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| 2020 | Einsatz von Polyelektrolyt-Multischichten für das temporäre Waferbonden
Dillmann, Helena
: Klages, C.-P.; Garnweitner, G. | Dissertation |
| 2018 | IR- and NEXAFS-spectroscopic characterization of plasma-nitrogenated polyolefin surfaces
Khosravi, Z.; Kotula, S.; Lippitz, A.; Unger, W.E.S.; Klages, C.-P. | Journal Article |
| 2017 | Improved bonding behavior by plasma coating for roughened surfaces
Eichler, M.; Nagel, K.; Klages, C.-P. | Abstract |
| 2017 | Parametric studies on droplet generation reproducibility for applications with biological relevant fluids
Wiedemeier, S.; Eichler, M.; Römer, R.; Grodrian, A.; Lemke, K.; Nagel, K.; Klages, C.-P.; Gastrock, G. | Journal Article |
| 2017 | Plasma nitrogenation of polymer surfaces with a new type of combinatorial plasma-printing reactor
Kotula, S.; Lüdemann, M.; Philipp, J.; Thomas, M.; Klages, C.-P. | Journal Article |
| 2017 | Stickstofffunktionalisierung. Sauerstofffreie Plasmajet-Vorbehandlung für die Kunststoffaktivierung bei Umgebungsdruck
Eichler, M.; Fischer, V.; Paulmann, S.; Stammen, E.; Thomas, M.; Khosravi, Z.; Hinze, A.; Grishin, A.; Lachmann, K.; Borris, J.; Dohse, A.; Nagel, K.; Dilger, K.; Klages, C.-P. | Conference Paper |
| 2016 | Ar-H2 plasma surface treatments of silicon wafers at atmospheric pressure
Hergelová, B.; Eichler, M.; Nagel, K.; Klages, C.-P. | Conference Paper |
| 2016 | Characterisation and electrochemical evaluation of plasma electrolytic oxidation coatings on magnesium with plasma enhanced chemical vapour deposition post-treatments
Sun, M.; Yerokhin, A.; Matthews, A.; Thomas, M.; Laukart, A.; Hausen, M. von; Klages, C.-P. | Journal Article |
| 2016 | Control of direct bonding behavior by interlayers
Eichler, M.; Dillmann, H.; Nagel, K.; Klages, C.-P. | Conference Paper |
| 2016 | DBD treatment of PVC tubes to reduce plasticizer migration
Neubert, T.; Lachmann, K.; Klages, C.-P.; Thomas, M. | Conference Paper |
| 2016 | In situ ATR-FTIR study of the formation of hydroperoxides through postdischarge treatment of thin polymer films
Duckstein, R.; Lachmann, K.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2016 | Surface functionalization of microfluidic devices
Eichler, M.; Klages, C.-P.; Lachmann, K. | Book Article |
| 2015 | Application of polyelectrolyte multilayers for temporary wafer bonding
Dillmann, H.; Eichler, M.; Klages, C.-P. | Abstract |
| 2015 | Control of surface free energy by patterned etching or coating
Eichler, M.; Nagel, K.; Reim, L.C.; Klages, C.-P. | Abstract |
| 2014 | High-efficient surface modification of thin austenitic stainless steel sheets applying short-time plasma nitriding by means of strip hollow cathode method for plasma thermochemical treatment
Nikolov, K.; Bunk, K.; Jung, A.; Kaestner, P.; Bräuer, G.; Klages, C.-P. | Journal Article |
| 2014 | Nucleophilic derivatization of polyethylene surfaces treated in ambient-pressure N2-H2 DBD post discharges
Khosravi, Z.; Klages, C.-P. | Journal Article |
| 2014 | Strip hollow cathode method for plasma thermochemical treatment for surface modification of thin metal strips
Nikolov, K.; Köster, K.; Kaestner, P.; Bräuer, G.; Klages, C.-P. | Journal Article |
| 2014 | Temporary wafer bonding by polyelectrolyte interlayers
Eichler, M.; Dillmann, H.; Reim, L.C.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2013 | Adhesion Improvement by Nitrogen Functionalization of Polymers Using DBD-Based Plasma Sources at Ambient Pressure
Thomas, M.; Eichler, M.; Lachmann, K.; Borris, J.; Hinze, A.; Klages, C.-P. | Book Article |
| 2013 | Combinatorial Plasma-Based Surface Modification of Polymers by Means of Plasma Printing with Gas-Carrying Plasma Stamps at Ambient Pressure
