Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Formation of icosahedron twins during initial stages of heteroepitaxial diamond nucleation and growth
Lebedev, Vadim; Yoshikawa, Taro; Giese, Christian; Kirste, Lutz; Zukauskaite, Agne; Graff, Andreas; Meyer, Frank; Burmeister, Frank; Ambacher, Oliver
Journal Article
2019Influence of substrate holder configurations on bias enhanced nucleation area for diamond heteroepitaxy: Toward wafer-scale single-crystalline diamond synthesis
Yoshikawa, Taro; Herrling, David; Meyer, Frank; Burmeister, Frank; Nebel, Christoph E.; Ambacher, Oliver; Lebedev, Vadim
Journal Article
2019Material parameter extraction for complex AlScN thin film using dual mode resonators in combination with advanced microstructural analysis and finite element modeling
Parsapour, Fazel; Pashchenko, Vladimir; Kurz, Nicolas; Sandu, Cosmin Silviu; LaGrange, Thomas; Yamashita, Kaoru; Lebedev, Vadim; Muralt, Paul
Journal Article
2018Design of UV-crosslinked polymeric thin layers for encapsulation of piezoelectric ZnO nanowires for pressure-based fingerprint sensors
Bouvet-Marchand, Agathe; Graillot, Alain; Volk, János; Dauksevicius, Rolanas; Sturm, Chris; Grundmann, Marius; Saoutieff, Elise; Viana, Antoine; Christian, Björn; Lebedev, Vadim; Radó, J.; Lukács, István Endre; Nguyen, Khánh Q.; Grosso, David; Loubat, Cédric
Journal Article
2018Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films
Kurz, Nicolas; Parsapour, Fazel; Pashchenko, Vladimir; Kirste, Lutz; Lebedev, Vadim; Pascal, Nicolay; Muralt, Paul; Ambacher, Oliver
Conference Paper
2018Direct observation of spontaneous polarization induced electron charge transfer in stressed ZnO nanorods
Seifikar, Masoud; Christian, Björn; Volk, János; Radó, János; Lukács, István E.; Dauksevicius, Rolanas; Gaidys, Rimvydas; Lebedev, Vadim; Viana, Antoine; O'Reilly, Eoin P.
Journal Article
2018Graphene as an active virtually massless top electrode for RF solidly mounted bulk acoustic wave (SMR-BAW) resonators
Knapp, Marius; Hoffmann, René; Lebedev, Vadim; Cimalla, Volker; Ambacher, Oliver
Journal Article
2018Metallization design investigations for graphene as a virtually massless electrode material for 2.1 GHz solidly mounted (BAW-SMR) resonators
Knapp, Marius; Lebedev, Vadim; Cimalla, Volker; Ambacher, Oliver
Conference Paper
2018Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films
Lu, Yuan; Reusch, Markus; Kurz, Nicolas; Ding, Anli; Christoph, Tim; Kirste, Lutz; Lebedev, Vadim; Zukauskaite, Agne
Journal Article
2018Temperature cross-sensitivity of AlN-based flexural plate wave sensors
Reusch, Markus; Holc, Katarzyna; Lebedev, Vadim; Kurz, Nicolas; Zukauskaite, Agne; Ambacher, Oliver
Journal Article
2018Temperature dependence of the pyroelectric coefficient of AlScN thin films
Kurz, Nicolas; Lu, Yuan; Kirste, Lutz; Reusch, Markus; Zukauskaite, Agne; Lebedev, Vadim; Ambacher, Oliver
Journal Article
2017Flexural plate wave sensors with buried IDT for sensing in liquids
Reusch, Markus; Holc, Katarzyna; Zukauskaite, Agne; Lebedev, Vadim; Kurz, Nicolas; Ambacher, Oliver
Conference Paper
2017Microstructure and mechanical properties of stress-tailored piezoelectric AlN thin films for electro-acoustic devices
Reusch, Markus; Cherneva, Sabina; Lu, Yuan; Zukauskaite, A.; Kirste, L.; Holc, K.; Datcheva, M.; Stoychev, D.; Lebedev, V.; Ambacher, O.
