Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Mikro- und Nanotechnologien zur Herstellung steuerbarer optischer Komponenten
Hiller, K.; Helke, C.; Seifert, M.; Seiler, J.; Kurth, S.; Meinig, M.; Wecker, J.
Conference Paper
2017Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: An example for Match 1:1-, eBeam-, and nanoimprint lithography
Helke, C.; Hiller, K.; Erben, J.W.; Reuter, D.; Meinig, M.; Kurth, S.; Nowak, C.; Kleinjans, H.; Otto, T.
Conference Paper
2017A concept for an ice detection system on overhead power lines, theory and practical results
Vagapov, G.; Fedotov, A.; Kurth, S.; Voigt, S.
Conference Paper
2017Large-scale fabrication of LP-CVD Si3N4 photonic crystal structures as freestanding reflectors with 1 mm aperture for Fabry-Pérot interferometers
Helke, C.; Hiller, K.; Werner, T.; Reuter, D.; Meinig, M.; Kurth, S.; Nowak, C.; Kleinjans, H.; Otto, T.
Conference Paper
2016Cavity-enhanced mm-wave spectrometer with integrated SiGe front-end for oxygen concentration measurement
Wecker, J.; Kurth, S.; Mangalgiri, G.; Otto, T.; Gessner, T.; Gaitzsch, M.; Bauch, A.; Nasr, I.; Weigel, R.; Kissinger, D.; Hackner, A.; Prechtel, U.
Conference Paper
2016MEMS tunable Fabry-Pérot filters for infrared microspectrometer applications
Neumann, N.; Ebermann, M.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2016Microelectromechanical switch and method for manufacturing the same
Kurth, Steffen; Voigt, Sven; Haas, Sven; Ikeda, Koichi; Akiba, Akira
Patent
2016Microelectromechanical system and method for manufacturing the same
Kurth, Steffen; Voigt, Sven; Haas, Sven; Ikeda, Koichi; Akiba, Akira
Patent
2016Novel through silicon wiring technology using dry etched sloping vertical terminals
Haas, S.; Voigt, S.; Arnold, M.; Schwenzer, F.; Braunschweig, M.; Küchler, M.; Kurth, S.; Gessner, T.
Conference Paper
2016Oxygen detection system consisting of a millimeter wave Fabry-Pérot resonator and an integrated SiGe front-end
Wecker, J.; Bauch, A.; Kurth, S.; Mangalgiri, G.; Gaitzsch, M.; Meinig, M.; Gessner, T.; Nasr, I.; Weigel, R.; Kissinger, D.; Hackner, A.; Prechtel, U.
Conference Paper
2016Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers
Meinig, M.; Kurth, S.; Seifert, M.; Hiller, K.; Wecker, J.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper
2016Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: A review
Ebermann, M.; Neumann, N.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2016VIS Fabry-Pérot-Interferometer with (HL)4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy
Helke, C.; Meinig, M.; Seifert, M.; Seiler, J.; Hiller, K.; Kurth, S.; Martin, J.; Gessner, T.
Conference Paper
2015Efficient K-band antennas fabricated with large-scale processes
Gaitzsch, M.; Grossmann, T.D.; Hartwig, M.; Heinrich, M.; Kurth, S.; Gessner, T.; Baumann, R.R.; Kroll, L.
Conference Paper
2015Electrically tunable Fabry-Pérot interferometer with inherent compensation of the influence of gravitation and vibration
Meinig, M.; Kurth, S.; Helke, C.; Seifert, M.; Hiller, K.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper
2015A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases
Ebermann, M.; Neumann, N.; Binder, S.; Meinig, M.; Seifert, M.; Kurth, S.; Hiller, K.
Conference Paper
2015Oxygen Detection by Rotational Spectroscopy with a Small Size Millimeter Wave Resonator
Wecker, J.; Mangalgiri, G.; Kurth, S.; Meinig, M.; Hackner, A.; Prechtel, U.; Gessner, T.
