Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Micromachined array-type mirau interferometer for MEMS metrology
Gorecki, C.; Bargiel, S.; Albero, J.; Passilly, N.; Kujawinska, M.; Zeitner, U.D.
Conference Paper
2012Twyman-Green-type integrated laser interferometer array for parallel MEMS testing
Oliva, Maria; Michaelis, Dirk; Dannberg, Peter; Józwik, Michal; Lizewski, Kamil; Kujawiñska, Malgorzata; Zeitner, Uwe Detlef
Journal Article
2010Design, technology, and signal processing for DOE-based microinterferometer array applied in new generation M(O)EMS test equipment
Kujawinska, M.; Józwik, M.; Styk, A.; Zeitner, U.; Røyset, A.; Beer, S.; Moosburger, R.; Gorecki, C.; Gastinger, K.
Conference Paper
2010SMARTIEHS - A European project for parallel testing of M(O)EMS
Michael, S.; Gastinger, K.; Kujawinska, M.; Zeitner, U.; Albero, J.; Beer, S.; Moosburger, R.; Pizzi, M.
Conference Paper
2008Smatiehs - Smart inspection system for high speed and multifunctional testing of Mems an Moems
Gastinger, K.; Kujawinska, M.; Lovhaugen, O.; Beer, S.; Gorecki, C.; Zeitner, U.D.
Conference Paper