Journal Article
2017Nanodiamond resonators fabricated on 8'' Si substrates using adhesive wafer bonding
Lebedev, Vadim; Lisec, Thomas; Yoshikawa, Taro; Reusch, Markus; Iankov, Dimitre; Giese, Christian; Zukauskaite, Agne; Cimalla, Volker; Ambacher, Oliver
Journal Article
2017Piezo-aktuierte mikro-opto-elektro-mechanische Systeme für aktive Mikrooptik
Zürbig, Verena
: Ambacher, Oliver (Referent); Lebedev, Vadim (Betreuer)
Dissertation
2016Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices
Reusch, M.; Holc, K.; Pletschen, W.; Kirste, L.; Zukauskaité, A.; Yoshikawa, T.; Iankov, D.; Ambacher, O.; Lebedev, V.
Journal Article
2016Electro-optical characterization of IC compatible microcantilevers
Pérez-Campos, A.; Iriarte, G.F.; Lebedev, V.; Calle, F.
Journal Article
2016Electrostatic self-assembly of diamond nanoparticles onto Al- and N-Polar sputtered aluminum nitride surfaces
Yoshikawa, Taro; Reusch, Markus; Zürbig, Verena; Cimalla, Volker; Lee, K.-H.; Kurzyp, M.; Arnault, J.-C.; Nebel, Christoph E.; Ambacher, Oliver; Lebedev, Vadim
Journal Article
2016Enhanced actuation of nanocrystalline diamond microelectromechanical disk resonators with AlN layers
Yoshikawa, T.; Reusch, M.; Holc, K.; Iankov, D.; Zürbig, V.; Zukauskaité, A.; Nebel, C.E.; Ambacher, O.; Lebedev, V.
Journal Article
2016Piezo-force and vibration analysis of ZnO nanowire arrays for sensor application
Christian, B.; Volk, J.; Lukács, I.E.; Sautieffc, E.; Sturm, C.; Graillot, A.; Dauksevicius, R.; O'Reilly, E.; Ambacher, O.; Lebedev, V.
Journal Article, Conference Paper
2016Piezoelectric AlN films for FPW sensors with improved device performance
Reusch, M.; Holc, K.; Kirste, L.; Katus, P.; Reindl, L.; Ambacher, O.; Lebedev, V.
Journal Article, Conference Paper
2016Piezoelectric AlN films for FPW sensors with improved device performance
Reusch, M.; Holc, K.; Kirste, L.; Katus, P.; Reindl, L.; Ambacher, O.; Lebedev, V.
Journal Article, Conference Paper
2016Pinhole-free ultra-thin nanocrystalline diamond film growth via electrostatic self-assembly seeding with increased salt concentration of nanodiamond colloids
Yoshikawa, T.; Gao, F.; Zürbig, V.; Giese, C.; Nebel, C.E.; Ambacher, O.; Lebedev, V.
Journal Article, Conference Paper
2016Point-group sensitive orientation mapping using EBSD
Winkelmann, A.; Nolze, G.; Himmerlich, M.; Lebedev, V.; Reichmann, A.
Conference Paper
2016UV-crosslinked polymeric materials for encapsulation of ZnO nanowires in piezoelectric fingerprint sensors
Bouvet-Marchand, A.; Loubat, M.; Graillot, A.; Volk, J.; Dauksevicius, R.; Saoutieff, E.; Viana, A.; Christian, B.; Lebedev, V.; Sturm, C.; Loubat, C.
Journal Article, Conference Paper
2015Aluminium nitride membranes with embedded buried IDT electrodes for novel flexural plate wave devices
Reusch, M.; Katus, P.; Holc, K.; Pletschen, W.; Kirste, L.; Zürbig, V.; Iankov, D.; Reindl, L.; Ambacher, O.; Lebedev, V.
Conference Paper
2015Aluminiumnitrid membranen mit vergrabenen IDT für neuartige membranbiegeschwinger
Reusch, M.; Katus, P.; Schilling, C.; Holc, K.; Pletschen, W.; Kirste, L.; Ambacher, O.; Reindl, L.; Lebedev, V.
