Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Aktoren auf Basis elektroaktiver Polymer/Nanopartikel Komposite und deren Anwendung in einer Mikrolinse mit variablem Fokus
Pawlik, Boscij
: Lakner, Hubert (Betreuer); Grabmaier, Anton (Betreuer)
Dissertation
2017Erhöhung der Zuverlässigkeit von High-k Dielektrika für integrierte hochkapazitive Kondensatoren
Mart, Clemens
: Weber, Jörg (Gutachter); Lakner, Hubert (Gutachter); Weinreich, Wenke (Betreuer)
Master Thesis
2017PVD and ALD process development of advanced oxide-based RRAM-stacks
Kalishetthyhalli Mahadevaiah, Mamathamba
: Müller, Johannes (Gutachter); Lakner, Hubert (Gutachter); Fischer, Wolf-Joachim (Gutachter)
Master Thesis
2016Characterization of low temperature plasma generated oxides on germanium based substrates
Poduval, Geedhika Kallidil
: Czernohorsky, Malte (Betreuer); Lakner, Hubert (Gutachter); Fischer, Wolf-Joachim (Gutachter)
Master Thesis
2016Development and electrical characterization of a metal-ferroelectric-insulator semiconductor FET test structure
Ali, Tarek
: Müller, Johannes (Betreuer); Lakner, Hubert (Betreuer); Heyns, Marc
Master Thesis
2014Large field of view MEMS-based confocal laser scanning microscope for fluorescence imaging
Bechtel, Christin; Knobbe, Jens; Grüger, Heinrich; Lakner, Hubert
Journal Article
2012Confocal fluorescence microscope for clinical dermatologic applications
Bechtel, Christin; Knobbe, Jens; Grüger, Heinrich; Lakner, Hubert
Conference Paper
2012Design of a confocal fluorescence microscope - Space saving and affordable
Bechtel, C.; Knobbe, J.; Grüger, H.; Lakner, H.; Reichert, F.
Conference Paper
2012Design of an affordable fluorescence confocal laser scanning microscope for medical diagnostics
Bechtel, Christin; Knobbe, Jens; Grüger, Heinrich; Lakner, Hubert
Conference Paper
2011Basic angles in microelectromechanical system scanning grating spectrometers
Pügner, T.; Knobbe, J.; Lakner, H.
Journal Article
2011Calibration of diffractive micromirror arrays for microscopy applications
Berndt, Dirk; Heber, Jörg; Sinning, Steffen; Rudloff, Dirk; Wolschke, Steffen; Eckert, Mark; Schmidt, Jan-Uwe; Bring, M.; Wagner, Michael; Lakner, Hubert
Conference Paper
2010Charakterisierung und Optimierung von organischen Solarzellen und deren Hochskalierung von der einzelnen Testzelle zum Solarzellenmodul
Richter, S.
: Lakner, H.K.; Törker, M.
Thesis
2010Design für ein Zoomobjektiv mit deformierbaren Spiegeln
Seidl, K.; Knobbe, J.; Lakner, H.
Journal Article, Conference Paper
2010Distortion correction of all-reflective unobscured optical-power zoom objective
Seidl, K.; Knobbe, J.; Schneider, D.; Lakner, H.
Journal Article
2010Herstellung von Substraten für organische Leuchtdioden in Dickschichttechnologie
Philipp, A.
: Lakner, H.; Hasselgruber, M.
Thesis
2010Multispectral characterization of diffractive micromirror arrays
Berndt, D.; Heber, J.; Sinning, S.; Kunze, D.; Knobbe, J.; Schmidt, J.-U.; Bring, M.; Rudloff, D.; Friedrichs, M.; Rössler, J.; Eckert, M.; Kluge, W.; Neumann, H.; Wagner, M.; Lakner, H.
Conference Paper
2010Origin of damages in OLED from Al top electrode deposition by DC magnetron sputtering
Gil, T.H.; May, C.; Scholz, S.; Franke, S.; Törker, M.; Lakner, H.; Leo, K.; Keller, S.
Journal Article
2010Simulation und Messung der Strom- und Temperaturverteilung in großflächigen OLEDs
Tietze, M.L.
: Lakner, H.; Leo, K.
Thesis
2010Untersuchungen zur Oberflächenchemie der Atomlagenabscheidung und deren Einfluss auf die Effizienz von Prozessen
Rose, Martin
: Lakner, Hubert; Bartha, Johann W. (Gutachter); Michaelis, Alexander (Gutachter)
Dissertation
2009Eine 'Reinkarnation' in der Strukturmechanik
Conrad, H.; Sandner, T.; Schenk, H.; Lakner, H.
