Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Reducing rowland ghosts in diffraction gratings by dynamic exposure near-field holography
Lin, D.; Chen, H.; Liu, Z.; Dietrich, K.; Kroker, S.; Käsebier, T.; Liu, Y.; Kley, E.-B.; Hong, Y.
Journal Article
2017175 nm period grating fabricated by i-line proximity mask-aligner lithography
Bourgin, Y.; Voigt, D.; Käsebier, T.; Siefke, T.; Kley, E.-B.; Zeitner, U.D.
Journal Article
2017Quasi-linearly polarized hybrid modes in tapered and metal-coated tips with circular apertures: Understanding the functionality of aperture tips
Tugchin, B.N.; Janunts, N.; Steinert, M.; Dietrich, K.; Kley, E.-B.; Tünnermann, A.; Pertsch, T.
Journal Article
2016Black Germanium fabricated by reactive ion etching
Steglich, M.; Käsebier, T.; Kley, E.-B.; Tünnermann, A.
Journal Article
2016Blistering during the atomic layer deposition of iridium
Genevee, P.; Ahiavi, E.; Janunts, N.; Pertsch, T.; Oliva, M.; Kley, E.-B.; Szeghalmi, A.
Journal Article
2016Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
Siefke, T.; Kroker, S.; Pfeiffer, K.; Puffky, O.; Dietrich, K.; Franta, D.; Ohlidal, I.; Szeghalmi, A.; Kley, E.-B.; Tünnermann, A.
Journal Article
2016Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
Ghazaryan, L.; Kley, E.-B.; Tünnermann, A.; Szeghalmi, A.
Journal Article
2016Periodic sub-100nm structures fabricated by proximity i-line mask-aligner lithography (and self-aligned double patterning)
Bourgin, Y.; Voigt, D.; Käsebier, T.; Kley, E.-B.; Zeitner, U.D.
Conference Paper
2016Self-organized, effective medium black silicon antireflection structures for silicon optics in the mid-infrared
Steglich, M.; Käsebier, T.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2015Black Silicon Photovoltaics
Füchsel, K.; Kroll, M.; Otto, M.; Steglich, M.; Bingel, A.; Käsebier, T.; Wehrspohn, R.; Kley, E.-B.; Pertsch, T.; Tünnermann, A.
Book Article
2015High-efficiency embedded transmission grating made by atomic layer deposition
Ratzsch, S.; Kley, E.-B.; Tünnermann, A.; Szeghalmi, A.
Conference Paper
2015Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
Ratzsch, S.; Kley, E.-B.; Tünnermann, A.; Szeghalmi, A.
Journal Article
2015Nanoporous SiO2 made by atomic layer deposition and atomic layer etching
Ghazaryan, L.; Kley, E.-B.; Tünnermann, A.; Szeghalmi, A.
Conference Paper
2015Nonlinear interactions in highly dispersive nanostructured lithium niobate
Pertsch, T.; Setzpfandt, F.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2014Local fluorescent dye excitation with guided second-harmonic in lithium niobate nanowires
Sergeyev, A.; Geiss, R.; Solntsev, A.; Kley, E.-B.; Pertsch, Thomas; Grange, R.
Conference Paper
2014Multi-stencil character projection e-beam lithography: A fast and flexible way for high quality optical metamaterials
Huebner, U.; Falkner, M.; Zeitner, U.D.; Banasch, M.; Dietrich, K.; Kley, E.-B.
Conference Paper
2013Differential all-optical tuning of eigenmodes in coupled microdisks
Schmidt, C.; Chipouline, A.; Käsebier, T.; Kley, E.-B.; Tünnermann, A.; Pertsch, T.
Journal Article
2013Investigation of mechanical losses of thin silicon flexures at low temperatures
Nawrodt, R.; Schwarz, C.; Kroker, S.; Martin, I.W.; Bassiri, R.; Brückner, F.; Cunningham, L.; Hammond, G.D.; Heinert, D.; Hough, J.; Käsebier, T.; Kley, E.-B.; Neubert, R.; Reid, S.; Rowan, S.; Seidel, P.; Tünnermann, A.
Journal Article
2013Mode analysis of photonic crystal L3 cavities in self-suspended lithium niobate membranes
Diziain, S.; Geiss, R.; Zilk, M.; Schrempel, F.; Kley, E.-B.; Tünnermann, A.; Pertsch, T.