Hinze, A.; Marchesseault, A.; Büttgenbach, S.; Thomas, M.; Klages, C.-P. | Book Article |
| 2012 | Area-selective microplasma treatment in microfluidic channels for novel fluid phase separators
Eichler, M.; Nagel, K.; Hennecke, P.; Klages, C.-P. | Journal Article |
| 2012 | Deposition of thermoresponsive plasma polymer films from N-isopropylacrylamide using dielectric barrier discharge at atmospheric pressure
Lachmann, K.; Rehbein, M.C.; Jänsch, M.; Thomas, M.; Klages, C.-P. | Journal Article |
| 2012 | Diamond-like carbon films as piezoresistors in highly sensitive force sensors
Petersen, M.; Bandorf, R.; Bräuer, G.; Klages, C.-P. | Journal Article |
| 2012 | Plasma activation as a pretreatment tool for low-temperature direct wafer bonding in microsystems technology
Eichler, M.; Hennecke, P.; Nagel, K.; Gabriel, M.; Klages, C.-P. | Journal Article, Conference Paper |
| 2012 | Plasma printing and related techniques - Patterning of surfaces using microplasmas at atmospheric pressure
Thomas, M.; Borris, J.; Dohse, A.; Eichler, M.; Hinze, A.; Lachmann, K.; Nagel, K.; Klages, C.-P. | Journal Article |
| 2012 | Reduction of plasticizer leaching from PVC by barrier coatings deposited using DBD processes at atmospheric pressure
Cerezuela Barreto, M.; Borris, J.; Thomas, M.; Hänsel, R.; Stoll, M.; Klages, C.-P. | Journal Article |
| 2012 | Vertical microbubble column
Demming, S.; Peterat, G.; Llobera, A.; Schmolke, H.; Bruns, A.; Kohlstedt, M.; Al-Halhouli, A.; Klages, C.-P.; Krull, R.; Büttgenbach, S. | Journal Article |
| 2011 | DLC-Beschichtung auf SU-8-Fotoresist für piezoresistive Anwendungen in der Kraftsensorik
Jordan, A.; Petersen, M.; Bandorf, R.; Büttgenbach, S.; Klages, C.-P. | Conference Paper |
| 2011 | Fluidischer Separator für Zweiphasengemische
Eichler, M.; Nagel, K.; Hennecke, P.; Klages, C.-P. | Conference Paper |
| 2011 | Kostengünstige und ressourceneffiziente Herstellung flexibler Leiterplatten, RFID-Antennen und Biosensoren mittels Plasma Printing & Packaging Technologie
Borris, J.; Thomas, M.; Dohse, A.; Lachmann, K.; Hochsattel, T.; Weidlich, E.-R.; Klages, C.-P. | Conference Paper |
| 2011 | Me-DLC films as material for highly sensitive temperature compensated strain gauges
Petersen, M.; Heckmann, U.; Bandorf, R.; Gwozdz, V.; Schnabel, S.; Bräuer, G.; Klages, C.-P. | Journal Article |
| 2011 | Mechanism and prevention of defect formation during hydrophilic silicon direct bonding at low temperatures
Eichler, M.; Michel, B.; Hennecke, P.; Klages, C.-P. | Conference Paper |
| 2011 | Micropatterning using atmospheric pressure plasma processes
Thomas, M.; Borris, J.; Eichler, M.; Klages, C.-P. | Journal Article |
| 2011 | Niedrigtemperatur-Direktbonden von Silizium-, Borosilikat- und Quarzglaswafern und der Einfluss von Funktionsschichten
Eichler, M.; Hennecke, P.; Michel, B.; Klages, C.-P. | Conference Paper |
| 2011 | PECVD mit der Bandhohlkathode
Nikolov, K.; Schuhmacher, B.; Jung, T.; Klages, C.-P. | Journal Article |
| 2011 | Plasma-Printing: Strukturierte Oberflächenfunktionalisierung und selektive nasschemische Metallisierung
Thomas, M.; Borris, J.; Dohse, A.; Weidlich, E.-R.; Elbick, D.; Klages, C.-P. | Journal Article |
| 2011 | Surface modification of closed plastic bags for adherent cell cultivation
Lachmann, K.; Dohse, A.; Thomas, M.; Pohl, S.; Meyring, W.; Dittmar, K.E.J.; Lindenmeier, W.; Klages, C.-P. | Journal Article |
| 2010 | Atmospheric-pressure plasma amination of polymer surfaces
Klages, C.-P.; Hinze, A.; Willich, P.; Thomas, M. | Journal Article |
| 2010 | Barriereeigenschaften durch Nanobeschichtung
Cerezuela Barreto, M.; Borris, J.; Thomas, M.; Hänsel, R.; Stoll, M.; Klages, C.-P. | Conference Paper |
| 2010 | Erzeugung funktioneller Oberflächen durch plasmaunterstützte Beschichtung mittels dielektrischer Barrierenentladung (DBD-PACVD)
