Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Pixelated phosphors for high-resolution and high-contrast white light sources. Erratum
Steudel, F.; Lisec, T.; Nolte, P.W.; Hofmann, U.; Wantoch, T. von; Lofink, F.; Schweizer, S.
Journal Article
2018Pixelated phosphors for high-resolution and high-contrast white light sources
Steudel, F.; Lisec, T.; Nolte, P.W.; Hofmann, U.; Wantoch, T. von; Lofink, F.; Schweizer, S.
Journal Article
2018Verfahren zum Herstellen einer magnetischen Struktur
Lisec, Thomas; Lofink, Fabian
Patent
2018Verfahren zum Herstellen eines Hohlraums mit poröser Struktur
Lisec, Thomas; Lofink, Fabian
Patent
2018Wärmeisoliertes Mikrosystem
Lisec, Thomas; Quenzer, Hans-Joachim
Patent
2017Herstellung neuartiger Mikrostrukturen für MEMS-Anwendungen durch Pulververfestigung mittels ALD
Chemnitz, S.; Reimer, T.; Lisec, T.
Conference Paper
2017Magnetically driven energy-harvester with monolithically integrated high-energy-density magnets
Lofink, F.; Tolstrup, V.; Lisec, T.; Reimer, T.; Piorra, A.; Meyners, D.; Quandt, E.; Wagner, B.
Conference Paper
2017MEMS switch with prolonged lifetime under hot switching conditions based on gold as contact material
Lisec, T.; Stoppel, F.; Kaden, D.; Heinrich, F.; Neumann, A.; Wagner, B.
Conference Paper
2017Nanodiamond resonators fabricated on 8'' Si substrates using adhesive wafer bonding
Lebedev, Vadim; Lisec, Thomas; Yoshikawa, Taro; Reusch, Markus; Iankov, Dimitre; Giese, Christian; Zukauskaite, Agne; Cimalla, Volker; Ambacher, Oliver
Journal Article
2017A Novel Fabrication Technique for MEMS Based on Agglomeration of Powder by ALD
Lisec, T.; Reimer, T.; Knez, M.; Chemnitz, S.; Schulz-Walsemann, A.V.; Kulkarni, A.
Journal Article
2017A novel technology for MEMS based on the agglomeration of powder by atomic layer deposition
Lisec, T.; Chemnitz, S.; Lofink, F.; Reimer, T.; Kulkarni, A.; Piechotta, G.; Wagner, B.
Conference Paper
2016Temperature-stable NdFeB micromagnets with high-energy density compatible with CMOS back end of line technology
Reimer, T.; Lofink, F.; Lisec, T.; Thede, C.; Chemnitz, S.; Wagner, B.
Journal Article
2016Verfahren zum Herstellen einer Vorrichtung mit einer dreidimensionalen magnetischen Struktur
Lisec, Thomas; Quenzer, Hans Joachim; Reimer, Tim
Patent
2015Bidirectionally actuated ohmic switches allowing sequential dual-contact operation for improved reliability
Stoppel, F.; Lisec, T.; Wagner, B.; Benecke, W.
Journal Article, Conference Paper
2015Mikro-Elektro-Mechanisches System und Verfahren zum Herstellen desselben
Lisec, Thomas; Stoppel, Fabian
Patent
2015Novel piezoelectric ohmic switches featuring fast switching and high contact forces
Stoppel, F.; Lisec, T.; Wagner, B.
Conference Paper
2015Piezoelektrische ohmsche MEMS-Schalter mit bidirektionalem Antrieb und geringen Schaltzeiten
Stoppel, F.; Lisec, T.; Wagner, B.; Benecke, W.
Conference Paper
2014Novel design concepts for piezoelectrically driven ohmic switches
Stoppel, F.; Lisec, T.; Wagner, B.
Journal Article, Conference Paper
2013Comparable measurements and modeling of piezoelectric thin films for MEMS application
Schmitz-Kempen, T.; Tiedke, S.; Mardilovich, P.; Sivaramakrishnan, S.; Lisec, T.; Stoppel, F.; Trolier-Mckinstry, S.; Muralt, P.
Conference Paper
2013Low temperature transient liquid phase bonding of Au/Sn and Cu/Sn electroplated material systems for MEMS wafer-level packaging
Marauska, S.; Claus, M.; Lisec, T.; Wagner, B.
Journal Article
2011Verfahren zum Erzeugen einer dreidimensionalen Struktur sowie dreidimensionale Struktur
Lisec, T.; Knez, M.
Patent
2009A correlation of capacitive RF-MEMS reliability to AlN dielectric film spontaneous polarization
Papandreou, E.; Papaioannou, G.; Lisec, T.
Journal Article
2009Highly tunable band-stop filters based on AlN RF MEM capacitive switches with inductive arms and zipping capacitive coupling
Fernandez-Bolanos, M.; Lisec, T.; Dehollain, C.; Tsamados, D.; Nicole, P.; Ionescu, A.M.
Conference Paper
2008Thermally stable distributed MEMS phase shifter for airborne and space applications
Fernandez-Bolanos, M.; Lisec, T.; Dainesi, P.; Ionescu, A.M.
Conference Paper
2007Dielectric charging process in A1N RF-MEMS capacitive switches
Papaioannou, G.J.; Lisec, T.
Conference Paper
2007Dielectric charging process in AlN RF-MEMS capacitive switches
Papaioannou, G.J.; Lisec, T.
Conference Paper
2007Electrostatic discharge failure analysis of capacitive RF MEMS switches
Ruan, J.; Nolhier, N.; Bafleur, M.; Bary, L.; Coccetti, F.; Lisec, T.; Plana, R.
