenstoffschichten
Schultrich, B.; Scheibe, H.J.; Mai, H.
Conference Paper
1999Laterally graded multilayer optics for X-ray analysis
Bahr, D.; Brügemann, L.; Burgäzy, F.; Dietsch, R.; Göbel, H.; Holz, T.; Mai, H.; Michaelsen, C.; Ricardo, P.; Schuster, M.; Strömmer, M.
Conference Paper
1999Modern x-ray mirrors for perfect parallel beams
Mai, H.
Journal Article
1999Pulsed laser deposition of laterally graded Ni/C-multilayers and their application in parallel beam X-ray optics
Holz, T.; Dietsch, R.; Mai, H.; Brügemann, L.; Hopfe, S.; Scholz, R.; Krawietz, R.; Wehner, B.
Conference Paper
1998Characterization of pulsed laser deposited Ni/C-multilayers with hard and soft X-rays
Holz, T.; Dietsch, R.; Mai, H.; Meyer, C.F.; Scholz, R.
Book Article
1998High precision large area PLD of x-ray optical multilayers
Dietsch, R.; Holz, T.; Mai, H.; Meyer, C.F.; Scholz, R.; Wehner, B.
Conference Paper
1998Non-destructive characterization of mechanical and structural properties of amorphous diamond-like carbon films
Schneider, D.; Meyer, C.F.; Mai, H.; Schönreich, B.; Ziegele, H.; Scheibe, H.J.; Lifshitz, Y.
Journal Article
1997Diffusion-controlled morphological instability in Ni/C nanoscale multilayers
Bobeth, M.; Krawietz, R.; Mai, H.; Pompe, W.
Conference Paper
1997Morphological transition in Ni/C nanoscale multilayers
Bobeth, M.; Krawietz, R.; Mai, H.; Pompe, W.; Sewing, A.; Thomas, J.
Conference Paper
1996Large-area PLD of thin films by target shaping
Dietsch, R.; Mai, H.
Conference Paper
1996Ultrathin film deposition by pulsed laser ablation using crossed beams
Gorbunow, A.A.; Pompe, W.; Sewing, A.; Gaponov, S.V.; Akhsakhalyan, A.D.; Zabrodin, I.G.; Kaskov, I.A.; Klyenkov, E.B.; Morozov, A.P.; Salaschenko, N.N.; Dietsch, R.; Mai, H.; Völlmar, S.
Journal Article
1995Characterization of ultra smooth interfaces in Mo/Si-multilayers
Dietsch, R.; Holz, T.; Hopfe, S.; Kallis, N.; Mai, H.; Scholz, R.; Schöneich, B.; Wendrock, H.
Journal Article
1995Investigation of the thermal stability of NI/C multilayers by X-ray methods
Krawietz, R.; Wehner, B.; Meyer, D.; Richter, K.; Mai, H.; Dietsch, R.; Hopfe, S.; Scholz, R.; Pompe, W.
Conference Paper
1995Large-area pulsed laser deposition -PLD-
Dietsch, R.; Holz, T.; Mai, H.; Panzner, M.; Völlmar, S.
Conference Paper
1995Pulsed laser deposition - an advanced state for technical applications
Dietsch, R.; Holz, T.; Mai, H.; Panzner, M.; Völlmar, S.
Journal Article
1995Pulsed laser deposition of laterally graded X-ray optical multilayers on substrates of technical relevance
Dietsch, R.; Holz, T.; Krawietz, R.; Mai, H.; Schöneich, B.; Scholz, R.; Völlmar, S.; Wehner, B.
Conference Paper
1995Scale-up of pulsed laser deposition -PLD- for 4-wafer coating
Panzner, M.; Dietsch, R.; Holz, T.; Mai, H.; Völlmar, S.
Conference Paper
1995Synthese von -FeSi2-Schichten durch PLD
Panzner, M.; Mai, H.; Schöneich, B.; Witke, T.; Lenk, A.; Selle, B.; Lange, H.; Henrion, W.; Grötzschel, R.; Theresiak, A.
Conference Paper
1995X-ray optical properties of C/C-multilayers prepared by pulsed laser deposition -PLD-
Dietsch, R.; Holz, T.; Mai, H.; Hopfe, S.; Scholz, R.; Wehner, B.; Wendrock, H.