Thomas, M.; Eichler, M.; Borris, J.; Lachmann, K.; Barreto, M.C.; Klages, C.-P. | Conference Paper |
| 2010 | Low-temperature direct bonding of borosilicate, fused silica, and functional coatings
Eichler, M.; Michel, B.; Hennecke, P.; Gabriel, M.; Klages, C.-P. | Conference Paper |
| 2010 | Micropatterning using atmospheric pressure plasma processes
Thomas, M.; Borris, J.; Klages, C.-P. | Conference Paper |
| 2010 | Optimierung von DBD-Plasmaquellen durch grundlegende Untersuchungen der Plasmaunterstützten CVD-Abscheidung
Thomas, M.; Hinze, A.; Klages, C.-P. | Conference Paper |
| 2010 | P3T - a new technology for the cost and resource efficient inline production of flexible printed circuits, RFID antennas and biosensors
Borris, J.; Thomas, M.; Dohse, A.; Klages, C.-P.; Möbius, A.; Elbick, D.; Prinz, U.; Wandner, K.-H.; Weidlich, E.-R. | Journal Article |
| 2010 | P3T - ein neuartiger Ansatz zur Herstellung flexibler Elektronik im Rolle-zu Rolle-Verfahren
Borris, J.; Thomas, M.; Dohse, A.; Weidlich, E.-R.; Klages, C.-P. | Conference Paper |
| 2010 | Patterned deposition of transparent and conductive layers - new pathways towards cost efficient manufacturing techniques
Szyszka, B.; May, C.; Götzendörfer, S.; Ulrich, S.; Polenzky, C.; Ruppel, L.; Thomas, M.; Klages, C.-P.; Löbmann, P. | Conference Paper |
| 2010 | Plasma-Printing. Strukturierte Oberflächenfunktionalisierung und selektive nasschemische Metallisierung
Thomas, M.; Borris, J.; Dohse, A.; Weidlich, E.-R.; Elbick, D.; Klages, C.-P. | Conference Paper |
| 2010 | Plasma-Printing. Strukturierte Oberflächenfunktionalisierung und selektive nasschemische Metallisierung
Thomas, M.; Borris, J.; Weidlich, E.-R.; Elbick, D.; Klages, C.-P. | Journal Article |
| 2010 | Porous photoresist stamps for selective plasma treatment
Stöhr, U.; Dohse, A.; Hoppe, P.; Gehringer, A.; Thomas, M.; Klages, C.-P.; Reinecke, H. | Journal Article |
| 2010 | Surface modification of closed plastic bags for adherent cell cultivation
Lachmann, K.; Dohse, A.; Thomas, M.; Pohl, S.; Meyring, W.; Dittmar, K.E.J.; Lindenmeier, W.; Klages, C.-P. | Conference Paper |
| 2009 | Amination of polymer surfaces with atmospheric-pressure plasmas
Klages, C.-P. | Conference Paper |
| 2009 | Atmospheric-pressure plasma activation of silicon for MEMS packaging
Eichler, M.; Michel, B.; Hennecke, P.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2009 | Bondenergie-Messung in situ während des Temperns beim Direktbonden von Glas und Silizium
Eichler, M.; Michel, B.; Hennecke, P.; Klages, C.-P. | Conference Paper |
| 2009 | Comparison of bonding kinetics for borosilicate glass and silicon wafers by in situ fracture surface energy measurements during annealing
Eichler, M.; Michel, B.; Hennecke, P.; Klages, C.-P. | Conference Paper |
| 2009 | Density and aging behavior of primary amino groups on afterglow plasma-treated low-density polyethylene (LDPE)
Lachmann, K.; Michel, B.; Klages, C.-P. | Journal Article, Conference Paper |
| 2009 | Development of a multifunctional coating system for laser-induced material transport
Lachmann, K.; Eckert, S.; Vogel, A.; Klinger, A.; Gebert, A.; Klages, C.-P. | Journal Article |
| 2009 | Effects of dielectric barrier discharges on silicon surfaces: Surface roughness, cleaning, and oxidation
Michel, B.; Giza, M.; Krumrey, M.; Eichler, M.; Grundmeier, G.; Klages, C.-P. | Journal Article |
| 2009 | Effects on silanol condensation during low temperature silicon fusion bonding
Eichler, M.; Michel, B.; Hennecke, P.; Klages, C.-P. | Journal Article |
| 2009 | Einsatz von Mikroplasmen für die Herstellung von Silizium-Mehrlagenaufbauten
Eichler, M.; Michel, B.; Gabriel, M.; Klages, C.-P. | Journal Article |
| 2009 | Improvement of the adhesion of a galvanic metallization of polymers by surface functionalization using dielectric barrier discharges at atmospheric pressure