Journal Article
2012Beugungsgitter und Verfahren zu dessen Herstellung
Fuchs, Frank; Zeitner, Uwe Detlef; Kley, E.-B.
Patent
2012Black silicon photovoltaics
Füchsel, K.; Kroll, M.; Käsebier, T.; Otto, M.; Pertsch, T.; Kley, E.-B.; Wehrspohn, R.B.; Kaiser, N.; Tünnermann, A.
Conference Paper
2012An EUV beamsplitter based on conical grazing incidence diffraction
Braig, C.; Fritzsch, L.; Käsebier, T.; Kley, E.-B.; Laubis, C.; Liu, Y.; Scholze, F.; Tünnermann, A.
Journal Article
2011Atomic layer deposition of iridium thin films and their application in gold electrodeposition
Szeghalmi, A.; Arnold, M.; Berger, A.; Schammelt, N.; Füchsel, K.; Knez, M.; Kley, E.-B.; Zahn, D.R.T.; Tünnermann, A.
Conference Paper
2011Broadband iridium wire grid polarizer for UV applications
Weber, T.; Käsebier, T.; Kley, E.-B.; Tünnermann, A.
Journal Article
2011Chiral metamaterial composed of three-dimensional plasmonic nanostructures
Helgert, C.; Pshenay-Severin, E.; Falkner, M.; Menzel, C.; Rockstuhl, C.; Kley, E.-B.; Tünnermann, A.; Lederer, F.; Pertsch, T.
Journal Article
2011Coupled disk microresonators
Schmidt, C.; Liebsch, M.; Chipouline, A.; Janunts, N.; Käsebier, T.; Kley, E.-B.; Tünermann, A.; Pertsch, T.
Conference Paper
2011Design and fabrication of a highly off-axis binary multi-phase-level computer-generated hologram based on an effective medium approach
Freese, W.; Kämpfe, T.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2011Diffractively coupled Fabry-Perot resonator with power-recycling
Britzger, M.; Friedrich, D.; Kroker, S.; Brückner, F.; Burmeister, O.; Kley, E.-B.; Tünnermann, A.; Danzmann, K.; Schnabel, R.
Journal Article
2011Effects of anisotropic disorder in an optical metamaterial
Helgert, C.; Rockstuhl, C.; Etrich, C.; Kley, E.-B.; Tünnermann, A.; Lederer, F.; Pertsch, T.
Journal Article
2011Enhanced angular tolerance of resonant waveguide grating reflectors
Kroker, S.; Brückner, F.; Kley, E.-B.; Tünnermann, A.
Journal Article
2011Mapping of whispering-gallery-modes in coupled disk microresonators
Schmidt, C.; Liebsch, M.; Chipouline, A.; Janunts, N.; Kley, E.-B.; Tünnermann, A.; Pertsch, T.
Conference Paper
2011Optical transmissivity of single metallic V-grooves
Janunts, N.; Steinert, M.; Kley, E.-B.; Tünnermann, A.; Pertsch, T.; Nerkararyan, K.
Conference Paper
2011Optimized electron beam writing strategy for fabricating computer-generated holograms based on an effective medium approach
Freese, W.; Kämpfe, T.; Rockstroh, W.; Kley, E.-B.; Tünnermann, A.
Journal Article
2011Pound-Drever-Hall error signals for the length control of three-port grating coupled cavities
Britzger, M.; Friedrich, D.; Kroker, S.; Brückner, F.; Burmeister, O.; Kley, E.-B.; Tünnermann, A.; Danzmann, K.; Schnabel, R.
Journal Article
2011Reflective cavity couplers based on resonant waveguide gratings
Kroker, S.; Käsebier, T.; Brückner, F.; Fuchs, F.; Kley, E.-B.; Tünnermann, A.
Journal Article
2011Stand-alone diamond binary phase transmission gratings for the EUV band
Braig, C.; Käsebier, T.; Kley, E.-B.; Tünnermann, A.
Journal Article
2011Temperature induced nonlinearity in coupled microresonators
Schmidt, C.; Chipouline, A.; Käsebier, T.; Kley, E.-B.; Tünnermann, A.; Pertsch, T.
Journal Article
2011Thermal nonlinearity in coupled disk microresonators
Schmidt, C.; Chipouline, A.; Kley, E.-B.; Tünnermann, A.; Pertsch, T.
