Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014Multi-Level MOEMS structures for spatial light modulators
Mirabella, Simone; Friedrichs, Martin; Pufe, Wolfram; List, Matthias
Conference Paper
2013Integration of multi-level MOEMS structure on CMOS for spatial light modulators
Friedrichs, Martin; List, Matthias; Müller, Michael
Conference Paper
2012Monolithic integration of MOEMS on CMOS backplanes using surface micromachining techniques
List, Matthias; Friedrichs, Martin; Müller, Michael
Conference Paper