Borris, J.; Dohse, A.; Hinze, A.; Thomas, M.; Klages, C.-P.; Möbius, A.; Elbick, D.; Weidlich, E.-R. | Journal Article, Conference Paper |
| 2009 | Investigations on the effect of dielectric barrier discharge (DBD) treatment as a preconditioning method for low temperature silicon wafer bonding
Michel, B.; Eichler, M.; Klages, C.-P. | Journal Article, Conference Paper |
| 2009 | Investigations on the plasma-surface interaction during DBD-treatment for low-temperature direct silicon wafer bonding
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2009 | Lokale Plasma-Behandlung in einem Mask Aligner zur selektiven Veränderung der Oberfläche von Wafern
Gabriel, M.; Milde, S.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2009 | Microplasma stamps for area-selective modification of polymer surfaces
Lucas, N.; Franke, R.; Hinze, A.; Klages, C.-P.; Frank, R.; Büttgenbach, S. | Journal Article, Conference Paper |
| 2009 | Multilayer photoresist stamps for selective plasma treatment in micrometer scales
Stöhr, U.; Dohse, A.; Hoppe, P.; Thomas, M.; Kadel, K.; Klages, C.-P.; Reinecke, H. | Journal Article |
| 2009 | Multipin ac corona treatment - a new surface activation method for low temperature direct bonding
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2009 | One-step process to deposit a soft super-hydrophobic film by filamentary dielectric barrier discharge-assisted CVD using HMCTSO as a precursor
Kim, M.C.; Klages, C.-P. | Journal Article |
| 2009 | Plasma-based surface animation of polymers at atmospheric pressure
Klages, C.-P.; Hinze, A.; Thomas, M. | Conference Paper |
| 2009 | Plasma-printing and galvanic metallization hand in hand - A new technology for the cost-efficient manufacture of flexible printed circuits
Möbius, A.; Elbick, D.; Weidlich, E.-R.; Feldmann, K.; Schüßler, F.; Borris, J.; Thomas, M.; Zänker, A.; Klages, C.-P. | Conference Paper, Journal Article |
| 2009 | Plasmagestützte Oberflächenmodifizierung in fluidischen Systemen mit gedeckelten Kavitäten
Eichler, M.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2009 | Porous photoresist stamps for selective plasma treatment
Stöhr, U.; Dohse, A.; Hoppe, P.; Gehringer, A.; Thomas, M.; Klages, C.-P.; Reinecke, H. | Conference Paper |
| 2009 | Quantitative CD ATR-FTIR and CD SEM-EDX analyses of locally amino-functionalized polymer surfaces
Hinze, A.; Lucas, N.; Büttgenbach, S.; Schiffmann, K.; Willich, P.; Franke, R.; Frank, R.; Klages, C.-P. | Conference Paper |
| 2009 | Recent and future applications of atmospheric pressure plasma technology in Germany
Thomas, M.; Dani, I.; Lommatzsch, U.; Grünler, B.; Schulz-von der Gathen, V.; Viöl, W.; Weltmann, K.-D.; Klages, C.-P. | Conference Paper |
| 2009 | Reel-to-reel patterned plasma activation of polymers at atmospheric pressure for the cost-efficient production of flexible printed circuits
Borris, J.; Thomas, M.; Dohse, A.; Hinze, A.; Möbius, A.; Elbick, D.; Weidlich, E.-R.; Schüßler, F.; Franke, J.; Klages, C.-P. | Conference Paper |
| 2009 | Surface amination of three-dimensional substrates by RotoTEC plasma treatment under defined gas atmospheres at ambient pressure
Thomas, M.; Lachmann, K.; Dohse, A.; Thrane, M.; Morlock, J.; Klages, C.-P. | Conference Paper |
| 2009 | Surface reactions controlled by dielectric barrier discharge at atmospheric pressure for high performance large-scale production
Eichler, M.; Thomas, M.; Borris, J.; Michel, B.; Klages, C.-P. | Conference Paper |
| 2009 | Untersuchung der Aktivierungseffekte durch DBD bei Atmosphärendruck für das Tieftemperatur-Direktbonden
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2009 | Verfahren zum zwischenschichtfreien Verbinden von Substraten, Vorrichtung zur Durchfuehrung einer Plasmabehandlung sowie deren Verwendung
