Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1999Progress in gray-tone lithography and replication techniques for different materials
Reimer, K.; Engelke, R.; Hofmann, U.; Merz, P.; Kohlmann van Platen, K.T.; Wagner, B.
Conference Paper
1995Conductivity and reproducibility of e-beam induced deposited tungsten lines
Kohlmann van Platen, K.T.; Schmidt, L.; Brünger, W.H.
Conference Paper