Journal Article
2015Practical experience and results of an extensive pilot test of the ASTROSE® sensor network for high voltage power line monitoring
Voigt, S.; Pfeiffer, M.; Heibutzki, B.; Brockmann, C.; Großer, V.; Kurth, S.; Geßner, T.
Conference Paper
2015Remote ice detection on rotor blades of wind turbines
Großmann, T.D.; Gaitzsch, M.; Hartwig, M.; Heinrich, M.; Symmank, C.; Schmidt, A.; Kurth, S.; Gessner, T.; Baumann, R.R.; Kroll, L.; Götze, U.
Conference Paper
2015RF MEMS switch for modulated backscatter communication
Gaitzsch, M.; Voigt, S.; Haas, S.; Kurth, S.; Gessner, T.
Conference Paper
2015Smart systems integration. Short review and further development of smart systems
Gessner, T.; Vogel, M.; Hiller, K.; Otto, T.; Kurth, S.; Nestler, J.; Köhler, T.
Book Article
2015Subwavelength Grating Reflectors for Fabrication Cost Reduction of Fabry-Perot Infrared Filters
Rupprecht, J.; Kurth, S.; Hiller, K.; Seifert, M.; Besser, J.; Meinig, M.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper, Journal Article
2014Analysis of Au metal–metal contacts in a lateral actuated RF MEMS switch
Gaitzsch, M.; Kurth, S.; Voigt, S.; Haas, S.; Gessner, T.
Conference Paper, Journal Article
2014Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gases
Ebermann, M.; Neumann, N.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2014Roll-to-roll infrared sintering of gravure printed silver patterns in applications of back-injection-molded functional lightweight structures
Hartwig, M.; Ueberfuhr, P.; Mischke, A.; Gaitzsch, M.; Heinrich, M.; Großmann, T.D.; Kurth, S.; Kroll, L.; Gessner, T.; Baumann, R.R.
Conference Paper
2014Smart monitoring systems for a green future
Saupe, R.; Stock, V.; Otto, T.; Kurth, S.; Hiller, K.; Meinig, M.; Neumann, N.; Gessner, T.
Conference Paper
2014Subwavelength grating reflectors in MEMS tunable Fabry-Perot infrared filters with large aperture
Kurth, S.; Hiller, K.; Meinig, M.; Besser, J.; Seifert, M.; Ebermann, M.; Neumann, N.; Schlachter, F.; Gessner, T.
Conference Paper
2014Technology approaches for tuneable IR Fabry-Perot-Filters applied in gas sensing microspectrometers
Hiller, K.; Meinig, M.; Kurth, S.; Seifert, M.; Helke, C.; Neumann, N.; Ebermann, M.
Book Article
2013Analysis of metal-metal contacts in RF MEMS switches
Kurth, S.; Voigt, S.; Haas, S.; Bertz, A.; Kaufmann, C.; Gessner, T.; Akiba, A.; Ikeda, K.
Conference Paper
2013Design, fabrication and characterization of MEMS probe card for fine pitch IC testing
Yuan, T.; Chen, D.; Chen, J.; Fu, H.; Kurth, S.; Otto, T.; Gessner, T.
Journal Article
2013Determination of parameters with uncertainties for quality control in MEMS fabrication
Gennat, M.; Meinig, M.; Shaporin, A.; Kurth, S.; Rembe, C.; Tibken, B.
Journal Article
2013Highly Reliable and Low Voltage Actuated Ohmic RF MEMS Switch with Wafer Level Packaging
Kurth, S.; Nowack, M.; Voigt, S.; Bertz, A.; Froemel, J.; Kaufmann, C.; Gessner, T.; Akiba, A.; Ikeda, K.
Book Article
2013Low temperature wafer bonding technology for RF based MEMS devices
Haubold, M.; Figur, S.; Schoenlinner, B.; Kurth, S.; Gessner, T.
