Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Engineering web applications using real-time collaborative modeling
Lange, Peter de; Nicolaescu, Petru; Klamma, Ralf; Jarke, Matthias
Conference Paper
2017Socio-technical challenges in the digital gap between building information modeling and industry 4.0
Lange, Peter de; Bähre, Boris; Finetti-Imhof, Christiane; Klamma, Ralf; Koch, Andreas; Oppermann, Leif
Conference Paper
2016Community application editor: Collaborative near real-time modeling and composition of microservice-based web applications
Lange, Peter de; Nicolaescu, Petru; Derntl, Michael; Jarke, Matthias; Klamma, Ralf
Conference Paper
2014Characteristics of a micro-mechanical thermal flow sensor based on a two hot wires principle with constant temperature operation in a small channel
Lange, P.; Weiss, M.; Warnat, S.
Journal Article
2011Si-micromachined thermal flow sensors: devices, simulations and applications
Lange, P.; Poech, M.
Conference Paper
2009Ausgewählte Prozesstechnologien für eine Chip zu Wafer Integration vom MEMS und ASIC
Lange, P.; Gruenzig, S.; Marenco, N.; Reinert, W.; Warnat, S.
Conference Paper
2009Dicing of fragile MEMS structures
Lange, P.; Marenco, N.; Gruenzig, S.; Warnat, S.; Semperowitsch, T.
Conference Paper
2009Integration of Sensor Chips on ASIC Wafer
Lange, P.; Gruenzig, S.; Marenco, N.; Reinert, W.; Warnat, S.
Conference Paper
2009Investigation of key technologies for system-in-package integration of inertial MEMS
Marenco, N.; Reinert, W.; Warnat, S.; Lange, P.; Gruenzig, S.; Allegato, G.; Hillmann, G.; Kostner, H.; Gal, W.; Guadagnuolo, S.; Conte, A.; Malecki, K.; Friedel, K.
Conference Paper
2009Through silicon vias in micro-electromechanical systems
Warnat, S.; Ecke, R.; Marenco, N.; Gruenzig, S.; Reinert, W.; Lange, P.
Conference Paper
2008Hot wire anemometric MEMS sensor for water flow monitoring
Melani, M.; Bertini, L.; Marinis, M. de; Lange, P.; D'Ascoli, F.; Fanucci, L.
Conference Paper
2008Low temperature silicon nitride films deposited on 3D topography by hot wire chemical vapor deposition (HWCVD)
Warnat, S.; Hoefer, M.; Schaefer, L.; Foell, H.; Lange, P.
Conference Paper
2008Neuer Sensor zur Leckortung in Wasserverteilungsnetzen
Lange, P.
Journal Article
2008Thermal mass flow sensor for measurement of liquids (water)
Lange, P.; Melani, M.; Bertini, L.; Marinis, M. de
Conference Paper
2008Vacuum encapsulation of resonant MEMS sensors by direct chip-to-wafer stacking on ASIC
Marenco, N.; Reinert, W.; Warnat, S.; Lange, P.; Gruenzig, S.; Hillmann, G.; Kostner, H.; Bock, G.; Guadagnuolo, S.; Conte, A.
Conference Paper
2005Characterization of Ti/TiN and TiN conductive layers for high temperature MEMS devices
Lange, P.; Ohlsen, B.; Puls, S.; Syre, J.
Conference Paper
2005High temperature stability of Ti/TiN and TiN heaters on bulk micromachined membranes
Lange, P.; Puls, S.; Syre, J.; Ohlsen, B.
Conference Paper
2005Hohe Lebensdauer durch geringen Widerstandsdrift
Lange, P.
Journal Article
2005Mikromechanischer Luftmassensensor
Lange, P.
Journal Article
1999Verfahren zur Herstellung mikromechanischer Bauelemente mit freistehenden Mikrostrukturen oder Membranen
Kirsten, M.; Lange, P.; Wenk, B.; Riethmueller, W.
Patent
1997Oxynitridation of silicon and postnitridation of thermal silicon oxide in N2O in a vertical furnace
Lange, P.; Boness, H.; Hendriks, M.
Journal Article
1996Stress gradient and structural properties of the atmospheric and reduced pressure deposited polysilicon layers for micromechanical sensors
Benrakkad, M.S.; Villegas, J.M.; Samitier, J.; Morante, J.R.; Kirsten, M.; Lange, P.
Journal Article
1996Thick polycrystalline silicon for surface micromechanical applications - deposition, structuring and mechanical characterization
Lange, P.; Kirsten, M.; Riethmüller, W.; Wenk, B.; Zwicker, G.; Morante, J.R.; Ericson, F.; Schweitz, J.A.
