Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2006A test structure for characterization of the interface energy of anodically bonded silicon-glass wafers
Knechtel, R.; Knaup, M.; Bagdahn, J.
Conference Paper, Journal Article
2005NON-destructive strength testing of anodic bonded glass-silicon wafer compounds
Knechtel, R.; Knaup, M.; Bagdahn, J.; Wiemer, M.
Conference Paper
2005Strength analysis of etched silicon pressure sensors
Ebert, M.; Knaup, M.; Stelzer, T.; Bagdahn, J.; Bartuch, H.; Brokmann, G.
Conference Paper
2003A failure criterion for interface notches in silicon/glass anodic bonds
Knaup, M.; Busch, M.; Bagdahn, J.; Maschke, H.-G.
Conference Paper