Conference Paper
2013Printing of GHz antenna pattern on flexible substrates for the manufacturing of intelligent light-weight structures
Ueberfuhr, P.; Siegel, F.; Grossmann, T.; Gaitzsch, M.; Kurth, S.; Baumann, R.R.
Conference Paper
2013Smart systems for a better life
Gessner, T.; Vogel, M.; Nestler, J.; Hiller, K.; Kurth, S.; Otto, T.
Conference Paper
2012Autarkes Sensornetzwerk zum Monitoring von Hochspannungsleitungen
Voigt, S.; Pfeiffer, M.; Grolms, A.; Kurth, S.; Keutel, T.; Brockmann, C.; Braunschweig, M.; Gessner, T.
Conference Paper
2012Autonomous sensor network for power line monitoring
Voigt, S.; Kurth, S.; Geßner, T.
Conference Paper
2012Fabry-Perot tunable infrared filter based on structured reflectors
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Specht, H.; Meinig, M.; Gessner, T.
Conference Paper
2012Material properties characterization of BiCMOS BEOL metal stacks for RF-MEMS applications
Wietstruck, M.; Kaynak, M.; Zhang, W.; Wolansky, D.; Kurth, S.; Erler, B.; Tillack, B.
Conference Paper
2012Micro arc welding for electrode gap reduction of high aspect ratio microstructures
Nowack, M.; Leidich, S.; Reuter, D.; Kurth, S.; Kuechler, M.; Bertz, A.; Gessner, T.
Journal Article, Conference Paper
2012Sensornetzwerk zum Monitoring von Hochspannungsleitungen
Voigt, S.; Wolfrum, J.; Pfeiffer, M.; Keutel, T.; Brockmann, C.; Grosser, V.; Lissek, S.; During, H.; Rusek, B.; Braunschweig, M.; Kurth, S.; Gessner, T.
Conference Paper
2012Sensornetzwerk zum Monitoring von Hochspannungsleitungen
Voigt, S.; Kurth, S.; Gessner, T.
Conference Paper
2012Smart Systems for Different Applications from Fraunhofer ENAS
Vogel, M.; Braeuer, J.; Wiemer, M.; Nestler, J.; Kurth, S.; Otto, T.; Gessner, T.
Book Article
2012Tunable Fabry-Pérot Interferometers for Infrared Spectroscopy
Kurth, S.; Hiller, K.; Meinig, M.; Gessner, T.
Book Article
2012Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers
Ebermann, M.; Neumann, N.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2011Application of sub-wavelength structures in infrared optical filters
Kurth, S.; Seifert, M.; Zajadacz, J.; Ebermann, M.; Hiller, K.; Neumann, N.; Gessner, T.
Conference Paper
2011Autarkes Sensornetzwerk zur Überwachung von Hochspannungsleitungen
Voigt, S.; Nowack, M.; Bertz, A.; Leidich, S.; Meinig, M.; Kurth, S.; Gessner, T.; Grosser, V.; Braunschweig, M.; Krumm, R.
Conference Paper
2011Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers
Meinig, M.; Ebermann, M.; Neumann, N.; Kurth, S.; Hiller, K.; Gessner, T.
Conference Paper
2011HF-MEMS Schalter mit ohmschen Kontakt und lateraler Bewegungsrichtung
Leidich, S.; Kurth, S.; Nowack, M.; Bertz, A.; Froemel, J.; Kaufmann, C.; Gessner, T.
Conference Paper
2011Kapazitiver MEMS-Mischer und Signalfilter für wake up receiver
Kurth, S.; Voigt, S.; Leidich, S.; Nowack, M.; Bertz, A.; Gessner, T.
Conference Paper
2011Lokales Mikroschweißen als post-process Technologie zur permanenten Reduzierung des Elektrodenabstandes von HARMS
Nowack, M.; Leidich, S.; Reuter, D.; Kurth, S.; Kuechler, M.; Bertz, A.; Gessner, T.
Conference Paper
2011Materialcharakterisierung eines komplexen Metallschichtstapels fur einen monolithischintegrierten RF-MEMS-Schalter
Wietstruck, M.; Kaynak, M.; Tillack, B.; Kurth, S.; Erler, B.