Journal Article
2009Al Top Cathode Deposition on OLED Using DC Magnetron Sputtering
Gil, T.H.; May, C.; Lakner, H.; Leo, K.; Keller, S.
Journal Article
2009Aluminium nitride: A promising and full CMOS compatible piezoelectric material for MOEMS applications
Conrad, H.; Schmidt, J.U.; Pufe, W.; Zimmer, F.; Sandner, T.; Schenk, H.; Lakner, H.
Conference Paper
2009Diffractive MEMS components, systems and applications
Grüger, H.; Egloff, T.; Pügner, T.; Scholles, M.; Schenk, H.; Lakner, H.
Conference Paper
2009Entwicklung eines OLED-Substrats in Dickschichttechnologie
Hasselgruber, M.
: Kirchhof, C.; Lakner, H.
Thesis
2009Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement
Jung, D.; Kallweit, D.; Sandner, T.; Conrad, H.; Schenk, H.; Lakner, H.
Conference Paper
2009High performance micro scanners for miniature laser projection displays
Hsu, S.-T.
: Janschek, K.; Lakner, H.
Dissertation
2009Ultra compact laser based projectors and imagers
Schenk, H.; Sandner, T.; Drabe, C.; Scholles, M.; Frommhagen, K.; Gerwig, C.; Lakner, H.
Conference Paper
20083D hybrid capacitance model for angular vertical comb drives
Jung, D.; Klose, T.; Grasshoff, T.; Sandner, T.; Schenk, H.; Lakner, H.
Conference Paper
2008Actuating methods of quasistatic micromirrors for active focus variation
Conrad, H.; Klose, T.; Sander, T.; Schenk, H.; Lakner, H.
Conference Paper
2008Al top cathode deposition on OLED using DC magnetron sputtering
Gil, T.H.; May, C.; Lakner, H.; Leo, K.; Keller, S.
Conference Paper
2008High efficient pin orange organic light emitting diode fabrication with novel Al cathode using DC magnetron sputtering
Gil, T.-H.; Franke, S.; May, C.; Amelung, J.; Lakner, H.; Leo, K.
Conference Paper
2008Improved methods of system integration for MEMS-based laser projection systems
Scholles, M.; Frommhagen, K.; Gerwig, C.; Grueger, H.; Knobbe, J.; Lakner, H.; Schlebusch, D.; Schwarzenberg, M.; Vogel, U.
Conference Paper
2008Influence of properties of sputtered Al cathodes on OLED characteristics
Gil, T.-H.; May, C.; Amelung, J.; Toerker, M.; Franke, S.; Lakner, H.; Leo, K.
Conference Paper
2008The integration of mono-crystalline silicon micro-mirrors on CMOS for SLM applications
Zimmer, F.; Friedrichs, M.; Lapisa, M.; Niklaus, F.; Müller, M.; Bakke, T.; Schenk, H.; Lakner, H.
Conference Paper
2008MEMS-based optoelectronic system for distance measurement applicable for panorama cameras
Schaulin, M.; Knobbe, J.; Neumann, H.; Seidl, K.; Kleinmann, L.; Schelinski, U.; Scholles, M.; Schönherr, H.-J.; Lakner, H.
Conference Paper
2008Modelling the thermally induced curvature of multilayer coatings with COMSOL multiphysics
Conrad, H.; Klose, T.; Sandner, T.; Jung, D.; Schenk, H.; Lakner, H.
Conference Paper
2008New approach for MEMS scanning mirror for laser projection systems
Grüger, H.; Knobbe, J.; Scholles, M.; Schenk, H.; Lakner, H.
Conference Paper
2008OLED-on-CMOS integration for augmented-reality systems
Herold, R.; Vogel, U.; Richter, B.; Kreye, D.; Reckziegel, S.; Scholles, M.; Lakner, H.
Conference Paper
2008Planarity optimization of spatial light modulators
Duerr, P.; Wolschke, S.; Ludewig, T.; Dauderstädt, U.; Kunze, D.; Wagner, M.; Lakner, H.
Conference Paper
2008Recent advancements in system design for miniaturized MEMS-based laser projectors
Scholles, M.; Frommhagen, K.; Gerwig, C.; Knobbe, J.; Lakner, H.; Schlebusch, D.; Schwarzenberg, M.; Vogel, U.
