Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Formation of icosahedron twins during initial stages of heteroepitaxial diamond nucleation and growth
Lebedev, Vadim; Yoshikawa, Taro; Giese, Christian; Kirste, Lutz; Zukauskaite, Agne; Graff, Andreas; Meyer, Frank; Burmeister, Frank; Ambacher, Oliver
Journal Article
2019Influence of substrate holder configurations on bias enhanced nucleation area for diamond heteroepitaxy: Toward wafer-scale single-crystalline diamond synthesis
Yoshikawa, Taro; Herrling, David; Meyer, Frank; Burmeister, Frank; Nebel, Christoph E.; Ambacher, Oliver; Lebedev, Vadim
Journal Article
2019Material parameter extraction for complex AlScN thin film using dual mode resonators in combination with advanced microstructural analysis and finite element modeling
Parsapour, Fazel; Pashchenko, Vladimir; Kurz, Nicolas; Sandu, Cosmin Silviu; LaGrange, Thomas; Yamashita, Kaoru; Lebedev, Vadim; Muralt, Paul
Journal Article
2018Design of UV-crosslinked polymeric thin layers for encapsulation of piezoelectric ZnO nanowires for pressure-based fingerprint sensors
Bouvet-Marchand, Agathe; Graillot, Alain; Volk, János; Dauksevicius, Rolanas; Sturm, Chris; Grundmann, Marius; Saoutieff, Elise; Viana, Antoine; Christian, Björn; Lebedev, Vadim; Radó, J.; Lukács, István Endre; Nguyen, Khánh Q.; Grosso, David; Loubat, Cédric
Journal Article
2018Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films
Kurz, Nicolas; Parsapour, Fazel; Pashchenko, Vladimir; Kirste, Lutz; Lebedev, Vadim; Pascal, Nicolay; Muralt, Paul; Ambacher, Oliver
Conference Paper
2018Direct observation of spontaneous polarization induced electron charge transfer in stressed ZnO nanorods
Seifikar, Masoud; Christian, Björn; Volk, János; Radó, János; Lukács, István E.; Dauksevicius, Rolanas; Gaidys, Rimvydas; Lebedev, Vadim; Viana, Antoine; O'Reilly, Eoin P.
Journal Article
2018Graphene as an active virtually massless top electrode for RF solidly mounted bulk acoustic wave (SMR-BAW) resonators
Knapp, Marius; Hoffmann, René; Lebedev, Vadim; Cimalla, Volker; Ambacher, Oliver
Journal Article
2018Metallization design investigations for graphene as a virtually massless electrode material for 2.1 GHz solidly mounted (BAW-SMR) resonators
Knapp, Marius; Lebedev, Vadim; Cimalla, Volker; Ambacher, Oliver
Conference Paper
2018Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films
Lu, Yuan; Reusch, Markus; Kurz, Nicolas; Ding, Anli; Christoph, Tim; Kirste, Lutz; Lebedev, Vadim; Zukauskaite, Agne
Journal Article
2018Temperature cross-sensitivity of AlN-based flexural plate wave sensors
Reusch, Markus; Holc, Katarzyna; Lebedev, Vadim; Kurz, Nicolas; Zukauskaite, Agne; Ambacher, Oliver
Journal Article
2018Temperature dependence of the pyroelectric coefficient of AlScN thin films
Kurz, Nicolas; Lu, Yuan; Kirste, Lutz; Reusch, Markus; Zukauskaite, Agne; Lebedev, Vadim; Ambacher, Oliver
Journal Article
2017Flexural plate wave sensors with buried IDT for sensing in liquids
Reusch, Markus; Holc, Katarzyna; Zukauskaite, Agne; Lebedev, Vadim; Kurz, Nicolas; Ambacher, Oliver
Conference Paper
2017Nanodiamond resonators fabricated on 8'' Si substrates using adhesive wafer bonding
Lebedev, Vadim; Lisec, Thomas; Yoshikawa, Taro; Reusch, Markus; Iankov, Dimitre; Giese, Christian; Zukauskaite, Agne; Cimalla, Volker; Ambacher, Oliver
Journal Article
2017Piezo-aktuierte mikro-opto-elektro-mechanische Systeme für aktive Mikrooptik
Zürbig, Verena
: Ambacher, Oliver (Referent); Lebedev, Vadim (Betreuer)
2016Electrostatic self-assembly of diamond nanoparticles onto Al- and N-Polar sputtered aluminum nitride surfaces
Yoshikawa, Taro; Reusch, Markus; Zürbig, Verena; Cimalla, Volker; Lee, K.-H.; Kurzyp, M.; Arnault, J.-C.; Nebel, Christoph E.; Ambacher, Oliver; Lebedev, Vadim
Journal Article
2011Mikromechanischer Schalter
Lebedev, Vadim; Cimalla, Volker
2010Investigation of stress in AIN thin films for piezoelectric MEMS
Sah, R.E.; Kirste, Lutz; Baeumler, Martina; Hiesinger, P.; Cimalla, Volker; Lebedev, Vadim; Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Baumann, H.
Conference Paper
2010Piezoactuated diamond MEMS for RF and optical applications
Lebedev, Vadim; Cimalla, Volker
Book Article