Conference Paper
2011MEMS module integration into SiGe BiCMOS technology for embedded system applications
Kaynak, M.; Wietstruck, M.; Zhang, W.; Drews, J.; Knoll, D.; Korndörfer, F.; Wipf, C.; Schulz, K.; Suchodoletz, M.V.; Zoschke, K.; Kaletta, K.; Ehrmann, O.; Leidich, S.; Kurth, S.; Tillack, B.
Conference Paper
2011Method for characterizing movable micro-mirror for projector used in e.g. digital camera, involves determining function parameters of micro-mirror by evaluating device, based on detected portions of test image of micro-mirror
Specht, H.; Kurth, S.; Gessner, T.; Fiess, R.; Krayl, O.; Krueger, M.; Wiest, G.; Hilberath, T.
Patent
2011Neuartiger frequenz- und amplitudenabstimmbarer Infrarotfilter
Specht, H.; Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Neumann, N.; Gittler, E.; Gessner, T.
Conference Paper
2011Novel post-process gap reduction technology of high aspect ratio microstructures utilizing micro welding
Nowack, M.; Leidich, S.; Reuter, D.; Kurth, S.; Kuchler, M.; Bertz, A.; Gessner, T.
Conference Paper
2011Radio transmission system for power line monitoring
Voigt, S.; Leidich, S.; Gratias, A.; Kurth, S.; Keutel, T.; Gessner, T.
Conference Paper
2011Reliability enhancement of Ohmic RF MEMS switches
Kurth, S.; Leidich, S.; Bertz, A.; Nowack, M.; Frömel, J.; Kaufmann, C.; Faust, W.; Gessner, T.; Akiba, A.; Ikeda, K.
Conference Paper
2011Slot-antenna for autonomous sensor systems mounted on overhead power lines
Leidich, S.; Voigt, S.; Gratias, A.; Keutel, T.; Kurth, S.; Gessner, T.
Conference Paper
2011Tiny MID- and long-wave infrared spectrometer module with a MEMS dual-band Fabry-Pérot filter
Ebermann, M.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E.; Neumann, N.
Conference Paper
2011Tunable micromachined Fabry-Pérot Filters for infrared spectroscopy: Current state and prospects
Ebermann, M.; Neumann, N.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E.
Conference Paper
2011Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors
Meinig, M.; Kurth, S.; Hiller, K.; Neumann, N.; Ebermann, M.; Gittler, E.; Gessner, T.
Conference Paper
2010Entwurf und Technologie eines Dualband Fabry-Pérot-Filters für den mittleren Infrarotbereich mit zwei beweglichen Reflektoren
Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Gittler, E.; Gessner, T.
Conference Paper
2010A fast and low actuation voltage MEMS switch for mm-wave and its integration
Akiba, A.; Mitarai, S.; Morita, S.; Ikeda, I.; Kurth, S.; Leidich, S.; Bertz, A.; Nowack, M.; Froemel, J.; Gessner, T.
Conference Paper
2010Image based test methodology for laser display scanners
Specht, H.; Kurth, S.; Billep, D.; Kaufmann, C.; Gessner, T.
Conference Paper
2010Micro/nano technologies towards smart systems integration
Gessner, T.; Vogel, M.; Kaufmann, C.; Hiller, K.; Kurth, S.; Nestler, J.; Otto, T.
Conference Paper
2010Mikro- und Nanotechnologien für Smart Integrated Systems
Gessner, T.; Vogel, M.; Schulz, S.E.; Wiemer, M.; Hiller, K.; Kurth, S.
Journal Article
2010Miniaturisiertes Spektrometermodul für den mittleren und langwelligen Infrarotbereich mit mikromechanischem Dual-Band Fabry-Pérot Filter
Ebermann, M.; Neumann, N.; Hoppe, S.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2010Nanostrukturierte Breitbandreflektoren und deren Anwendung in abstimmbaren mikromechanischen Infrarot-Filtern
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Zajadazc, J.; Gessner, T.