Conference Paper
2008Silicon-based micro-optic modulators
Schenk, H.; Wagner, M.; Gehner, A.; Müller, M.; Sandner, T.; Drabe, C.; Lakner, H.
Conference Paper
2008Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates
Schmidt, J.-U.; Friedrichs, M.; Bakke, T.; Voelker, B.; Rudloff, D.; Lakner, H.
Conference Paper
2008Ultracompact laser projection systems based on two-dimensional resonant microscanning mirrors
Scholles, M.; Bräuer, A.; Frommhagen, K.; Gerwig, C.; Lakner, H.; Schenk, H.; Schwarzenberg, M.
Journal Article
20072D-Microscanner mit hoher Auslenkung zur Bildaufnahme
Schenk, H.; Drabe, C.; Klose, T.; Wolter, A.; Lakner, H.
Conference Paper
2007AO SLM demonstration system and test bed
Wildenhain, Michael; Knobbe, Jens; Gehner, Andreas; Wagner, Michael; Lakner, Hubert
Conference Paper
2007Charging effects in spatial light modulators based on micromirrors
Dauderstädt, U.; Bakke, T.; Dürr, P.; Sinning, S.; Wullinger, I.; Wagner, M.; Lakner, H.
Conference Paper
2007CMOS integrable micromirrors with highly improved drift-stability
Schmidt, Jan U.; Knobbe, Jens; Gehner, Andreas; Lakner, Hubert
Conference Paper
2007Einsatz translatorischer MOEMS-Aktoren für FTIR-Spektrometer
Sandner, T.; Schenk, H.; Lakner, H.; Kenda, A.; Scherf, W.
Conference Paper
2007Hochauflösende Flächenlichtmodulatoren auf Basis von Mikrospiegelmatrizen
Wagner, M.; Dürr, P.; Dauderstädt, U.; Gehner, A.; Friedrichs, M.; Schmidt, J.-U.; Lakner, H.
Conference Paper
2007Investigation and characterization of high-efficient NIR-scanning gratings used in NIR-micro-spectrometer
Zimmer, F.; Heberer, A.; Sandner, T.; Grüger, H.; Schenk, H.; Lakner, H.; Kenda, A.; Scherf, W.
Conference Paper
2007Miniaturisierte Laserprojektionssysteme basierend auf zweidimensionalen resonanten Microscannerspiegeln
Scholles, M.; Frommhagen, K.; Gerwig, C.; Lakner, H.; Schenk, H.; Schwarzenberg, M.; Bräuer, A.
Conference Paper
2007MOEMS laser projector for handheld devices featuring motion compensation
Grueger, H.; Heberer, A.; Gerwig, C.; Nauber, P.; Scholles, M.; Lakner, H.
Conference Paper
2007Neuartiger MST Ansatz zur Realisierung kostengünstiger Systeme zum "Hyperspectral Imaging" im NIR
Egloff, T.; Grüger, H.; Zimmer, F.; Schenk, H.; Scholles, M.; Lakner, H.
Conference Paper
2007A new micro laser camera
Drabe, C.; James, R.; Klose, T.; Wolter, A.; Schenk, H.; Lakner, H.
Conference Paper
2007NIR hyperspectral imaging using MOEMS scanning grating chips and linear detector array
Egloff, T.; Grüger, H.; Zimmer, F.; Schenk, H.; Scholles, M.; Lakner, H.
Conference Paper
2007NIR-Spektroskopie: Entwicklung eines miniaturisierten MOEMS Spektrometer für den Einsatz im NIR-Bereich
Zimmer, F.; Grueger, H.; Heberer, A.; Sandner, T.; Schenk, H.; Lakner, H.
Conference Paper
2007Technologieentwicklung für 1-Mega-Pixel Mikrospiegel-Arrays mit hohem optischem Füllfaktor und langzeitstabilem Auslenkverhalten
Schmidt, J.-U.; Friedrichs, M.; Rudloff, D.; Lakner, H.
Conference Paper
2007Tilt compensated laser projection system for handheld devices with motion compensation and input device function
Grüger, H.; Scholles, M.; Schenk, H.; Lakner, H.
Conference Paper
2007Tilt compensated MOEMS projector as input device
Grueger, H.; Heberer, A.; Gerwig, C.; Nauber, P.; Scholles, M.; Lakner, H.
