Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2005Optical coatings for excimer laser applications
Kaiser, N.; Lauth, H.; Bernitzki, H.
Book Article
2004EUV and soft X-ray multilayer optics
Kaiser, N.; Yulin, S.; Feigl, T.; Bernitzki, H.; Lauth, H.
Conference Paper
2002Design and fabrication of broadband EUV multilayer mirrors
Kuhlmann, T.; Yulin, S.A.; Feigl, T.; Kaiser, N.; Bernitzki, H.; Lauth, H.
Conference Paper
2001Heat resistance of EUV multilayer mirrors for long-time applications
Feigl, T.; Lauth, H.; Yulin, S.; Kaiser, N.
Journal Article
2000Extreme ultraviolet light generation based on laser-produced plasmas (LPP) and gas-discharge-based pinch plasmas: A comparison of different concepts
Schriever, G.; Rahe, M.; Neff, W.; Bergmann, K.; Lebert, R.; Lauth, H.; Basting, D.
Conference Paper
2000Extreme-ultraviolet source development: a comparison of different concepts
Schriever, G.; Rahe, M.; Rebhan, M.; Basting, D.; Walecki, W.J.; Lauth, H.; Lebert, R.; Bergmann, K.; Hoffmann, D.; Rosier, O.; Neff, W.; Poprawe, R.; Sauerbrey, R.; Schroerer, H.; Düsterer, S.; Ziener, C.; Nickles, P.; Stiehl, H.; Will, I.; Sandner, W.; Schahl, G.; Rudolph, D.
Conference Paper
2000International round-robin experiment to test the International Organization for Standardization total-scattering draft standard
Kadkhoda, P.; Müller, A.; Ristau, D.; Duparre, A.; Gliech, S.; Lauth, H.; Schuhmann, U.; Reng, N.; Tilsch, M.; Schuhmann, R.; Amra, C.; Deumie, C.; Jolie, C.; Kessler, H.; Lindström, T.; Ribbing, C.G.; Bennet, J.M.
Journal Article
1999Current status of radiation resistance of dielectric mirrors in the DUV
Bernitzki, H.; Lauth, H.; Thielsch, R.; Blaschke, H.; Kaiser, N.; Mann, K.R.
Conference Paper
1999Interferenzschichtoptik für den ultravioletten Spektralbereich
Ullmann, J.; Lauth, H.; Bernitzki, H.; Ristau, D.; Arens, W.; Thielsch, R.; Kaiser, N.
Journal Article
1999International round-robin experiment on optical total scattering at 633 nm according to ISO/DIS 13696
Kadkhoda, P.; Amra, C.; Bennett, J.M.; Deumie, C.; Duparre, A.; Gliech, S.; Jolie, C.; Kessler, H.; Lauth, H.; Lindström, T.; Müller, A.; Reng, N.; Ribbing, C.G.; Ristau, D.; Schuhmann, R.G.; Schuhmann, U.; Tilsch, M.
Conference Paper
1998Electrical and optical properties of indium tin oxide thin films deposited with plasma ion-assistance
Laux, S.; Kaiser, N.; Zöllner, A.; Götzelmann, R.; Lauth, H.; Bernitzki, H.
Conference Paper