Conference Paper
2015Appropriate salt concentration of nanodiamond colloids for electrostatic self-assembly seeding of monosized individual diamond nanoparticles on silicon dioxide surfaces
Yoshikawa, T.; Zürbig, V.; Gao, F.; Hoffmann, R.; Nebel, C.E.; Ambacher, O.; Lebedev, V.
Journal Article
2015Enhanced pressure response in ZnO nanorods due to spontaneous polarization charge
Seifikar, M.; O'Reilly, E.P.; Christian, B.; Lebedev, V.; Volk, J.; Erdélyi, R.; Lukács, I.E.; Dauksevicious, R.; Gaidys, R.
Conference Paper
2015Genesis of "solitary Cations" Induced by Atomic Hydrogen
Pettinari, G.; Filippone, F.; Polimeni, A.; Mattioli, G.; Patanè, A.; Lebedev, V.; Capizzi, M.; Amore Bonapasta, A.
Journal Article
2015Piezoelektrisch aktuierte AlN/SiN-Mikrolinsen
Fries, J.
: Ambacher, O. (Referent); Lebedev, V. (Referent); Zürbig, V. (Betreuer)
Master Thesis
2015Tunable multisegment Si(x)N(y)/AlN piezo lenses for wavefront correction
Zürbig, V.; Pätz, D.; Fries, J.; Bichra, M.; Pletschen, W.; Holc, K.; Reusch, M.; Nebel, C.E.; Sinzinger, S.; Ambacher, O.; Lebedev, V.
Conference Paper
2014Elastic properties of ultrathin diamond/AlN membranes
Zürbig, V.; Hees, J.; Pletschen, W.; Sah, R.E.; Wolfer, M.; Kirste, L.; Heidrich, N.; Nebel, C.; Ambacher, O.; Lebedev, V.
Journal Article
2014Nano-diamond based spheres for radio frequency electromechanical resonators
Lebedev, V.; Iankov, D.; Heidrich, N.; Zürbig, V.; Wild, C.; Cimalla, V.; Ambacher, O.
Journal Article
2014PostCMOS compatible sacrificial layers for aluminum nitride microcantilevers
Pérez-Campos, A.; Iriarte, G.F.; Lebedev, V.; Calle, F.
Journal Article
2014Processing of nanoscale gaps for boron-doped nanocrystalline diamond based MEMS
Iankov, D.; Zürbig, V.; Pletschen, W.; Giese, C.; Iannucci, R.; Ambacher, O.; Lebedev, V.
Journal Article, Conference Paper
2013Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations
Heidrich, N.; Knöbber, F.; Polyakov, V.M.; Cimalla, V.; Pletschen, W.; Sah, R.E.; Kirste, L.; Leopold, S.; Hampl, S.; Ambacher, O.; Lebedev, V.
Journal Article
2013Crystallographic texture of submicron thin aluminum nitride films on molybdenum electrode for suspended micro and nanosystems
Sah, R.E.; Kirste, L.; Kirmse, H.; Mildner, M.; Wilde, L.; Kopta, S.; Knöbber, F.; Krieg, M.; Cimalla, V.; Lebedev, V.; Ambacher, O.
Journal Article
2013Enhanced mechanical performance of AlN/nanodiamond micro-resonators
Heidrich, N.; Iankov, D.; Hees, J.; Pletschen, W.; Sah, R.E.; Kirste, L.; Zuerbig, V.; Nebel, C.; Ambacher, O.; Lebedev, V.
Journal Article
2013Nano-diamond vacuum MEMS for RF applications
Heidrich, N.; Hees, J.; Zürbig, V.; Iankov, D.; Pletschen, W.; Sah, R.E.; Raynor, B.; Kirste, L.; Nebel, C.E.; Ambacher, O.; Lebedev, V.
Conference Paper
2013Piezo-actuated tunable diamond/AlN micro lenses
Zürbig, V.; Pätz, D.; Pletschen, W.; Hees, J.; Sah, R.E.; Kirste, L.; Heidrich, N.; Cimalla, V.; Nebel, C.; Ambacher, O.; Lebedev, V.
Conference Paper
2013Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films
Hees, J.; Heidrich, N.; Pletschen, W.; Sah, R.E.; Wolfer, M.; Williams, O.A.; Lebedev, V.; Nebel, C.E.; Ambacher, O.