Conference Paper
2011Translational, rotational, and vibrational coupling into phase in diffractively coupled optical cavities
Barr, B.W.; Edgar, M.P.; Nelson, J.; Plissi, M.V.; Huttner, S.H.; Sorazu, B.; Strain, K.A.; Burmeister, O.; Britzger, M.; Friedrich, D.; Schnabel, R.; Danzmann, K.; Hallam, J.; Freise, A.; Clausnitzer, T.; Brückner, F.; Kley, E.-B.; Tünnermann, A.
Journal Article
2011Transmission enhanced optical lenses with self-organized antireflective subwavelength structures for the UV range
Schulze, M.; Lehr, D.; Helgert, M.; Kley, E.-B.; Tünnermann, A.
Journal Article
2011Waveguide grating mirror in a fully suspended 10 meter Fabry-Perot cavity
Friedrich, D.; Barr, B.W.; Brückner, F.; Hild, S.; Nelson, J.; Macarthur, J.; Plissi, M.V.; Edgar, M.P.; Huttner, S.H.; Sorazu, B.; Kroker, S.; Britzger, M.; Kley, E.-B.; Danzmann, K.; Tünnermann, A.; Strain, K.A.; Schnabel, R.
Report
2011Waveguide grating mirror in a fully suspended 10 meter Fabry-Perot cavity
Friedrich, D.; Barr, B.W.; Brückner, F.; Hild, S.; Nelson, J.; Macarthur, J.; Plissi, M.V.; Edgar, M.P.; Huttner, S.H.; Sorazu, B.; Kroker, S.; Britzger, M.; Kley, E.-B.; Danzmann, K.; Tünnermann, A.; Strain, K.A.; Schnabel, R.
Journal Article
2011Widely tunable monolithic narrowband grating filter for near-infrared radiation
Brückner, F.; Kroker, S.; Friedrich, D.; Kley, E.-B.; Tünnermann, A.
Journal Article
2010Design of binary subwavelength multiphase level computer generated holograms
Freese, W.; Kämpfe, T.; Kley, E.-B.; Tünnermann, A.
Journal Article
2010Development of a large blazed transmission grating by effective binary index modulation for the GAIA radial velocity spectrometer
Erdmann, M.; Kley, E.-B.; Zeitner, U.
Conference Paper
2010Experimental demonstration of a suspended, diffractively coupled Fabry-Perot cavity
Edgar, M.P.; Barr, B.W.; Nelson, J.; Plissi, M.V.; Strain, K.A.; Burmeister, O.; Britzger, M.; Danzmann, K.; Schnabel, R.; Clausnitzer, T.; Brückner, F.; Kley, E.-B.; Tünnermann, A.
Conference Paper, Journal Article
2010High performance gratings for space applications
Zeitner, U.; Michaelis, D.; Kley, E.-B.; Erdmann, M.
Conference Paper
2010Investigation on the properties of a laminar grating as a soft x-ray beam splitter
Liu, Y.; Fuchs, H.J.; Liu, Z.K.; Chen, H.Y.; He, S.N.; Fu, S.J.; Kley, E.-B.; Tünnermann, A.
Journal Article
2010Multi-phase-level diffractive elements realized by binary effective medium patterns
Freese, W.; Kämpfe, T.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2010Nanostructured SIS solar cells
Füchsel, K.; Schulz, U.; Kaiser, N.; Käsebier, T.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2010Optical modeling of needle like silicon surfaces produced by an ICPRIE process
Kroll, M.; Käsebier, T.; Otto, M.; Salzerc, R.; Wehrspohn, R.; Kley, E.-B.; Tünnermann, A.; Pertsch, A.
Conference Paper
2010Photonic submicron-structures. Effective media for high-performance applications
Zeitner, U.D.; Kley, E.-B.; Tünnermann, A.
Journal Article
2010Plasmonic modes of extreme subwavelength nanocavities
Petschulat, J.; Helgert, C.; Steinert, M.; Bergner, N.; Rockstuhl, C.; Lederer, F.; Pertsch, T.; Tünnermann, A.; Kley, E.-B.
Journal Article
2010Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal
Brückner, F.; Friedrich, D.; Clausnitzer, T.; Britzger, M.; Burmeister, O.; Danzmann, K.; Kley, E.-B.; Tünnermann, A.; Schnabel, R.
