Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2013Metastasis awakening: The challenges of targeting minimal residual cancer
Polzer, Bernhard; Klein, Christoph A.
Journal Article
2012Feasibility study of optical/e-beam complementary lithography
Hohle, Christoph; Choi, Kang-Hoon; Freitag, Martin; Gutsch, Manuela; Rudolph, Matthias; Thrun, Xaver; Jaschinsky, Philipp; Kahlenberg, Frank; Klein, Christof; Klikovits, Jan
Conference Paper
2012Physical characterization of PECVD and PEALD Ru(-C) films and comparison with PVD ruthenium film properties
Wojcik, H.; Junige, M.; Bartha, W.; Albert, M.; Neumann, V.; Merkel, U.; Peeva, A.; Gluch, J.; Menzel, S.; Munnik, F.; Liske, R.; Utess, D.; Richter, I.; Klein, C.; Engelmann, H.J.; Ho, P.; Hossbach, C.; Wenzel, C.
Journal Article
2012Sequence error storms and the landscape of mutations in cancer
Kirsch, S.; Klein, C.A.
Editorial, Journal Article
2012Umsetzung und Erprobung von aktiven Lagern im Fahrwerksbereich
Atzrodt, Heiko; Drögemüller, Tobias; Klein, Christoph
Conference Paper
2011Information extraction from text for improving research on small molecules and histone modifications
Klein, Corinna
Dissertation
2011Investigation of the analysis parameters and background subtraction for high-k materials with atom probe tomography
Mutas, S.; Klein, C.; Gerstl, S.S.A.
Conference Paper, Journal Article
2011NM-series of representative manufactured nanomaterials. NM-300 Silver. Characterisation, stability, homogeneity
Klein, C.L.; Comero, S.; Stahlmecke, B.; Romazanov, J.; Kuhlbusch, T.A.; Doren, E. van; Temmerman, P.-J. de; Mast, J.; Wick, P.; Krug, H.; Locoro, G.; Hund-Rinke, K.; Kördel, W.; Friedrichs, S.; Maier, G.; Werner, J.; Linsinger, T.; Gawlik, B.M.
Book Article
2011Sol-Gel-Verfahren für die Herstellung von ZrO2-Schichten
Klein, C.
Dissertation
2011Ultrathin TaN/Ta barrier modifications to fullfill next technology node requirements
Gerlich, L.; Ohsiek, S.; Klein, C.; Geiß, M.; Friedemann, M.; Kücher, P.; Schmeißer, D.
Conference Paper
2010Investigation of the analysis parameters and background substraction for high-k materials with Atom Probe Tomography
Mutas, S.; Klein, C.; Gerstl, S.S.
Abstract, Conference Paper
2010Physical and electrical properties of MOCVD and ALD deposited HfZrO4 gate dielectrics for 32nm CMOS high performance logic SOI technologies
Kelwing, T.; Mutas, S.; Trentzsch, M.; Naumann, A.; Trui, B.; Herrmann, L.; Graetsch, F.; Klein, C.; Wilde, L.; Ohsiek, S.; Weisheit, M.; Peeva, A.; Richter, I.; Prinz, H.; Wuerfel, A.; Carter, R.; Stephan, R.; Kücher, P.; Hansch, W.
Conference Paper
2009Charged particle multi-beam lithography evaluations for sub-16nm hp mask node fabrication and wafer direct write
Platzgummer, E.; Klein, C.; Joechl, P.; Loeschner, H.; Witt, M.; Pilz, W.; Butschke, J.; Jurisch, M.; Letzkus, F.; Sailer, H.; Irmscher, M.
Conference Paper
2009A framework for numerical modeling and simulation of shunt damping technology
Kurch, M.; Klein, C.; Mayer, D.
Conference Paper
2009Investigation of boron delta-layers in silicon measured by atom probe tomography (APT)
Klein, C.; Mutas, S.; Würfel, A.; Zschech, E.
Conference Paper, Journal Article
2009Investigations of field-evaporated end forms in voltage- and laser-pulsed atom probe tomography
Shariq, A.; Mutas, S.; Wedderhoff, K.; Klein, C.; Hortenbach, H.; Teichert, S.; Kücher, P.; Gerstl, S.S.A.
Conference Paper, Journal Article
2009PML2: The maskless multibeam solution for the 22nm node and beyond
Klein, C.; Platzgummer, E.; Klikovits, J.; Piller, W.; Loeschner, H.; Bejdak, T.; Dolezel, P.; Kolarik, V.; Klingler, W.; Letzkus, F.; Butschke, J.; Irmscher, M.; Witt, M.; Pilz, W.; Jaschinsky, P.; Thrum, F.; Hohle, C.; Kretz, J.; Nogatch, J.T.; Zepka, A.
Conference Paper
2009The reference-matrix concept applied to chemical testing of soils
Kördel, W.; Peijnenburg, W.; Klein, C.L.; Kuhnt, G.; Bussian, B.M.; Gawlik, B.M.
Journal Article
2008MAGIC: A european program to push the insertion of maskless lithography
Pain, L.; Icard, B.; Tedesco, S.; Kampherbeck, B.; Gross, G.; Klein, C.; Loeschner, H.; Platzgummer, E.; Morgan, R.; Manakli, S.; Kretz, J.; Holhe, C.; Choi, K.-H.; Thrum, F.; Kassel, E.; Pilz, W.; Keil, K.; Butschke, J.; Irmscher, M.; Letzkus, F.; Hudek, P.; Paraskevopoulos, A.; Ramm, P.; Weber, J.
Conference Paper
2008Projection maskless lithography (PML2)
Klein, C.; Platzgummer, E.; Loeschner, H.; Gross, G.; Dolezel, P.; Tmej, M.; Kolarik, V.; Klingler, W.; Letzkus, F.; Butschke, J.; Irmscher, M.; Witt, M.; Pilz, W.
Conference Paper
2007Dermal fibroblasts induce maturation of dendritic cells
Saalbach, A.; Klein, C.; Sleemann, J.; Sack, U.; Kauer, F.; Gebhardt, C.; Averbeck, M.; Anderegg, U.; Simon, J.C.
Journal Article
2006An approach to reduce cost and size of active mounts for automobile applications
Thomaier, M.; Mayer, D.; Melz, T.; Herold, S.; Atzrodt, H.; Klein, C.
Conference Paper
2006Vorrichtung und Verfahren zur Schwingungstilgung einer mechanischen Struktur
Hanselka, H.; Klein, C.; Mayer, D.; Melz, T.
Patent
2004Softwareentwicklung für EMUS-Frontend
Klein, C.
Thesis
2000A Flexible IP Active Networks Architecture
Galis, A.; Plattner, B.; Smith, J.M.; Denazis, S.; Moeller, E.; Guo, H.; Klein, C.; Serrat, J.; Laarhuis, J.; Karetsos, G.T.; Todd, C.
Conference Paper