Journal Article
2013Piezoelectrically actuated diamond cantilevers for high-frequency applications
Heidrich, N.; Zürbig, V.; Iankov, D.; Pletschen, W.; Sah, R.E.; Raynor, B.; Kirste, L.; Nebel, C.E.; Ambacher, O.; Lebedev, V.
Journal Article
2013Transparent diamond electrodes for tunable micro-optical devices
Zürbig, V.; Pletschen, W.; Hees, J.; Sah, R.E.; Kirste, L.; Heidrich, N.; Nebel, C.E.; Ambacher, O.; Lebedev, V.
Journal Article
2012Device for converting mechanical energy into electrical energy for autonomous power supply of e.g. electronic components of electric circuit of electrical device, has moving element with membrane whose side includes concave and convex areas
Lebedev, V.; Cimalla, V.
Patent
2012Electrostatically coupled vibration modes in unimorph complementary mircocantilevers
Lebedev, V.; Heidrich, N.; Knöbber, F.; Sah, R.E.; Pletschen, W.; Raynor, B.; Polyakov, V.M.; Cimalla, V.; Ambacher, O.
Journal Article
2012Evaluation of AlN material properties through vibration analysis of thin membranes
Lebedev, V.; Knöbber, F.; Heidrich, N.; Sah, R.E.; Pletschen, W.; Cimalla, V.; Ambacher, O.
Journal Article
2012Evaluation on AIN material properties through vibration analysis of thin membranes
Lebedev, V.; Knöbber, F.; Heidrich, N.; Sah, R.E.; Pletschen, W.; Cimalla, V.; Ambacher, O.
Journal Article, Conference Paper
2012Identification of four-hydrogen complexes in In-rich InxGa1-xN (x > 0.4) alloys using photoluminescence, x-ray absorption, and density functional theory
Luca, M. de; Pettinari, G.; Ciatto, G.; Amidani, L.; Filippone, F.; Polimeni, A.; Fonda, E.; Boscherini, F.; Bonapasta, A.A.; Giubertoni, D.; Knübel, A.; Lebedev, V.; Capizzi, M.
Journal Article
2012Nerve cell response to inhibitors recorded with an aluminum-galliumnitride/galliumnitride field-effect transistor
Gebinoga, M.; Mai, P.; Donahue, M.; Kittler, M.; Cimalla, I.; Lübbers, B.; Klett, M.; Lebedev, V.; Silveira, L.; Singh, S.; Schober, A.
Journal Article
2012SEMICONDUCTOR STRUCTURAL ELEMENT AND METHOD FOR THE PRODUCTION THEREOF
Cimalla, V.; Lebedev, V.
Patent
2012Static and dynamic characterization of AlN and nanocrystalline diamond membranes
Knöbber, F.; Zürbig, V.; Heidrich, N.; Hees, J.; Sah, R.E.; Baeumler, M.; Leopold, S.; Pätz, D.; Ambacher, O.; Lebedev, V.
Journal Article
2012X-ray absorption spectra of In(x)Ga(1-x)N alloys with insight from atom-specific simulations
Amidani, L.; Filippone, F.; Bonapasta, A.A.; Ciatto, G.; Lebedev, V.; Knübel, A.; Boscherini, F.
Journal Article
2011AlGaN/GaN sensors for direct monitoring of nerve cell response to inhibitors
Cimalla, I.; Gebinoga, M.; Schober, A.; Polyakov, V.M.; Lebedev, V.; Cimalla, V.
Book Article
2011AlN based microgenerators for powering implantable sensor devices
Bludau, O.; Röhlig, C.-C.; Knöbber, F.; Kirste, L.; Sah, R.E.; Driad, R.; Pletschen, W.; Lebedev, V.; Cimalla, V.
Journal Article, Conference Paper
2011AlN-basierte mikroelektromechanische Strukturen für Implantate
Heidrich, N.; Knöbber, F.; Hampl, S.; Pletschen, W.; Sah, R.E.; Cimalla, V.; Lebedev, V.; Ambacher, O.