Conference Paper
2010Recent advances in expanding the spectral range of MEMS Fabry-Pérot filters
Ebermann, M.; Neumann, N.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2010Subwavelength structures for infrared filtering
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Zajadacz, J.; Gessner, T.
Conference Paper
2010Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range
Neumann, N.; Ebermann, M.; Gittler, E.; Meinig, M.; Kurth, S.; Hiller, K.
Conference Paper
2009Analysis of image quality for laser display scanner test
Specht, H.; Kurth, S.; Billep, D.; Gessner, T.
Conference Paper
2009BEOL embedded RF-MEMS switch for mm-wave applications
Kaynak, M.; Ehwald, K.-E.; Drews, J.; Scholz, R.; Korndorfer, F.; Knoll, D.; Tillack, B.; Barth, R.; Birkholz, M.; Schulz, K.; Sun, Y.M.; Wolansky, D.; Leidich, S.; Kurth, S.; Gurbuz, Y.
Conference Paper
2009Design, operation and performance of a Fabry-Perot based MWIR micro spectrometer
Ebermann, M.; Neumann, N.; Hiller, K.; Kurth, S.
Conference Paper
2009Exploring microsystems - measurement and test in fabrication and R&D
Kurth, S.; Faust, W.; Specht, H.; Meinig, M.; Fernholz, G.
Journal Article
2009Novel MWIR microspectrometer based on a tunable detector
Neumann, N.; Ebermann, M.; Hiller, K.; Kurth, S.
Conference Paper
2009Performance and reliability test of MEMS optical scanners
Kurth, S.; Kaufmann, C.; Hahn, R.; Specht, H.; Gessner, T.
Journal Article
2009Resonant mode detection for fast determination of structural and material parameters of MEMS
Meinig, M.; Kurth, S.; Shaporin, A.; Bauer, W.; Gessner, T.
Conference Paper
2009Technologies and MEMS sensor solutions for smart integrated systems
Hiller, K.; Kurth, S.; Bertz, A.; Gessner, T.
Journal Article
2009Time efficient test method for dimensional parameter determination based on resonant mode detection
Meinig, M.; Kurth, S.; Shaporin, A.; Giessmann, S.; Gessner, T.
Conference Paper
2008Characterization of mechanical shock by impulse specific peak deflection (ISPD)
Kurth, S.; Shaporin, A.; Gessner, T.
Conference Paper
2008Complex miniaturized analysis system for nuclear magnetic resonance spectroscopy of nanoliter amounts of biological sample material
Leidich, S.; Riemer, T.; Braun, M.; Kurth, S.; Gessner, T.
Conference Paper
2008Continuously tunable RF-MEMS varactor for high power applications
Leidich, S.; Kurth, S.; Gessner, T.
Conference Paper
2008A MEMS friction vacuum gauge suitable for high temperature environment
Tenholte, D.; Kurth, S.; Gessner, T.; Dötzel, W.
Conference Paper, Journal Article
2008Reliability of MEMS devices in shock and vibration overload situations
Kurth, S.; Shaporin, A.; Hiller, K.; Kaufmann, C.; Gessner, T.
Conference Paper
2008Tunable infrared detector with integrated micromachined Fabry-Perot filter
Neumann, N.; Kurth, S.; Hiller, K.
Journal Article
2007Design and fabrication of a micromechanical vertical resonator
Jia, C.; Wiemer, M.; Kurth, S.; Otto, T.; Gessner, T.
Conference Paper
2007Determination of dimensional parameters in MEMS components by vibration analyses
Kurth, S.; Mehner, J.; Shaporin, A.V.; Michael, S.; Ebert, M.; Gessner, T.
Conference Paper
2007Laser-Display-System auf Basis von MEMS-Scannern
Specht, H.; Kurth, S.; Kaufmann, C.; Hahn, R.; Dötzel, W.; Gessner, T.; Mehner, J.
