Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2008Cross-Magnetron-Effekt und ITO-Schichtabscheidung
Kupfer, H.; Richter, F.; Kleinhempel, R.; Blüthner, R.; Raubold, T.
Journal Article
2006AC powered reactive magnetron deposition of indium tin oxide (ITO) films from a metallic target
Kupfer, H.; Kleinhempel, R.; Graffel, B.; Welzel, T.; Dunger, T.; Richter, F.; Gnehr, W.-M.; Kopte, T.
Journal Article, Conference Paper
2006A controlled pulsed reactive magnetron sputtering process for oxide film deposition
Kupfer, H.; Kleinhempel, R.; Herrmann, M.; Welzel, T.; Richter, F.; Krause, U.; Kopte, T.; Peters, C.; Frach, P.; Cheng, Y.
Conference Paper
2006High-rate deposition of MgO by reactive ac pulsed magnetron sputtering in the transition mode
Kupfer, H.; Kleinhempel, R.; Richter, F.; Peters, C.; Krause, U.; Kopte, T.; Cheng, Y.
Journal Article
2005Structure and secondary electron emission properties of MGO films deposited by pulsed mid-frequency magnetron sputtering
Peters, C.; Krause, U.; Kupfer, H.; Kleinhempel, R.; Richter, F.
Conference Paper
2004Influence of O2 flow rate on the structural properties of MgO films deposited by dual magnetron sputtering
Cheng, Y.H.; Kupfer, H.; Krause, U.; Richter, F.
Conference Paper, Journal Article
2003Influence of aluminum additions on phase-formation in boron- nitride films deposited by magnetron sputtering
Pfeifer, T.; Richter, F.; Welzel, T.; Kupfer, H.; Willich, P.
Journal Article
1999Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors
Kupfer, H.; Richter, F.; Schlott, P.; Duparre, A.; Gliech, S.
Conference Paper