Klages, C.-P.; Michel, B.; Eichler, M. | Patent |
| 2008 | Allseitige Innenbeschichtung von fluidischen Systemen
Eichler, M.; Berger, C.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2008 | Atmospheric-pressure plasma pretreatment for direct bonding of silicon wafers at low temperatures
Eichler, M.; Michel, B.; Thomas, M.; Gabriel, M.; Klages, C.-P. | Journal Article, Conference Paper |
| 2008 | Design and optimization of dielectric barrier discharge microplasma stamps
Lucas, N.; Hinze, A.; Klages, C.-P.; Büttgenbach, S. | Journal Article |
| 2008 | Investigations of plasma-amination of polymer surfaces by dielectric barrier discharges
Klages, C.-P.; Grishin, A.; Hinze, A.; Thomas, M.; Borris, J. | Conference Paper |
| 2008 | Kinetics of silanol condensation for low-temperature direct bonding
Eichler, M.; Michel, B.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2008 | Plasma amination of low-density polyethylene by DBD afterglows at atmospheric pressure
Klages, C.-P.; Grishin, A. | Journal Article |
| 2008 | Plasma-printing and galvanic metallization hand in hand - a new technology for the cost-efficient manufacture of flexible printed circuits
Borris, J.; Thomas, M.; Zänker, A.; Klages, C.-P.; Möbius, A.; Elbick, D.; Weidlich, E.-R.; Feldmann, K.; Schüßler, F. | Conference Paper |
| 2008 | Quantitative ATR FT-IR analysis of chemically derivatized plasma-modified polymer surfaces
Klages, C.-P.; Grishin, A. | Journal Article |
| 2008 | ToF-SIMS imaging of DBD-plasma-printed microspots on BOPP substrates
Hinze, A.; Klages, C.-P.; Zänker, A.; Thomas, M.; Wirth, T.; Unger, W.E.S. | Journal Article |
| 2008 | Vorrichtung und Verfahren zur mikrostrukturierten Plasmabehandlung
Thomas, M.; Klages, C.-P.; Dohse, Antje; Zänker, A. | Patent |
| 2007 | Atmosphärendruck-Mikroplasmen in der Oberflächentechnik
Thomas, M.; Klages, C.-P.; Eichler, M.; Borris, J. | Conference Paper |
| 2007 | Beschichtung der inneren Oberflächen in gedeckelten mikrofluidischen Systemen
Eichler, M.; Berger, C.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2007 | Effects of dielectric barrier discharge treatment on the surface of silicon wafers
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2007 | Einsatz von Atmosphärendruck-Mikroplasmen für die Aufbau- und Verbindungstechnik
Eichler, M.; Michel, B.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2007 | Generation of stable coatings with carboxylic groups by copolymerization of MAA and VTMS using DBD at atmospheric pressure
Thomas, M.; Hausen, M. von; Klages, C.-P.; Baumhof, P. | Conference Paper, Journal Article |
| 2007 | Investigations into composition and structure of DBD-deposited amino group containing polymer layers
Borris, J.; Thomas, M.; Klages, C.-P.; Faupel, F.; Zaporojtchenko, V. | Conference Paper, Journal Article |
| 2007 | Microplasma-based treatment of inner surfaces in microfluidic devices
Klages, C.-P.; Berger, C.; Eichler, M.; Thomas, M. | Journal Article |
| 2007 | Optimierung der Kavitätenverformung von Mikroplasma-Stempeln zur selektiven Behandlung von Oberflächen bei Atmosphärendruck
Lucas, N.; Hinze, A.; Klages, C.-P.; Büttgenbach, S. | Conference Paper |
| 2007 | Plasma-Printing - ein neues Verfahren zur strukturierten Metallisierung von Kunststofffolien für den Einsatz in flexiblen Leiterplatten
Borris, J.; Thomas, M.; Zänker, A.; Klages, C.-P.; Möbius, A.; Elbick, D.; Weidlich, E.-R. | Conference Paper |
| 2007 | Plasma-printing and galvanic metallization hand in hand - a new technology for the cost-efficient manufacture of flexible printed circuits
Möbius, A.; Elbick, D.; Borris, J.; Thomas, M.; Zänker, A.; Klages, C.-P.; Weidlich, E.-R.; Feldmann, K.; Schüßler, F. | Conference Paper |