Conference Paper
2007MEMS based laser display system
Specht, H.; Kurth, S.; Kaufmann, C.; Gessner, T.; Dötzel, W.
Conference Paper
2007Mikromechanische Schaltervorrichtung mit mechanischer Kraftverstärkung
Frömel, J.; Voigt, S.; Kurth, S.; Leidich, S.; Bertz, A.; Kaufmann, C.; Gessner, T.
Patent
2007Mikrospulen und RF-MEMS Varaktoren für die kernmagnetische Resonanzspektroskopie - Applikationen und Technologie
Leidich, S.; Hofmann, L.; Riemer, T.; Kurth, S.; Schubert, I.; Kaufmann, C.; Gessner, T.
Conference Paper
2007Performance and reliability test of MEMS optical scanners
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2007Testeinrichtung fuer mikromechanische Bauelemente
Kurth, S.; Böhme, M.
Patent
2007Tunable infrared detector with integrated micromachined Fabry-Perot filter
Neumann, N.; Ebermann, M.; Hiller, K.; Kurth, S.
Conference Paper
2007Vollautomatisierter Test von Mikrosystemen auf dem Wafer
Giessmann, S.; Geissler, H.; Werner, F.-M.; Kurth, S.; Michael, S.; Rembe, C.; Klattenhoff, J.; Armbruster, B.; Shaporin, A.
Conference Paper
200624 GHz RF-MEMS phase shifter with non-galvanic electromagnetic coupling fabricated in silicon-bulk technology
Voigt, S.; Leidich, S.; Doetzel, W.; Kurth, S.; Gessner, T.
Journal Article
2006MEMS based micro scanners: Components, technologies and applications
Geßner, T.; Bonitz, J.; Kaufmann, C.; Kurth, S.; Specht, H.
Conference Paper
2006MEMS Vakuumsensor nach dem Reibungsprinzip
Kurth, S.; Tenholte, D.; Hiller, K.; Kaufmann, C.; Gessner, T.; Dötzel, W.
Patent
2006Microwave phase shifter with electromagnetic signal coupling in silicon bulk technology
Leidich, S.; Voigt, S.; Kurth, S.; Hiller, K.; Gessner, T.
Journal Article
2006Schalteranordnung zur Ansteuerung einer Antennenanordnung mit einzelnen Antennenelementen mit einer Mehrzahl von matrixförmig angeordneten Schaltern und Verfahren zum Schalten von matrixförmig angeordneten Schaltern
Kurth, S.; Frömel, J.; Voigt, S.; Leidich, S.; Nestler, J.; Shaporin, A.; Dötzel, W.; Gessner, T.
Patent
2005Koplanare elektromagnetische Koppler zur Signalkontaktierung von RF-MEMS Bauelementen bei Mikrowellenfrequenzen
Voigt, S.; Leidich, S.; Kurth, S.; Geßner, T.; Doetzel, W.
Conference Paper
2005Micromachined mid-infrared tunable Fabry-Perot filter
Neumann, N.; Hiller, K.; Kurth, S.
Conference Paper
2005Mikromechanisches durchstimmbares Fabry–Perot-Filter für die IR-Gasanalytik
Neumann, N.; Heinze, M.; Stegbauer, H.-J.; Hiller, K.; Kurth, S.
Journal Article
2005Model building, control design and practical implementation of a high precision, high dynamical MEMS acceleration sensor
Wolfram, H.; Schmiedel, R.; Hiller, K.; Aurich, T.; Günther, W.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2005A novel 24-kHz resonant scanner for high-resolution laser display
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2005Ein resonanter 24 kHz Scanner für hoch auflösende Laserdisplays
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2004Application of micromirror arrays for Hadamard transform optics
Hanf, M.; Kurth, S.; Billep, D.; Hahn, R.; Faust, W.; Heinz, S.; Dötzel, W.; Gessner, T.