Journal Article
2010Tailoring the properties of optical metamaterials
Helgert, C.; Pertsch, T.; Rockstuhl, C.; Pshenay-Severin, E.; Menzel, C.; Kley, E.-B.; Chipouline, A.; Etrich, C.; Hübner, U.; Tünnermann, A.; Lederer, F.
Journal Article
2009Broadband antireflective structures applied to high resistive float zone silicon in the THz spectral range
Brückner, C.; Käsebier, T.; Pradarutti, B.; Riehemann, S.; Notni, G.; Kley, E.-B.; Tünnermann, A.
Journal Article
2009Demonstration of a cavity coupler based on a resonant waveguide grating
Brückner, F.; Friedrich, D.; Clausnitzer, T.; Burmeister, O.; Britzger, M.; Kley, E.-B.; Danzmann, K.; Tünnermann, A.; Schnabel, R.
Journal Article
2009Effective properties of amorphous metamaterials
Helgert, C.; Rockstuhl, C.; Etrich, C.; Menzel, C.; Kley, E.-B.; Tünnermann, A.; Lederer, F.; Pertsch, T.
Journal Article
2009Experimental and theoretical investigation of microresonators at Jena university
Schmidt, C.; Chipouline, A.; Käsebier, T.; Kley, E.-B.; Tünnermann, A.; Deych, L.I.; Pertsch, T.
Conference Paper
2009Experimental demonstration of a suspended diffractively coupled optical cavity
Edgar, M.P.; Barr, B.W.; Nelson, J.; Plissi, M.V.; Strain, K.A.; Burmeister, O.; Britzger, M.; Danzmann, K.; Schnabel, R.; Clausnitzer, T.; Brückner, F.; Kley, E.-B.; Tünnermann, A.
Journal Article
2009Large-scale application of binary subwavelength structures
Kley, E.-B.; Freese, W.; Kämpfe, T.; Tünnermann, A.; Zeitner, U.D.; Michaelis, D.; Erdmann, M.
Conference Paper
2009Nanostructured back side silicon solar cells
Voisin, P.; Peters, M.; Hauser, H.; Helgert, C.; Kley, E.-B.; Pertsch, T.; Bläsi, B.; Hermle, M.; Glunz, S.W.
Conference Paper
2009Nonlinear effects in silica and hybrid silica/silicon disc micro resonators
Schmidt, C.; Chipouline, A.; Käsebier, T.; Chowdhury, G.K.; Kley, E.-B.; Tünnermann, A.; Deych, L.; Pertsch, T.
Conference Paper
2009Nonlinear optical response of silica and hybrid silica/silicon disc micro resonators
Schmidt, C.; Chipouline, A.; Käsebier, T.; Kley, E.-B.; Tünnermann, A.; Deych, L.; Pertsch, T.
Conference Paper
2009Observation of optical coupling in microdisk resonators
Schmidt, C.; Chipouline, A.; Käsebier, T.; Kley, E.-B.; Tünnermann, A.; Pertsch, T.; Shuvayev, V.; Deych, L.I.
Journal Article
2009Photonic crystals in lithium niobate by ion-beam enhanced etching
Hartung, H.; Geiss, R.; Gischkat, T.; Schrempel, F.; Iliew, R.; Pertsch, T.; Lederer, F.; Wesch, W.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2009Polarization-independent negative-index metamaterial in the near infrared
Helgert, C.; Menzel, C.; Rockstuhl, C.; Pshenay-Severin, E.; Kley, E.-B.; Chipouline, A.; Tünnermann, A.; Lederer, F.; Pertsch, T.
Journal Article
2009Spectral characteristics of coupled silica disc micro resonators
Schmidt, C.; Chipouline, A.; Käsebier, T.; Deych, L.; Kley, E.-B.; Tünnermann, A.; Kley, E.-B.; Pertsch, T.
Conference Paper
2009Spectral properties of coupled silica disc micro resonators
Schmidt, C.; Chipouline, A.; Käsebier, T.; Deych, L.; Kley, E.-B.; Tünnermann, A.; Pertsch, T.
Conference Paper
2009Ultrathin membranes in x-cut lithium niobate
Schrempel, F.; Gischkat, T.; Hartung, H.; Höche, T.; Kley, E.-B.; Tünnermann, A.; Wesch, W.
Journal Article
2008Comparison of different simulation methods for multiplane computer generated holograms
Kämpfe, T.; Hudelist, F.; Waddie, A.J.; Taghizadeh, M.R.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2008Designing multiplane computer-generated holograms with consideration of the pixel shape and the illumination wave
Kämpfe, T.; Kley, E.-B.; Tünnermann, A.
