Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2007Thermomechanical properties of thin organosilicate glass films treated with ultraviolet-assisted cure
Iacopi, F.; Beyer, G.; Travaly, Y.; Waldfried, C.; Gage, D.M.; Dauskardt, R.H.; Houthoofd, K.; Jacobs, P.; Adriaensens, P.; Schulze, K.; Schulz, S.E.; List, S.; Carlotti, G.
Journal Article
2001Benchmarking of available rigorous electromagnetic field (EMF) simulators for phase-shift mask applications
Kalus, C.; List, S.; Erdmann, A.; Gordon, R.; McCallum, M.; Semmler, A.
Journal Article
2000Optimizing edge topography of alternating phase shift masks using rigorous mask modelling
Friedrich, C.; Mader, L.; Erdmann, A.; List, S.; Gordon, R.; Kalus, C.; Griesinger, U.; Pforr, R.; Mathuni, J.; Ruhl, G.; Maurer, W.
Conference Paper
1998Atomistic analysis of the vacancy mechanism of impurity diffusion in silicon
List, S.; Ryssel, H.
Journal Article
1998Atomistic modeling of high-concentration effects of impurity diffusion in silicon
List, S.; Ryssel, H.
Journal Article
1998Integrated three-dimensional topography simulation and its application to dual-damascene processing
Bär, E.; Henke, W.; List, S.; Lorenz, J.
Conference Paper
1997Atomistic analysis of the vacancy diffusion mechanism
List, S.; Ryssel, H.
Conference Paper
1997Atomistische Beschreibung der Diffusion von Dotieratomen und Gitterleerstellen in Silicium
List, S.
Dissertation
1996Fortschrittliche Prozeßmodelle für 0,25 µm CMOS Technologien
Lorenz, J.; Bauer, H.; Burenkov, A.; List, S.; Pichler, P.
Book Article
1995Anatomistic evaluation of diffusion theories for the dopants in vacancy gradients
List, S.; Pichler, P.; Ryssel, H.
Journal Article
1995Atomistic evalution of diffusion theories for the diffusion of dopants in vacancy gradients
List, S.; Pichler, P.; Ryssel, H.
Journal Article
1995On the implantation models for simulation of the FOND devices
Burenkov, A.; List, S.; Lorenz, J.; Ryssel, H.
Conference Paper
1994Calculation of the transport matrix for the coupled diffusion of dopants and vacancies
List, S.; Pichler, P.; Ryssel, H.
Journal Article
1993Atomistic evaluation of diffusion theories for the diffusion of dopants in vacancy gradients
List, S.; Pichler, P.; Ryssel, H.
Conference Paper
1993Dopant migration caused by point defect gradients
Pichler, P.; List, S.
Conference Paper