Journal Article, Conference Paper
1995Deposition of thick doped polysilicon films with low stress in an epitaxial reactor for surface micromachining applications
Kirsten, M.; Wenk, B.; Ericson, F.; Schweitz, J.A.; Riethmüller, W.; Lange, P.
Journal Article
1995MAXIMA -a European Sensor Project
Söderquist, J.; Lange, P.
Journal Article
1995Structural and optical properties of nitrited silicon oxide layers rapid thermally grown in pure N20 ambient
Hartmannsgruber, E.; Rossow, U.; Hoyer, A.; Lange, P.
Journal Article
1995Surface micromachined accelerometer with increased working capacitance and force feedback operation
Wenk, B.; Ramos-Martos, J.; Fehrenback, M.; Lange, P.; Offenberg, M.; Riethmüller, W.
Conference Paper
1995Thick polycrystalline silicon for surface micromechanical applications - deposition, structuring and mechanical characterization
Lange, P.; Kirsten, M.; Riethmüller, W.; Wenk, B.; Zwicker, G.; Morante, J.R.; Ericson, F.; Schweitz, J.A.
Conference Paper
1995Thick polysilicon-based surface micromachined capacitive accelerometer with force feedback operation
Wenk, B.; Ramos-Martos, J.; Fehrenback, M.; Lange, P.; Offenberg, M.; Riethmüller, W.
Conference Paper
1994Growth kinetics and electrical performance of silicon oxide layer grown by RTP in pure N2O ambient
Lange, P.; Hartmannsgruber, E.; Naumann, F.
Conference Paper
1994Growth rate and characterization of silicon oxide films grown in N2O atmosphere in a rapid thermal processor
Lange, P.; Bernt, H.; Hartmannsgruber, E.; Naumann, F.
Journal Article
1993Schnelle thermische Oxidation von Silizium in N2O-Atmosphäre
Lange, P.; Hartmannsgruber, E.; Naumann, F.; Windbracke, W.
Conference Paper
1992Complete X-ray lithography processing of an 8-level 0.4 micron CMOS test device
Staudt-Fischbach, P.; Windbracke, W.; Bernt, H.; Zwicker, G.; Friedrich, D.; Hemicker, P.; Lange, P.; Schliwinski, H.-J.; Huber, H.-L.; Scheunemann, U.; Simon, K.
Conference Paper
1992Stress modification and characterization of thin SiC films grown by plasma-enhanced chemical vapour deposition
Schliwinski, H.-J.; Pelka, M.; Windbracke, W.; Lange, P.; Buchmann, L.-M.; Csepregi, L.
Journal Article
1992Thermal annealing effects on the mechanical properties of plasma-enhanced chemical vapor deposited silicon oxide films
Schliwinski, H.-J.; Schnakenberg, U.; Windbracke, W.; Neff, H.; Lange, P.
Journal Article
1991A 0.4 mym CMOS test circuit completely processed with 8-level X-ray lithography
Friedrich, D.; Windbracke, W.; Bernt, H.; Zwicker, G.; Staudt-Fischbach, P.; Hermicker, P.; Lange, P.; Pelka, M.; Schliwinski, H.-J.
Conference Paper
1991Electrical and structural properties of ultrathin SiO2 gate dielectrics prepared under various conditions
Lange, P.; Schmidt, L.; Pelka, M.; Hemicker, P.; Bernt, H.; Windbracke, W.
Conference Paper
1991NH4OH-based etchants for silicon micromachining. Influence of additives and stability of passivation layers
Schnakenberg, U.; Benecke, W.; Löchel, B.; Ullerich, S.; Lange, P.
Conference Paper
1991TMAHW etchants for silicon micromachining
Schnakenberg, U.; Lange, P.; Benecke, W.
Conference Paper
1990Disorder in vitreous SiO2 - The effect of thermal annealing on structural properties
Lange, P.; Schnakenberg, U.; Ullerich, S.; Schliwinski, H.-J.
Journal Article
1989Characterization of thermal and deposited thin oxide layers by LO-TO excitation in FTIR-transmission measurements
Lange, P.; Windbracke, W.
Journal Article
1989Evidence for disorder induced vibrational mode coupling in thin amorphous SiO2-films
Lange, P.
Journal Article
1989Fabrication of 0.5 myn- and p-type metal-oxide-semiconductor test devices using x-ray lithography
Zwicker, G.; Windbracke, W.; Bernt, H.; Friedrich, D.; Huber, H.-L.; Krullmann, E.; Pelka, M.; Lange, P.; Hermicker, P.; Staudt-Fischbach, P.
Journal Article
1989Field isolation using shallow trenches for submicron CMOS technology
Zwicker, G.; Lange, P.; Staudt-Fischbach, P.; Windbracke, W.
Conference Paper