Conference Paper
1994Formation of ordered arrays of metal clusters by annealing of nm-period metal carbon multilayer films
Sewing, A.; Gorbunov, A.A.; Pompe, W.; Dietsch, R.; Mai, H.; Krawietz, R.; Wehner, B.
Conference Paper
1994Integration of a pulsed laser deposition source into a conventional MBE-system to produce multilayersystems on a NM-scale
Dietsch, R.; Holz, T.; Mai, H.; Völlmar, S.
Conference Proceedings
1994Postprocessing of nm-period multilayer structure
Gorbunov, A.A.; Pompe, W.; Dietsch, R.; Mai, H.; Panzner, M.; Krawietz, R.; Wehner, B.
Conference Paper
1994Pulsed laser deposition of x-Ray optical layer stacks with atomically flat interfaces
Mai, H.; Dietsch, R.; Holz, T.; Völlmar, S.; Hopfe, S.; Scholz, R.; Weißbrodt, P.; Krawietz, R.; Wehner, B.; Eichler, H.; Wendrock, H.
Conference Paper
1994Residual stress in Ni and C monolayers and multilayers produced by pulsed laser deposition
Kallis, N.; Mai, H.
Conference Paper
1994Theoretical description of pulse laser deposition as a new thin film technique
Völlmar, S.; Mai, H.; Dietsch, R.; Granse, G.; Lenk, A.
Conference Paper
1994Thermal ageiing of Ni/C multilayers prepared by pulsed laser deposition
Krawietz, R.; Wehner, B.; Kallis, N.; Dietsch, R.; Mai, H.
Conference Paper
1994VERFAHREN ZUR ABSCHEIDUNG DUENNER SCHICHTEN MITTELS LASERIMPULS-GASPHASENABSCHEIDUNG (LPVD).
Mai, H.; Dietsch, R.; Schubert, K.
Patent
1993Characterization of multilayer-interfaces by X-ray diffraction, TEM, SNMS and AES.
Hopfe, S.; Kallis, N.; Mai, H.; Pompe, W.; Scholz, R.; Völlmar, S.; Wehner, B.; Weißbrodt, P.
Conference Paper
1993Investigation of thermal aging of Ni/C-multilayers by X-ray methods.
Krawietz, R.; Wehner, B.; Sebald, T.; Mai, H.; Dietsch, R.
Conference Proceedings
1993Mikrostrukturierung von Polymerfolien mit UV-Laserstrahlung
Böttcher, M.; Mai, H.; Panzner, M.
Book Article
1993A modified plasma source for controlled layer thickness synthesis in laser pulse vapour deposition -LPVD-.
Dietsch, R.; Mai, H.; Pompe, W.; Völlmar, S.
Conference Paper
1993SPM investigation of metal/carbon-multilayer surfaces prepared by pulsed laser deposition -PLD-.
Dietsch, R.; Eichler, H.; Mai, H.; Pompe, W.
Conference Proceedings
1992Analytical observations and depth profile simulation in regular-d and graded-d metal/carbon multilayers prepared by laser pulse vapour deposition.
Dietsch, R.; Hopfe, S.; Mai, H.; Oertel, G.; Pompe, W.; Prokop, M.; Schöneich, B.; Völlmar, S.; Wehner, B.; Weißbrodt, P.; Werner, P.
Conference Paper
1992Laser pulse vapour deposition of metal-carbon superlattices for soft X-ray mirror applications
Dietsch, R.; Mai, H.; Pompe, W.; Schöneich, B.; Völlmar, S.; Hopfe, S.; Scholz, R.; Wehner, B.; Weißbrodt, P.; Wendrock, H.
Conference Paper
1992Manufacture and characterization of soft X-ray mirrors by laser ablation
Mai, H.; Pompe, W.
Conference Paper
1992Multischichten für die Optik im weichen Röntgengebiet
Dietsch, R.; Mai, H.; Pompe, W.; Völlmar, S.
Conference Paper
1992Preparation of soft X-ray monochromators by laser pulse vapour deposition -LPVD-
Mai, H.; Dietsch, R.; Pompe, W.
Conference Paper