Conference Paper
2011Biocompatible AlN-based piezo energy harvesters for implants
Heidrich, N.; Knöbber, F.; Sah, R.E.; Pletschen, W.; Hampl, S.; Cimalla, V.; Lebedev, V.
Conference Paper
2011Dynamic characterization of thin aluminum nitride microstructures
Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Sah, R.E.; Williams, O.A.; Kirste, L.; Leopold, S.; Pätz, D.; Cimalla, V.; Ambacher, O.; Lebedev, V.
Journal Article, Conference Paper
2011Electron and hole accumulation in InN/InGaN heterostructures
Lebedev, V.; Polyakov, V.M.; Knübel, A.; Aidam, R.; Kirste, L.; Cimalla, V.; Granzner, R.; Schwierz, F.; Ambacher, O.
Journal Article, Conference Paper
2011Low-temperature grown high-quality piezoelectric AIN Film for sensor application
Sah, R.E.; Bludau, O.; Röhlig, C.-C.; Kirste, L.; Cimalla, V.; Lebedev, V.
Conference Paper
2011Mikromechanischer Schalter
Lebedev, Vadim; Cimalla, Volker
Patent
2010AlGaN/GaN based heterostructures for MEMS and NEMS applications
Cimalla, V.; Röhlig, C.-C.; Lebedev, V.; Ambacher, O.; Tonisch, K.; Niebelschütz, F.; Brueckner, K.; Hein, M.A.
Conference Paper
2010Diamond/AlN thin films for optical applications
Knöbber, F.; Bludau, O.; Williams, O.A.; Sah, R.E.; Kirste, L.; Baeumler, M.; Leopold, S.; Pätz, D.; Nebel, C.E.; Ambacher, O.; Cimalla, V.; Lebedev, V.
Conference Paper
2010Impact of Al content on transport properties of two-dimensional electron gas in GaN/Al(x)Ga(1-x)N/GaN heterostructures
Polyakov, V.M.; Cimalla, V.; Lebedev, V.; Köhler, K.; Müller, S.; Waltereit, P.; Ambacher, O.
Journal Article
2010Impact of n-type doping on the terahertz surface emission from c-plane InN
Polyakov, V.M.; Cimalla, V.; Lebedev, V.; Schwierz, F.
Journal Article, Conference Paper
2010Investigation of stress in AIN thin films for piezoelectric MEMS
Sah, R.E.; Kirste, Lutz; Baeumler, Martina; Hiesinger, P.; Cimalla, Volker; Lebedev, Vadim; Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Baumann, H.
Conference Paper
2010Nanosensors for label-free measurement of sodium ion fluxes of neuronal cells
Gebinoga, M.; Silveira, L.; Cimalla, I.; Dumitrescu, A.; Kittler, M.; Lübbers, B.; Becker, A.; Lebedev, V.; Schober, A.
Conference Paper, Journal Article
2010Piezoactuated diamond MEMS for RF and optical applications
Lebedev, Vadim; Cimalla, Volker
Book Article
2010Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering
Sah, R.E.; Kirste, L.; Baeumler, M.; Hiesinger, P.; Cimalla, V.; Lebedev, V.; Baumann, H.; Zschau, H.-E.
Journal Article
2010Strain relaxation in highly mismatched hexagonal heterosystems
Lebedev, V.
Journal Article
2010Transport properties of InN
Cimalla, V.; Lebedev, V.; Ambacher, O.; Polyakov, V.M.; Schwierz, F.; Niebelschütz, F.; Ecke, G.; Myers, T.H.; Schaff, W.J.
Book Article
2009Carrier mass measurements in degenerate indium nitride
Pettinari, G.; Polimeni, A.; Capizzi, M.; Blokland, J.H.; Christianen, P.C.M.; Maan, J.C.; Lebedev, V.; Cimalla, V.; Ambacher, O.
Journal Article
2009Determination of the composition of In(x)Ga(1-x)N from strain measurements
Morales, F.M.; Gonzales, D.; Lozano, J.G.; García, R.; Hauguth-Frank, S.; Lebedev, V.; Cimalla, V.; Ambacher, O.
Journal Article
2009Halbleiterbauelement und Verfahren zu seiner Herstellung
Lebedev, V.; Cimalla, V.