Journal Article
2008Diffractive beam splitter characterization via a power-recycled interferometer
Friedrich, D.; Burmeister, O.; Bunkowski, A.; Clausnitzer, T.; Fahr, S.; Kley, E.-B.; Tünnermann, A.; Danzmann, K.; Schnabel, R.
Journal Article
2008Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching
Hartung, H.; Kley, E.-B.; Tünnermann, A.; Gischkat, G.; Schrempel, F.; Wesch, W.
Journal Article
2008Monolithic dielectric surfaces as new low-loss light-matter interfaces
Brückner, F.; Clausnitzer, T.; Burmeister, O.; Friedrich, D.; Kley, E.-B.; Danzmann, K.; Tünnermann, A.; Schnabel, R.
Journal Article
2008Power-recycled Michelson interferometer with a 50/50 grating beam splitter
Friedrich, D.; Burmeister, O.; Britzger, M.; Bunkowski, A.; Clausnitzer, T.; Fahr, S.; Kley, E.-B.; Tünnermann, A.; Danzmann, K.; Schnabel, R.
Conference Paper
2008Spectral combining of pulsed fiber lasers: Scaling considerations
Schmidt, O.; Klingebiel, S.; Ortac, B.; Röser, F.; Brückner, F.; Clausnitzer, T.; Kley, E.-B.; Limpert, J.; Tünnermann, A.
Conference Paper
2007A double cell metamaterial for independent tuning of the magnetic and electric response
Pshenay-Severin, E.; Garwe, F.; Petschulat, J.; Rockstuhl, C.; Hübner, U.; Helgert, C.; Kley, E.-B.; Pertsch, T.; Tünnermann, A.; Lederer, F.
Conference Paper
2007Monolithischer dielektrischer Spiegel
Kley, E.-B.; Brückner, F.; Clausnitzer, T.
Patent
2007Second order nonlinear response of gold nanostructures on Lithiumniobate
Helgert, C.; Rockstuhl, C.; Pertsch, T.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2006Advanced lithography for micro-optics
Zeitner, U.D.; Kley, E.-B.
Conference Paper
2006Diffractive optics for gravitational wave detectors
Bunkowski, A.; Burmeister, O.; Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Danzmann, K.; Schnabel, R.
Conference Paper, Journal Article
2006Dispersion properties of photonic crystal waveguides with a low in-plane index contrast
Augustin, M.; Iliew, R.; Etrich, C.; Setzpfandt, F.; Fuchs, H.-J.; Kley, E.-B.; Nolte, S.; Pertsch, T.; Lederer, F.; Tünnermann, A.
Journal Article
2006Nonlinear resonance effects on thin micro structured aluminum metal gratings by high power fs-laser pulses
Kley, E.-B.; Erdmann, T.; Triebel, P.; Fuchs, H.-J.; Horstmann, B.; Nolte, S.; Tünnermann, A.
Conference Paper
2006Optical characterization of ultrahigh diffraction efficiency gratings
Bunkowski, A.; Burmeister, O.; Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Danzmann, K.; Schnabel, R.
Journal Article
2005Low-loss gratings for next-generation gravitational wave detectors
Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Bunkowski, A.; Burmeister, O.; Danzmann, K.; Schnabel, R.; Duparre, A.; Gliech, S.
Conference Paper
2005Self-guiding of infrared and visible light in photonic crystal slabs
Augustin, M.; Iliew, R.; Etrich, C.; Schelle, D.; Fuchs, H.-J.; Peschel, U.; Nolte, S.; Kley, E.-B.; Lederer, F.; Tünnermann, A.
Journal Article
2005Ultra low-loss low-efficiency diffraction gratings
Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Bunkowski, A.; Burmeister, O.; Danzmann, K.; Schnabel, R.; Duparre, A.
Journal Article
2004Application of the rigorous treatment for the characterization of sub-micron structures on photomasks
Triebel, P.; Weißbrodt, P.; Nolte, S.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2004Basics for fast and false-color-free birefringence measurements
Kaufmann, S.; Zeitner, U.D.; Schache, H.; Kley, E.-B.
Conference Paper
2004Design and experimental realisation of monolithic high-brightness diffractive broad area lasers
Büttner, A.; Kowarschik, R.; Schelle, D.; Kley, E.-B.; Zeitner, U.D.
