Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2010Highly sensitive wavefront sensor for visual inspection of bare and patterned silicon wafers
Lazareva, I.; Nutsch, A.; Schellenberger, M.; Pfitzner, L.; Frey, L.
Conference Paper
2010Optical inspection of flat reflective surfaces by a wave front sensor
Lazareva, I.; Nutsch, A.; Pfitzner, L.; Frey, L.
Conference Paper
2010Verfahren zur Bestimmung der Topografie einer Oberfläche eines Objekts
Lazareva, I.; Nutsch, A.
Patent
2009Highly sensitive wavefront sensor for characterization of micro- to nanometer-scale surface flatness deviations
Lazareva, I.; Nutsch, A.; Pfitzner, L.; Frey, L.
Conference Paper
2009Wave front sensor for highly accurate characterization of flatness on wafer surfaces
Nutsch, A.; Bucourt, S.; Grandin, T.; Lazareva, I.; Pfitzner, L.
Conference Paper