Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Soft x-ray reflectometry, hard x-ray photoelectron spectroscopy and transmission electron microscopy investigations of the internal structure of TiO2(Ti)/SiO2/Si stacks
Filatova, E.O.; Kozhevnikov, I.V.; Sokolov, A.A.; Ubyivovk, E.V.; Yulin, S.; Gorgoi, M.; Schäfers, F.
Journal Article
2009Atomic ordering in TiO2 thin films studied by X-ray reflection spectroscopy
Filatova, E.; Taracheva, E.; Shevchenko, G.; Sokolov, A.; Kozhevnikov, I.; Yulin, S.; Schaefers, F.; Braun, W.
Journal Article
2008Effect of anomalous transmittance in EUV multilayer optics
Kozhevnikov, I.; Yulin, S.; Feigl, T.; Kaiser, N.
Journal Article
2006Transmissionsfilter fuer den EUV-Spektralbereich
Kozhevnikov, I.; Kaiser, N.; Yulin, S.; Feigl, T.
2001Surface characterization of optical components for the DUV, VUV und EUV
Duparre, A.; Kozhevnikov, I.; Gliech, S.; Steinert, J.; Notni, G.
Journal Article
2000X-ray study of the roughness of surfaces and interfaces
Kozhevnikov, I.V.; Asadchikov, V.E.; Bukreeva, I.N.; Duparre, A.
Conference Paper
1999Comparative study of the roughness of optical surfaces and thin films by x-ray scattering and atomic force microscopy
Asadchikov, V.E.; Duparre, A.; Jakobs, S.; Karabekov, Y.; Kozhevnikov, I.V.
Journal Article
1999Comparative study of the roughness of optical surfaces and thin films using atomic force microscopy, x-ray scattering, and light scattering methods
Kozhevnikov, I.V.; Asadchikov, V.E.; Duparre, A.; Gilev, O.N.; Havronin, N.A.; Krivonosov, Y.S.; Ostashev, V.I.; Steinert, J.
Conference Paper
1999X-ray and AFM studies of ultrthin films for EUV and soft X-ray applications
Asadchikov, V.E.; Duparre, A.; Kozhevnikov, I.V.; Krivonosov, Y.S.; Sagitov, S.I.
Conference Paper