Conference Paper
2007Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors
Scholles, M.; Bräuer, A.; Frommhagen, K.; Gerwig, C.; Lakner, H.; Schenk, H.; Schwarzenberger, M.
Conference Paper
2006Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation
Krellmann, M.; Friedrichs, M.; Dauderstädt, U.; Wagner, M.; Lakner, H.
Conference Paper
2006Design of miniaturized optoelectronic systems using resonant microscanning mirrors for projection of full-color images
Scholles, M.; Bräuer, A.; Frommhagen, K.; Gerwig, C.; Höfer, B.; Lakner, H.; Schenk, H.; Schreiber, P.; Schwarzenberg, M.
Conference Paper
2006Development of high-efficient NIR-scanning gratings for spectroscopic applications
Zimmer, F.; Sandner, T.; Grüger, H.; Heberer, A.; Wolter, A.; Schenk, H.; Lakner, H.; Kenda, A.; Scherf, W.
Conference Paper
2006DUV-reflective coatings and novel actuator materials for light modulator arrays
Schmidt, Jan-Uwe; Friedrichs, Martin; Sandner, Thilo; Heber, Jörg; Rudloff, Dirk; Lakner, Hubert; Yang, M.; Gatto, A.; Kaiser, Norbert
Presentation
2006Extended damping model for out-of-plane-comb driven micromirrors
Klose, T.; Sandner, T.; Schenk, H.; Lakner, H.
Conference Paper
2006Global flatness of spatial light modulators
Wagner, M.; Künzelmann, U.; Schenk, H.; Lakner, H.
Conference Paper
2006High-performance coatings for micromechanical mirrors
Gatto, A.; Yang, M.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Schenk, H.; Lakner, H.; Heber, J.
Journal Article
2006Highly reflective optical coatings for high power applications of micro scanning mirrors in the UV-VIS-NIR spectral region
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Yang, M.; Gatto, A.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2006Investigations on an integrated optical position detection of micromachined scanning mirrors
Schuster, T.; Sandner, T.; Lakner, H.
Conference Paper
2006A large deflection translatory actuator for optical path length modulation
Drabe, C.; Klose, T.; Schenk, H.; Wolter, A.; Lakner, H.K.
Conference Paper
2006Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding
Bakke, T.; Völker, B.; Friedrichs, M.; Rudloff, D.; Schenk, H.; Lakner, H.
Conference Paper
2006MEMS analog light processing - an enabling technology for adaptive optical phase control
Gehner, A.; Wildenhain, M.; Neumann, H.; Schenk, H.; Lakner, H.
Conference Paper
2006Micro-actuator with extended analog deflection at low drive voltage
Dürr, P.; Gehner, A.; Schmidt, J.; Kunze, D.; Wagner, M.; Lakner, H.
Conference Paper
2006Scanning 2D micromirror with enhanced flatness at high frequency
Wolter, A.; Klose, T.; Hsu, S.; Schenk, H.; Lakner, H.
Conference Paper
2005Applications and requirements for MEMS scanner mirrors
Wolter, A.; Schenk, H.; Lakner, H.
Conference Paper
2005High surface planarity die bonding of large optical chips
Künzelmann, U.; Wagner, M.; Schenk, H.; Lakner, H.
Conference Paper
2005Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Gatto, A.; Yang, M.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2005Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Yang, M.; Gatto, A.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2005Mechanical stability of spatial light modulators in microlithography
Dauderstädt, U.; Dürr, P.; Ljungblad, U.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2005Micro optical devices for light modulation and deflection
Schenk, H.; Sandner, T.; Lakner, H.
Conference Paper
2005Micro-opto-electro-mechanical systems technology and its impact on photonic applications
Schenk, H.; Wolter, A.; Dauderstädt, U.; Gehner, A.; Lakner, H.
Journal Article
2005Micromechanical scanning mirrors with highly reflective NIR coatings for high power applications
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Braun, S.; Foltyn, T.; Leson, A.; Gatto, A.; Yang, M.; Kaiser, N.
Conference Paper
2005Miniaturized optical module for projection of arbitrary images based on two-dimensional resonant micro scanning mirrors
Scholles, M.; Bräuer, A.; Frommhagen, K.; Gerwig, C.; Höfer, B.; Jung, E.; Lakner, H.; Schenk, H.; Schneider, B.; Schreiber, P.; Wolter, A.
Conference Paper
2005Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding
Bakke, T.; Friedrichs, M.; Völker, B.; Reiche, M.; Leonardsson, L.; Schenk, H.; Lakner, H.
