Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Clamped-clamped in-plane electrostatic bending actuators in silicon-based microfluidic devices
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Schenk, Harald
Presentation
2018Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald
Journal Article
2018Enhancement of vertical integration density by engineered BSOI wafers
Kaden, C.; Langa, S.; Ludewig, T.; Schönberger, A.; Herrmann, A.; Göbel, A.; Kolkovsky, V.; Jeroch, W.; Pufe, W.
Journal Article
2018Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers
Sandner, Thilo; Gaumont, Eric; Grasshoff, Thomas; Auböck, Gerald; Kenda, Andreas; Gisler, Thomas; Langa, Sergiu; Herrmann, Andreas; Grahmann, Jan
Conference Paper
2017CMOS-kompatible elektrostatische Biegeaktoren
Conrad, Holger; Gaudet, Matthieu; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schenk, Harald
Conference Paper
2017A contribution to the expansion of the applicability of electrostatic forces in micro transducers
Schenk, H.; Conrad, H.; Gaudet, M.; Uhlig, S.; Kaiser, B.; Langa, S.; Stolz, M.; Schimmanz, K.
Conference Paper
2017Customized BSOI wafers integration of additional interconnects into the handle wafer
Kaden, Christiane; Langa, Sergiu
Presentation
2017Electrostactically in-plane driven silicon micropump for modular configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald
Conference Paper
2017Electrostatic bending actuators with a liquid filled nanometer scale gap
Gaudet, Matthieu; Uhlig, Sebastian; Stolz, Michael; Arscott, Steve; Conrad, Holger; Langa, Sergiu; Kaiser, Bert; Schenk, Harald
Conference Paper
2017A novel electrostatic actuator technology for integrated RF MEMS and optical switches
Shashank; Conrad, Holger; Gaudet, Matthieu; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Poster
2017Technological aspects of a new micro‑electro‑mechanical actuation principle: Nano‑e‑drive
Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Gaudet, Matthieu; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Journal Article
2016Influence of annealing in H atmosphere on the electrical properties of Al2O3 layers grown on p-type Si by the atomic layer deposition technique
Kolkovsky, V.; Stübner, R.; Langa, S.; Wende, U.; Kaiser, B.; Conrad, H.; Schenk, H.
Journal Article
2016MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben
Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Schimmanz, Klaus; Langa, Sergiu
Patent
2016Mikromechanische Vorrichtung mit einem aktiv biegbaren Element
Gaudet, Matthieu; Schimmanz, Klaus; Stolz, Michael; Langa, Sergiu; Kaiser, Bert
Patent
2016A novel electrostatic actuator class
Conrad, Holger; Kaiser, Bert; Gaudet, Matthieu; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Journal Article, Conference Paper
2016A novel electrostatic micro-actuator class and its application potential for optical MEMS
Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Uhlig, Sebastian; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schimmanz, Klaus
Conference Paper
2015A small-gap electrostatic micro-actuator for large deflections
Conrad, Holger; Schenk, Harald; Kaiser, Bert; Langa, Sergiu; Gaudet, Matthieu; Schimmanz, Klaus; Stolz, Michael; Lenz, Miriam
Journal Article
2015Wafer level vacuum packaging of micro-mirrors with buried signal lines
Langa, S.; Drabe, C.; Herrmann, A.; Ludewig, T.; Rieck, A.; Flemming, A.; Kaden, C.
Journal Article
2014Herstellungsverfahren
Langa, Sergiu; Drabe, Christian; Sandner, Thilo
Patent
2013Room temperature bonding for vacuum applications: Climatic and long time tests
Langa, Sergiu; Utsumi, J.; Ludewig, Thomas; Drabe, Christian
Journal Article
2013Wafer level vacuum packaging of micro-mirrors with buried wiring
Langa, Sergiu; Drabe, Christian; Herrmann, Andreas; Ludewig, Thomas; Rieck, Andreas; Flemming, André; Kaden, Christiane
Poster
2013Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods
Langa, Sergiu; Drabe, Christian; Kunath, Christian; Dreyhaupt, André; Schenk, Harald
Conference Paper