Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2007Accurate parameter extraction for the simulation of direct structuring by ion beams
Beuer, S.; Rommel, M.; Lehrer, C.; Platzgummer, E.; Kvasnica, S.; Bauer, A.J.; Ryssel, H.
Conference Paper, Journal Article
2007Influence of the cantilever holder on the vibrations of AFM cantilevers
Rabe, U.; Hirsekorn, S.; Reinstädtler, M.; Sulzbach, T.; Lehrer, C.; Arnold, W.
Journal Article
2007UV nanoimprint materials: Surface energies, residual layers, and imprint quality
Schmitt, H.; Frey, L.; Ryssel, H.; Rommel, M.; Lehrer, C.
Journal Article
2007Verfahren zur Erzeugung von Submikrometer-Strukturen an einer ausgepraegten Topographie
Lehrer, C.; Beuer, S.; Engl, W.; Richter, C.; Sulzbach, T.
Patent
2006Accurate parameter extraction for the simulation of direct structuring by ion beams
Beuer, S.; Rommel, M.; Lehrer, C.; Platzgummer, E.; Kvasnica, S.; Bauer, A.J.; Ryssel, H.
Poster
2006Simulation of ion beam direct structuring for 3D nanoimprint template fabrication
Platzgummer, E.; Biedermann, A.; Langfischer, H.; Eder-Kapl, S.; Kuemmel, M.; Cernusca, S.; Loeschner, H.; Lehrer, C.; Frey, L.; Lugstein, A.; Bertagnolli, E.
Conference Paper, Journal Article
2005Effekte bei der Nanostrukturierung mittels fokussierter Ionenstrahlen
Lehrer, C.
Dissertation
2004Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams
Lehrer, C.; Frey, L.; Petersen, S.; Ryssel, H.; Schäfer, M.; Sulzbach, T.
Journal Article
2003Materialbearbeitung mittels fokussierter Ionenstrahlen zur TEM-Probenpräparation und Nanostrukturierung
Frey, L.; Lehrer, C.
Journal Article
2003Materials processing by focused ion-beams for TEM sample preparation and nanostructuring
Frey, L.; Lehrer, C.
Journal Article
2003Nanoscale effects in focused ion beam processing
Frey, L.; Lehrer, C.; Ryssel, H.
Journal Article
2003ROENTGENSTRAHLQUELLE MIT EINER KLEINEN BRENNFLECKGROESSE
Frey, L.; Lehrer, C.; Hanke, R.; Schmitt, P.
Patent
2001Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused Ion beam nano machining
Lehrer, C.; Frey, L.; Petersen, S.; Sulzbach, T.; Ohlsson, O.; Dziomba, T.; Danzebrink, H.U.; Ryssel, H.
Journal Article
2001High-resolution constant-height imaging with apertured silicon cantilever probes
Dziomba, T.; Danzebrink, H.U.; Lehrer, C.; Frey, L.; Sulzbach, T.; Ohlsson, O.
Journal Article
2001Limitations of focused ion beam nanomachining
Lehrer, C.; Frey, L.; Petersen, S.; Ryssel, H.
Journal Article
2000Defects and gallium - contamination during focused ion beam micro machining
Lehrer, C.; Frey, L.; Petersen, S.; Mizutani, M.; Takai, M.; Ryssel, H.
Conference Paper
2000Field emitter array fabricated using focused ion and electron beam induced reaction
Yavas, O.; Ochiai, C.; Takai, M.; Park, Y.K.; Lehrer, C.; Lipp, S.; Frey, L.; Ryssel, H.; Hosono, A.; Okuda, S.
Journal Article
2000Wafer conserving full range construction analysis for IC fabrication and process development based on FIB/dual beam inline application
Boit, C.; Dawes, N.; Dziesiaty, A.; Demm, E.; Ebersberger, B.; Frey, L.; Geyer, S.; Hirsch, A.; Lehrer, C.; Meis, P.; Kamolz, M.; Lezec, H.; Rettenmaier, H.; Tittes, W.; Treichler, R.; Weiland, R.; Zimmermann, H.
Conference Paper
1999AFM and STM investigation of carbon nanotubes produced by high energy ion irradiation of graphite
Biro, L.P.; Mark, G.I.; Gyulai, J.; Havancszak, K.; Lipp, S.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1999Comparison of beam-induced deposition using ion microprobe
Park, Y.S.; Nagai, T.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article, Conference Paper
1999Comparison of FIB-induced physical and chemical etching
Park, Y.K.; Paszti, F.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Conference Paper
1999Impurity incorporation during beam assisted processing analyzed using nuclear microprobe
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article, Conference Paper
1999Investigation of Cu films by focused ion beam induced deposition using nuclear microprobe
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1999Ion beam-treated silicon probes operated in transmission and cross-polarized reflection mode near- infrared scanning near-field optical microscopy (NIR-SNOM)
Dziomba, T.; Sulzbach, T.; Ohlsson, O.; Lehrer, C.; Frey, L.; Danzebrink, H.U.
Journal Article
1999Nano-slit probes for near-field optical microscopy fabricated by focused ion beams
Danzebrink, H.U.; Dziomba, T.; Sulzbach, T.; Ohlsson, T.; Lehrer, C.; Frey, L.
Journal Article
1998Fabrication of field emitter array using focused ion and electron beam induced reaction
Takai, M.; Kishimoto, T.; Morimoto, H.; Park, Y.K.; Lipp, S.; Lehrer, C.; Frey, L.; Ryssel, H.; Hosono, A.; Kawabuchi, S.
Conference Paper
1998Microanalysis of masklessly fabricated microstructures using nuclear microprobe
Park, Y.K.; Takai, M.; Nagai, T.; Kishimoto, T.; Seidl, A.; Lehrer, C.; Frey, L.; Ryssel, H.
Conference Paper, Journal Article
1998Microprobe analysis of Pt films deposited by beam induced reaction
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1996A comparison of focused ion beam and electron beam induced deposition processes
Lipp, S.; Frey, L.; Lehrer, C.; Demm, C.; Pauthner, S.; Ryssel, H.
Conference Paper, Journal Article
1996Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiO(x)) deposition
Lipp, S.; Frey, L.; Lehrer, C.; Frank, B.; Demm, E.; Pauthner, S.; Ryssel, H.
Journal Article