Conference Paper
2004Electrostatic driven scanning micro mirrors applied in spectral sensing devices
Saupe, R.; Otto, T.; Mehner, J.; Kurth, S.; Kaufmann, C.; Geßner, T.
Journal Article
2003Advanced silicon micromachining
Geßner, T.; Bertz, A.; Lohmann, C.; Kurth, S.; Hiller, K.
Journal Article
2003Application of low temperature direct bonding in optical devices and integrated systems
Hiller, K.; Kurth, S.; Neumann, N.; Hahn, R.; Kaufmann, C.; Hanf, M.; Heinz, S.; Geßner, T.; Dötzel, W.; Ebest, G.
Conference Paper
2003Closed loop control of a tunable infrared filter
Sternberger, A.; Hiller, K.; Geßner, T.; Dötzel, W.; Kurth, S.; Neumann, N.; Heinze, M.
Conference Paper
2003An electrically tunable infrared filter on base of Fabry-Perot interferometer
Kurth, S.; Hiller, K.; Neumann, N.; Heinze, M.; Dötzel, W.; Gessner, T.
Conference Paper
2003Ein mikromechanisches, durchstimmbares Fabry-Perot-Filter für die nichtdispersive Gasanalytik im Spektralbereich (3 5) µm
Neumann, N.; Heinze, M.; Stegbauer, H.-J.; Hiller, K.; Kurth, S.
Presentation
2003Tunable Fabry-Perot interferometer for 3 - 4.5 mu m wavelength with bulk micromachined reflector carrier
Kurth, S.; Hiller, K.; Neumann, N.; Heinze, M.; Dötzel, W.; Gessner, T.
Conference Paper
2003Tunable infrared filter based on a Fabry-Perot-Interferometer
Kurth, S.,; Hiller, K.; Dötzel, W.; Geßner, T.; Neumann, N.; Heinze, M.
Conference Paper
2001Bulk micromachined and wafer bonded resonators for vacuum pressure measurement
Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S.
Conference Paper
2001Einsatz von Mikrospiegel-Arrays zur Lichtmodulation in einem Hadamard-Transformations-Spektrometer
Hanf, M.; Kurth, S.; Faust, W.; Hahn, R.; Heinz, S.; Dötzel, W.; Gessner, T.
Conference Paper
2001Micromachined pressure gauge for the vacuum range based on damping of a resonator
Kurth, S.; Hiller, K.; Zichner, N.; Mehner, J.; Iwert, T.; Biehl, S.; Dötzel, W.; Gessner, T.
Conference Paper
2001Ein mikromechanischer Vakuumsensor nach dem Reibungsprinzip
Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S.
Conference Paper
2000Deformation behavior of micro mirror arrays under optical power
Kurth, S.; Kehr, K.; Kaufmann, C.; Faust, W.; Dötzel, W.; Michel, B.
Conference Paper
2000Micromirrors and micromirror arrays for scanning applications
Gessner, T.; Kurth, S.; Kaufmann, C.; Markert, J.; Dötzel, W.
Conference Paper
1999Analogously working micromirror arrays
Kehr, K.; Kurth, S.; Mehner, J.; Kaufmann, C.; Hahn, R.; Dötzel, W.; Gessner, T.
Conference Paper
1999Anwendung von Niedertemperatur-Bondverfahren für die Herstellung von Microscanner-Arrays hoher Frequenz
Wiemer, M.; Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.
Conference Paper
1999Fabrication of high frequency microscanners by using low temperature silicon wafer bonding
Hiller, K.; Wiemer, M.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Milekhin, A.; Friedrich, M.; Zahn, D.
Conference Paper
1999Investigation of heat transfer in micromirrors
Kehr, K.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
1999Low-temperature approaches for fabrication of high-frequency microscanners
Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Wiemer, M; Schubert, I.
Conference Paper
1999Synchronously working micromirrors for beam steering
Kurth, S.; Kehr, K.; Mehner, J.; Kaufmann, C.; Hahn, R.; Seidel, R.; Dötzel, W.; Gessner, T.
Conference Paper