Conference Paper
2005Stress optimization of a micromechanical torsional spring
Klose, T.; Kunze, D.; Sandner, T.; Schenk, H.; Lakner, H.; Schneider, A.; Schneider, P.
Conference Paper
2005VUV optical coatings for the next-generation micro-mechanical mirrors
Yang, M.; Gatto, A.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Heber, J.; Schenk, H.; Lakner, H.
Conference Paper
2004Accelerometer by means of a resonant micro actuator
Drabe, C.; Schenk, H.; Roscher, K.-U.; Kunze, D.; Lakner, H.
Conference Paper
2004Application of spatial light modulators for microlithography
Dauderstädt, U.; Dürr, P.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2004Bulk micro machined quasistatic torsional micro mirror
Kiessling, T.; Wolter, A.; Schenk, H.; Lakner, H.
Conference Paper
2004Bulk micro machined quasistatic torsional micro mirror
Kiessling, T.; Wolter, A.; Schenk, H.; Lakner, H.
Conference Paper
2004Damping analysis and measurement for a comb-drive scanning mirror
Sandner, T.; Klose, T.; Wolter, A.; Schenk, H.; Lakner, H.
Conference Paper
2004Designing MEMS for manufacturing
Wolter, A.; Herrmann, A.; Yildiz, G.; Schenk, H.; Lakner, H.
Conference Paper
2004Fabrication end-test of the micro scanning mirror
Wolter, A.; Gaumont, E.; Korth, H.; Schenk, H.; Lakner, H.
Conference Paper
2004Laser projection device based on a 2D resonant micro scanning mirror
Roscher, K.-U.; Grätz, H.; Schenk, H.; Wolter, A.; Lakner, H.
Conference Paper
2004Light processing with electrostatically driven micro scanning mirrors and micro mirror arrays
Schenk, H.; Dauderstädt, U.; Dürr, P.; Gehner, A.; Wolter, A.; Lakner, H.
Book Article
2004Low-cost projection device with a 2D resonant microscanning mirror
Roscher, K.-U.; Grätz, H.; Schenk, H.; Wolter, A.; Lakner, H.
Conference Paper
2004The MEMS micro scanning mirror for barcode reading: From development to production
Wolter, A.; Schenk, H.; Gaumont, E.; Lakner, H.
Conference Paper
2004MOEMS basierte Displays und Bildgebende Systeme
Lakner, H.
Conference Paper
2004Photonic microsystems: An enabling technology for light deflection and modulation
Schenk, H.; Wolter, A.; Dauderstädt, U.; Gehner, A.; Grüger, H.; Drabe, C.; Lakner, H.
Conference Paper
2004Tests on micro-mirror arrays for adaptive optics
Liesener, J.; Hupfer, W.; Gehner, A.; Wallace, K.; Schenk, H.; Lakner, H.
Conference Paper
2004Torsional stress, fatigue and fracture strength in silicon hinges of a micro scanning mirror
Wolter, A.; Schenk, H.; Korth, H.; Lakner, H.
Conference Paper
2003Characterization of spatial light modulators for micro lithography
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Bakke, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Characterization of spatial light modulators for microlithography
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Bakke, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Driver ASIC for synchronized excitation of resonant micro-mirrors
Roscher, K.-U.; Fakesch, U.; Schenk, H.; Lakner, H.; Schlebusch, D.
Conference Paper
2003Improved layout for a resonant 2D micro scanning mirror with low operation voltages
Wolter, A.; Schenk, H.; Gaumont, E.; Lakner, H.
Conference Paper
2003Improved vision by eye abberation correction using an active-matrix addressed micromirror array
Gehner, A.; Wildenhain, M.; Doleschal, W.; Elgner, A.; Schenk, H.; Lakner, H.
Conference Paper
2003Improved vision by eye aberration correction using an active-matrix addressed micromirror array
Gehner, A.; Wildenhain, M.; Doleschal, W.; Elgner, A.; Schenk, H.; Lakner, H.
Conference Paper
2003Micro mirror arrays for VLSI mask fabrication
Schenk, H.; Dauderstädt, U.; Dürr, P.; Lakner, H.K.
Book Article
2003Micro-mirror Arrays for adaptive wavefront correction
Hupfer, W.; Gehner, A.; Schenk, H.; Lakner, H.; Liesener, J.; Wallace, K.