Conference Paper, Journal Article
2007Failure mechanisms of AIN based RF-MEMS switches under DC and ESD stresses
Ruan, J.; Nolhier, N.; Bafleur, M.; Bary, L.; Mauran, N.; Coccetti, F.; Lisec, T.; Plana, R.
Conference Paper
2007A novel and efficient packaging technology for RF-MEMS devices
Theunis, F.; Lisec, T.; Reinert, W.; Bielen, J.; Yang, D.; Jongh, M. de; Krusemann, P.V.E.
Conference Paper
2007Preiswerter mikromechanischer RF-Schalter im hermetisch dichten Gehäuse
Lisec, T.
Journal Article
2006Circuit model and design of silicon-integrated CRLH-TLS analogically controlled by MEMS
Perruisseau-Carrier, J.; Lisec, T.; Skrivervik, A.K.
Journal Article
2005Integration aspects of RF-MEMS technologies
Lisec, T.; Wagner, B.
Conference Paper
2005Mikromechanisches HF-Schaltelement sowie Verfahren zur Herstellung
Lisec, T.; Huth, C.
Patent
2005Surface-micromachined capacitive RF switches and varactors
Lisec, T.; Huth, C.; Wagner, B.
Conference Paper
2004Characterization of microelectromechanical (MEMS) HF-switches
Shakhrai, M.V.; Huth, C.; Quenzer, J.; Lisec, T.
Conference Paper
2004Dielectric material impact on capacitive RF MEMS reliability
Lisec, T.; Huth, C.; Wagner, B.
Conference Paper
2004Dielectric material impact on capacitive RF MEMS reliability
Lisec, T.; Huth, C.; Wagner, B.
Conference Paper
2004Pipettensystem und Pipettenarray sowie Verfahren zum Befuellen eines Pipettensystems
Lisec, T.; Muehlmann, S.; Gruenzig, S.
Patent
2004Sensorchip fuer einen Differenzdrucksensor mit beidseitigem Ueberlastschutz
Lisec, T.; Merz, P.
Patent
2004Surface-micromachined capacitive RF switches with high thermal stability and low drift using Ni as structural material
Lisec, T.; Huth, C.; Shakhray, M.; Wagner, B.; Combi, C.
Conference Paper
2003Mikromechanische Pumpe
Lisec, T.; Wagner, B.
Patent
2003Vorrichtung zum Pipettieren einer Fluessigkeit
Lisec, T.
Patent
2001Mikrosensor zur Positionsmessung von Fluessigkeiten in Kapillaren
Lisec, T.; Quenzer, H.; Wagner, B.
Patent
2001Phloretin-induced changes of lipophilic ion transport across the plasma membrane of mammalian cells
Sukhorukov, V.; Kürschner, M.; Dilky, S.; Lisec, T.; Wagner, B.; Schenk, W.A.; Benz, R.; Zimmermann, U.
Journal Article
1999Adhaesionssteuerbare ultraminiaturisierte Oberflaechenstruktur
Fuhr, G.; Voigt, A.; Hagedorn, R.; Lisec, T.; Mueller, T.; Wagner, B.
Patent
1999Mikroventilanordnung, insbesondere fuer pneumatische Steuerungen
Lisec, T.; Wagner, B.; Kreutzer, M.
Patent
1997Mikroventil
Lisec, T.; Quenzer, H.J.; Wagner, B.
Patent
1996Bistable microvalve with pneumatically coupled membranes
Wagner, B.; Quenzer, H.J.; Hoerschelmann, S.; Lisec, T.; Jürss, M.
Conference Paper
1996Bistable microvalves for implantable drug delivery systems
Wagner, B.; Quenzer, H.J.; Hoerschelmann, S.; Lisec, T.; Jürss, M.
Conference Paper
1996A bistable pneumatic microswitch for driving fluidic components 2
Lisec, T.; Kreutzer, M.; Wagner, B.
Conference Paper
1996Novel potentiometric silicon sensor for medical devices
Schnakenberg, U.; Lisec, T.; Hintsche, R.; Kuna, I.; Uhlig, A.; Wagner, B.
Conference Paper
1996Surface micromachined piezoresistive pressure sensors with step-type and flat membrane structures
Lisec, T.; Kreutzer, M.; Wagner, B.
Journal Article
1996Thermally driven microvalve with buckling behaviour of pneumatic applications 2
Lisec, T.; Quenzer, H.J.; Kreutzer, M.; Hoerschelmann, S.; Wagner, B.; Benecke, W.
Journal Article
1995A bistable pneumatic microswitch for driving fluidic components
Lisec, T.; Kreutzer, M.; Wagner, B.
Conference Paper
1995Chemical microsensor systems for medical applications in catheters
Hintsche, R.; Kruse, C.; Uhlig, A.; Paeschke, M.; Lisec, T.; Schnakenberg, U.; Wagner, B.
Journal Article
1995Chip array electrodes for simultaneous stripping analysis of trace metals
Uhlig, A.; Paeschke, M.; Schnakenberg, U.; Lisec, T.; Hintsche, R.
Journal Article
1995A combined TMAH and HF sacrificial layer etching technique for surface micromachined devices
Lisec, T.; Kreutzer, M.; Wenk, B.; Wagner, B.
Conference Paper
1995A combined TMAH and HF sacrificial layer etching technique for surface micromachined devices
Lisec, T.; Kreutzer, M.; Wenk, B.; Wagner, B.
Conference Paper