Conference Paper
2004Diffractionless propagation of light in a low-index photonic-crystal film
Iliew, R.; Etrich, C.; Peschel, U.; Lederer, F.; Augustin, M.; Fuchs, H.-J.; Schelle, D.; Kley, E.-B.; Nolte, S.; Tünnermann, A.
Journal Article
2004High efficiency beam splitters with antireflection coating
Elfström, H.; Clausnitzer, T.; Walter, S.; Kaiser, N.; Kley, E.-B.
Conference Paper
2004High transmission and single-mode operation in low-index-contrast photonic crystal waveguide devices
Augustin, M.; Fuchs, H.-J.; Schelle, D.; Kley, E.-B.; Nolte, S.; Tünnermann, A.; Iliew, R.; Etrich, C.; Peschel, U.; Lederer, F.
Journal Article
2004Investigation of photonic crystals with a low in-plane index contrast
Augustin, M.; Iliew, R.; Fuchs, H.-J.; Peschel, U.; Kley, E.-B.; Nolte, S.; Lederer, F.; Tünnermann, A.
Journal Article
2004Microstructure technology for optical component fabrication
Kley, E.-B.; Wittig, L.-C.; Tünnermann, A.
Conference Paper
2004Photonic crystal optical circuits in moderate index materials
Augustin, M.; Böttger, G.; Eich, M.; Etrich, C.; Fuchs, H.; Iliew, R.; Hübner, U.; Kessler, M.; Kley, E.-B.; Lederer, F.; Liguda, C.; Nolte, S.; Meyer, H.G.; Morgenroth, W.; Peschel, U.; Petrov, A.; Schelle, D.; Schmidt, M.; Tünnermann, A.; Wischmann, W.
Book Article
2003Efficient side-pumping of fibre lasers using binary gold diffraction gratings
Herda, R.; Liem, A.; Schnabel, B.; Drauschke, A.; Fuchs, H.-J.; Kley, E.-B.; Tünnermann, A.
Journal Article
2003High-average-power femtosecond fiber chirped-pulse amplification system
Limpert, J.; Clausnitzer, I.; Liem, A.; Schreiber, T.; Fuchs, H.-J.; Zellmer, H.; Kley, E.-B.; Tünnermann, A.
Journal Article
2003Micro-optical sensor system for birefringence characterization of textile-fibers
Zeitner, U.; Kaufmann, S.; Kley, E.-B.
Conference Paper
2003Mikrooptisches Sensorsystem zur Bestimmung der Doppelbrechung von Textilfasern
Zeitner, U.D.; Kaufmann, S.; Kley, E.-B.
Journal Article
2003Polarizing metal stripe gratings for a micro-optical polarimeter
Clausnitzer, I.; Fuchs, H.-J.; Kley, E.-B.; Tünnermann, A.; Zeitner, U.D.
Conference Paper
2001Mikrooptische Elemente, Funktionen und lithographische Herstellungstechnologien
Kley, E.-B.; Tünnermann, A.; Zeitner, U.D.; Karthe, W.
Journal Article
2000Micro-optical elements and their integration to glass and optoelectronic wafers
Dannberg, P.; Erdmann, L.; Bierbaum, R.; Krehl, A.; Bräuer, A.; Kley, E.-B.
Journal Article
1999Fabrication and properties of refractive micro-optical beam-shaping elements
Kley, E.-B.; Wittig, L.-C.; Cumme, M.; Zeitner, U.D.; Dannberg, P.
Conference Paper
1999Polarization multiplexing of diffractive elements with metal-stripe grating pixels
Zeitner, U.D.; Schnabel, B.; Kley, E.-B.; Wyrowski, F.
Journal Article
1998Complex microprism structures and their application to multichannel fiber optic switches
Göring, R.; Glöckner, S.; Kley, E.-B.; Thoma, F.
Conference Paper
1998Switching light by the use of opto-mechanical micro devices
Göring, R.; Glöckner, S.; Kley, E.-B.; Thoma, F.
Conference Paper
1997Efficient focusing polymer waveguide grating couplers
Waldhäusl, R.; Bräuer, A.; Schnabel, B.; Kley, E.-B.
Journal Article
1995Low energy electron lithography; energy control and variable energy exposure
Brünger, W.; Kley, E.-B.; Schnabel, B.; Stolberg, I.; Zierbock, M.; Plontke, R.
Conference Paper