Conference Paper
2003Performance and applications of a spectrometer with micromachined scanning grating
Grüger, H.; Wolter, A.; Schuster, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Realization of a spectrometer with micromachined scanning grating
Grüger, H.; Wolter, A.; Schuster, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Scanning micro spectrometer
Grüger, H.; Wolter, A.; Schuster, T.; Schenk, H.; Lakner, H.K.
Book Article
2003Temperature stability of the frequency of a resonant micro scanning mirror
Wolter, A.; Koorth, H.; Schenk, H.; Lakner, H.
Conference Paper
2002High resolution absolute angular position detection with single chip capability
Grüger, H.; Lakner, H.
Conference Paper
2002Mustererzeugung und -erfassung mit mikromechanischen Spiegeln und Spiegelarrays
Lakner, H.; Dürr, P.; Schenk, H.; Gehner, A.
Conference Paper
2002Reliability test and failure analysis of optical MEMS
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Lakner, H.
Conference Paper
2001Bildgebende Mikrosysteme: Chips, die mit Licht arbeiten
Lakner, H.; Wolter, A.; Schenk, H.
Book Article
2001Design and fabrication of micromirror arrays for UV-lithography
Lakner, H.; Dürr, P.; Dauderstädt, U.; Doleschal, W.; Amelung, J.
Conference Paper
2001Design optimization of an electrostatically driven Micro Scanning Mirror
Schenk, H.; Wolter, A.; Lakner, H.
Conference Paper
2001MIRAGE: An European project for a micro scan engine
Schenk, H.; Wolter, A.; Roscher, K.-U.; Barthel, W.; Lakner, H.
Book Article
2001New architecture for laser pattern generators for 130 nanometers and beyond
Ljungblad, U.; Sandström, T.; Buhre, H.; Dürr, P.; Lakner, H.
Conference Paper
2001New laser pattern generator for DUV using a spatial light modulator
Ljungblad, U.; Dauderstädt, U.; Dürr, P.; Sandström, T.; Buhre, H.; Lakner, H.
Journal Article
2001A resonantly excited 2D-micro-scanning-mirror with large deflection
Schenk, H.; Dürr, P.; Kunze, D.; Lakner, H.; Kück, H.
Journal Article
2000Design and modelling of large deflection micromechanical 1D and 2D scanning mirrors
Schenk, H.; Dürr, P.; Kunze, D.; Lakner, H.; Kück, H.
Conference Paper
2000An electrostatically excited 2D-Micro-Scanning-Mirror with an in-plane configuration of the driving electrodes
Schenk, H.; Dürr, P.; Kunze, D.; Lakner, H.; Kück, H.
Conference Paper
2000Fabrication of the moving liquid mirror (MLM) spatial light modulator in a standard CMOS-process
Wolter, A.; Lakner, H.; Kück, H.; Doleschal, W.; Kirstein, K.-U.; Rieck, A.; Frohberg, K.
Conference Paper
2000Large deflection micromechanical scanning mirrors for linear scans and pattern generation
Schenk, H.; Dürr, P.; Haase, T.; Kunze, D.; Sobe, U.; Lakner, H.; Kück, H.
Journal Article
2000Micromirror arrays for wavefront correction
Gehner, A.; Wildenhain, M.; Lakner, H.
Conference Paper
2000The moving liquid mirror (MLM) spatial light modulator
Wolter, A.; Lakner, H.; Doleschal, W.; Zimmer, G.
Conference Paper
2000Nanoscale EELS analysis of dielectric function and bandgap properties in GaN and related materials
Brockt, G.; Lakner, H.
Journal Article
2000A new 2D micromirror scanner
Schenk, H.; Dürr, P.; Lakner, H.
Book Article
2000A spatial light modulator using moving liquid mirrors (MLM) on a CMOS active-matrix
Wolter, A.; Kirstein, K.-U.; Doleschal, W.; Kück, H.; Lakner, H.; Zimmer, G.
Conference Paper
2000Test system for micro mirror arrays
Dürr, P.; Tanneberger, T.; Wolter, A.; Kluge, W.; Doleschal, W.; Lakner, H.
Conference Paper
1999Micromirrors for direct writing systems and scanners
Lakner, H.; Doleschal, W.; Dürr, P.; Gehner, A.; Schenk, H.; Wolter, A.; Zimmer, G.
Conference Paper
1999Spatially resolved low-loss EELS analysis of optical properties of GaN and Related alloys
Brockt, G.; Lakner, H.; Kubalek, E.
Conference Paper