Patent
2009Nanocrystalline diamond microelectromechanical resonators
Sillero, E.; Williams, O.A.; Lebedev, V.; Cimalla, V.; Röhlig, C.-C.; Nebel, C.E.; Calle, F.
Conference Paper
2009Piezoelectrically actuated AlN and Nanodiamond microstructures
Knöbber, F.; Sillero, E.; Röhlig, C.-C.; Williams, O.A.; Sah, R.E.; Kirste, L.; Cimalla, V.; Nebel, C.E.; Calle, F.; Lebedev, V.
Conference Paper
2009Static and dynamic determination of the mechanical properties of nanocrystalline diamond micromachined structures
Sillero, E.; Williams, O.A.; Lebedev, V.; Cimalla, V.; Röhlig, C.-C.; Nebel, C.E.; Calle, F.
Journal Article
2009Transport characteristics of indium nitride (InN) films grown by plasma assisted molecular beam epitaxy (PAMBE)
Knübel, A.; Aidam, R.; Cimalla, V.; Kirste, L.; Baeumler, M.; Leancu, C.-C.; Lebedev, V.; Wallauer, J.; Walther, M.; Wagner, J.
Conference Paper, Journal Article
2009Wide band gap based MEMS for harsh environment applications
Cimalla, V.; Lebedev, V.; Röhlig, C.-C.; Ambacher, O.; Niebelschütz, F.; Tonisch, K.; Pezoldt, J.; Brueckner, K.; Hein, M.
Conference Paper
2008Electronic and photoconductive properties of ultrathin InGaN photodetectors
Lebedev, V.; Polyakov, V.M.; Hauguth-Frank, S.; Cimalla, V.; Wang, C.-Y.; Ecke, G.; Schwierz, F.; Schober, A.; Lozano, J.G.; Morales, F.M.; Gonzales, D.; Ambacher, O.
Journal Article
2008Experimental evidence of different hydrogen donors in n-type InN
Pettinari, G.; Masia, F.; Capizzi, M.; Polimeni, A.; Losurdo, M.; Bruno, G.; Kim, T.H.; Choi, S.; Brown, A.; Lebedev, V.; Cimalla, V.; Ambacher, O.
Journal Article
2008Highly efficient THz emission from differently grown InN at 800 nm and 1060 nm excitation
Matthäus, G.; Cimalla, V.; Pradarutti, B.; Riehemann, S.; Notni, G.; Lebedev, V.; Ambacher, O.; Nolte, S.; Tünnermann, A.
Journal Article
2008Sapphire-GaN-based planar integrated free-space optical system
Hofmann, M.; Hauguth-Frank, S.; Lebedev, V.; Ambacher, O.; Sinzinger, S.
Journal Article
2008Structural and photoconducting properties of MBE and MOCVD grown III-nitride double-heterostructures
Hauguth-Frank, S.; Lebedev, V.; Tonisch, K.; Romanus, H.; Kups, T.; Büchner, H.-J.; Jäger, G.; Ambacher, O.; Schober, A.
Conference Paper
2007Analysis of nanostructures by means of Auger electron spectroscopy
Ecke, G.; Cimalla, V.; Tonisch, K.; Lebedev, V.; Romanus, H.; Ambacher, O.; Liday, J.
Journal Article
2007High efficient terahertz emission from InN surfaces
Cimalla, V.; Pradarutti, B.; Matthäus, G.; Brückner, C.; Riehemann, S.; Notni, G.; Tünnermann, A.; Lebedev, V.; Ambacher, O.
Journal Article
2006Detailed study of differently grown InN wavers as strong THz surface emitters excited at 800 nm and 1060 nm
Matthäus, G.; Pradarutti, B.; Brückner, C.; Riehemann, S.; Notni, G.; Nolte, S.; Cimalla, V.; Lebedev, V.; Ambacher, O.; Tünnermann, A.
Conference Paper
2006InN as THz emitter excited at 1060 nm and 800 nm
Pradarutti, B.; Matthäus, G.; Brückner, C.; Riehemann, S.; Notni, G.; Cimalla, V.; Lebedev, V.; Ambacher, O.; Tünnermann, A.
Conference Paper