Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Enhancement of vertical integration density by engineered BSOI wafers
Kaden, C.; Langa, S.; Ludewig, T.; Schönberger, A.; Herrmann, A.; Göbel, A.; Kolkovsky, V.; Jeroch, W.; Pufe, W.
Journal Article
2015Wafer level vacuum packaging of micro-mirrors with buried signal lines
Langa, S.; Drabe, C.; Herrmann, A.; Ludewig, T.; Rieck, A.; Flemming, A.; Kaden, C.
Journal Article
2014High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
Schmidt, Jan-Uwe; Dauderstädt, Ulrike; Dürr, Peter; Friedrichs, Martin; Hughes, Thomas; Ludewig, Thomas; Rudloff, Dirk; Schwaten, Tino; Trenkler, Daniela; Wagner, Michael; Wullinger, Ingo; Bergström, Andreas; Björnängen, Peter; Jonsson, Fredrik; Karlin, Tord; Rönnholm, Peter; Sandström, Torbjörn
Conference Paper
2013Room temperature bonding for vacuum applications: Climatic and long time tests
Langa, Sergiu; Utsumi, J.; Ludewig, Thomas; Drabe, Christian
Journal Article
2013Wafer level vacuum packaging of micro-mirrors with buried wiring
Langa, Sergiu; Drabe, Christian; Herrmann, Andreas; Ludewig, Thomas; Rieck, Andreas; Flemming, André; Kaden, Christiane
Poster
2009Fabrication of large-scale mono-crystalline silicon micro-mirror arrays using adhesive wafer transfer bonding
Zimmer, F.; Niklaus, F.; Lapisa, M.; Ludewig, T.; Bring, M.; Friedrichs, M.; Bakke, T.; Schenk, H.; Wijngaart, W. van der
Conference Paper
2009Kleben von Flächenlichtmodulatoren in Gehäuse
Dürr, P.; Dauderstädt, U.; Ludewig, T.; Wolschke, S.; Wagner, M.; Gesang, T.
Conference Paper
2008Planarity optimization of spatial light modulators
Duerr, P.; Wolschke, S.; Ludewig, T.; Dauderstädt, U.; Kunze, D.; Wagner, M.; Lakner, H.
Conference Paper
2006Anodic and direct bonding of Si and glass - Similarities and distinctions in applications
Gabriel, M.; Cetin, V.; Ludewig, T.; Eichler, M.
Conference Paper
1991Steuerungssystem für die automatisierte Leiterplattenfertigung
Mertins, K.; Ludewig, T.
Conference Paper
1987Rüstfreie Montage von elektronischen Baugruppen
Hetmanczyk, A.; Fischer, D.; Ludewig, T.; Seliger, G.; Spur, G.
Journal Article