Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Entwicklung piezoelektrisch adaptiver Aluminiumnitrid/Diamant-Linsen für mikrooptische Systeme
Knöbber, Fabian Andreas
: Ambacher, Oliver; Wallrabe, Ulrike
Dissertation
2013Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations
Heidrich, N.; Knöbber, F.; Polyakov, V.M.; Cimalla, V.; Pletschen, W.; Sah, R.E.; Kirste, L.; Leopold, S.; Hampl, S.; Ambacher, O.; Lebedev, V.
Journal Article
2013Crystallographic texture of submicron thin aluminum nitride films on molybdenum electrode for suspended micro and nanosystems
Sah, R.E.; Kirste, L.; Kirmse, H.; Mildner, M.; Wilde, L.; Kopta, S.; Knöbber, F.; Krieg, M.; Cimalla, V.; Lebedev, V.; Ambacher, O.
Journal Article
2013MOEMS tunable microlens made of aluminum nitride membranes
Leopold, S.; Polster, T.; Pätz, D.; Knöbber, F.; Ambacher, O.; Sinzinger, S.; Hoffmann, M.
Journal Article
2013Tunable cylindrical micro lenses based on aluminum nitride membranes
Leopold, S.; Pätz, D.; Knöbber, F.; Ambacher, O.; Sinzinger, S.; Hoffmann, M.
Conference Paper
2012Electrostatically coupled vibration modes in unimorph complementary mircocantilevers
Lebedev, V.; Heidrich, N.; Knöbber, F.; Sah, R.E.; Pletschen, W.; Raynor, B.; Polyakov, V.M.; Cimalla, V.; Ambacher, O.
Journal Article
2012Evaluation of AlN material properties through vibration analysis of thin membranes
Lebedev, V.; Knöbber, F.; Heidrich, N.; Sah, R.E.; Pletschen, W.; Cimalla, V.; Ambacher, O.
Journal Article
2012Evaluation on AIN material properties through vibration analysis of thin membranes
Lebedev, V.; Knöbber, F.; Heidrich, N.; Sah, R.E.; Pletschen, W.; Cimalla, V.; Ambacher, O.
Journal Article, Conference Paper
2012Static and dynamic characterization of AlN and nanocrystalline diamond membranes
Knöbber, F.; Zürbig, V.; Heidrich, N.; Hees, J.; Sah, R.E.; Baeumler, M.; Leopold, S.; Pätz, D.; Ambacher, O.; Lebedev, V.
Journal Article
2011AlN based microgenerators for powering implantable sensor devices
Bludau, O.; Röhlig, C.-C.; Knöbber, F.; Kirste, L.; Sah, R.E.; Driad, R.; Pletschen, W.; Lebedev, V.; Cimalla, V.
Journal Article, Conference Paper
2011AlN-basierte mikroelektromechanische Strukturen für Implantate
Heidrich, N.; Knöbber, F.; Hampl, S.; Pletschen, W.; Sah, R.E.; Cimalla, V.; Lebedev, V.; Ambacher, O.
Conference Paper
2011Biocompatible AlN-based piezo energy harvesters for implants
Heidrich, N.; Knöbber, F.; Sah, R.E.; Pletschen, W.; Hampl, S.; Cimalla, V.; Lebedev, V.
Conference Paper
2011Dynamic characterization of thin aluminum nitride microstructures
Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Sah, R.E.; Williams, O.A.; Kirste, L.; Leopold, S.; Pätz, D.; Cimalla, V.; Ambacher, O.; Lebedev, V.
Journal Article, Conference Paper
2011Tunable refractive beam steering using aluminum nitride thermal actuators
Leopold, S.; Paetz, D.; Knoebber, F.; Polster, T.; Ambacher, O.; Sinzinger, S.; Hoffmann, M.
Conference Paper
2010Diamond/AlN thin films for optical applications
Knöbber, F.; Bludau, O.; Williams, O.A.; Sah, R.E.; Kirste, L.; Baeumler, M.; Leopold, S.; Pätz, D.; Nebel, C.E.; Ambacher, O.; Cimalla, V.; Lebedev, V.
Conference Paper
2010Investigation of stress in AIN thin films for piezoelectric MEMS
Sah, R.E.; Kirste, Lutz; Baeumler, Martina; Hiesinger, P.; Cimalla, Volker; Lebedev, Vadim; Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Baumann, H.
Conference Paper
2010Tunable compound eye cameras
Pfätz, D.; Leopold, S.; Knöbber, F.; Sinzinger, S.; Hoffmann, M.; Ambacher, O.
Conference Paper
2009Piezoelectrically actuated AlN and Nanodiamond microstructures
Knöbber, F.; Sillero, E.; Röhlig, C.-C.; Williams, O.A.; Sah, R.E.; Kirste, L.; Cimalla, V.; Nebel, C.E.; Calle, F.; Lebedev, V.
Conference Paper