Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1995In situ real time monitoring of film thickness and temperature during epitaxial growth by using Reflexion Supported Pyrometric Interferometry (RSPI)
Böbel, F.G.; Möller, H.; Hertel, B.; Märitz, J.; Wagner, J.; Chow, P.
Conference Paper
1995Temperature controlling with reflection supported interferometry (RSPI) at rapid thermal chemical vapor deposition-facilities (RTCVD)
Märitz, J.; Möller, H.; Böbel, F.G.; Ritter, G.; Weusthof, M.H.H.; Hollemann, J.
Conference Paper