| 2007 | Plasmabehandlung von Leder
Hänsel, R.; Stoll, M.; Borris, J.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2007 | Silizium-Aktivierung für das Tieftemperatur-Waferbonden mit Barrierenentladung
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2007 | Surface technology with cold microplasmas
Klages, C.-P.; Hinze, A.; Lachmann, K.; Berger, C.; Borris, J.; Eichler, M.; Hausen, M. von; Zänker, A.; Thomas, M. | Conference Paper, Journal Article |
| 2006 | Ambient pressure plasma activation for low temperature bonding
Eichler, M.; Michel, B.; Thomas, M.; Klages, C.-P.; Ruddy, C.; Reinecke, H.; Reiche, M.; Radu, I.; Gabriel, M. | Conference Paper |
| 2006 | Atmospheric-pressure plasma deposition of coating in microchannels
Klages, C.-P.; Berger, C.; Eichler, M.; Nagel, K.; Thomas, M. | Conference Paper |
| 2006 | Coating on the inside of microfluidic systems with DBD based atmospheric pressure PA-CVD
Eichler, M.; Berger, C.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2006 | Coating with atmospheric pressure plasma processes
Thomas, M.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2006 | Effects of dielectric barrier discharge treatment on surface chemistry of silicon wafers
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2006 | Examples of microplasma-based surface technological process for biomedical applications
Klages, C.-P. | Conference Paper |
| 2006 | Investigation of ignition conditions of atmospheric pressure discharges in sealed microfluidic systems
Eichler, M.; Dziubek, A.; Berger, C.; Kurrat, M.; Klages, C.-P. | Conference Paper |
| 2006 | Microplasma source for microstructured surface treatment at atmospheric pressure
Lucas, N.; Hinze, A.; Nagel, K.; Klages, C.-P.; Büttgenbach, S. | Conference Paper |
| 2006 | Patterned DBD pretreatment at ambient pressure for low temperature wafer bonding
Eichler, M.; Michel, B.; Thomas, M.; Ruddy, C.; Reinecke, H.; Reiche, M.; Gabriel, M.; Klages, C.-P. | Conference Paper |
| 2006 | Patterned surface modification using ambient pressure plasma processes for enhanced wafer packaging by low temperature bonding
Eichler, M.; Mewes, H.; Thomas, M.; Klages, C.-P.; Ruddy, C.; Reinecke, H.; Reiche, M.; Gabriel, M. | Conference Paper |
| 2005 | Dynamic PACVD coating of strip metal with silicon oxide, titanium oxide and amorphous carbon films
Ortner, K.; Jung, T.; Klages, C.-P.; Lindner, B.; Strauss, B.; Sämann, N. | Journal Article |
| 2005 | Flexible master structures made of SU-8 for double-sides moulding of PDMS
Lucas, N.; Sichler, P.; Büttgenbach, S.; Penache, C.; Bartels, V.; Klages, C.-P. | Conference Paper |
| 2005 | Functional coatings deposition in microfluidic systems by dbd-based PA-CVD
Eichler, M.; Thomas, M.; Hacker, J.; Klages, C.-P. | Conference Paper |
| 2005 | Innenbehandlung und -beschichtung von gedeckelten mikrofluidischen Systemen
Eichler, M.; Hacker, J.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2005 | Oberflächenbeschichtung bei Atmosphärendruck
Thomas, M.; Eichler, M.; Klages, C.-P. | Journal Article |
| 2005 | Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden bei niedrigen Temperaturen
Eichler, M.; Thomas, M.; Mewes, H.; Klages, C.-P. | Conference Paper |
| 2005 | Patterned DBD treatment for area-selective metallization of polymers-plasma printing
Kreitz, S.; Penache, C.; Thomas, M.; Klages, C.-P. | Journal Article |
| 2004 | Möglichkeiten und Grenzen der Oberflächentechnik mit Barrierenentladung
Klages, C.-P.; Eichler, M.; Penache, C.; Thomas, M. | Conference Paper |
| 2004 | Plasma printing: Patterned surface functionalisation and coating at atmospheric pressure
Penache, C.; Gessner, C.; Betker, T.; Bartels, V.; Hollaender, A.; Klages, C.-P. | Journal Article |
| 2004 | Surface modification for biomedical purposes utilizing dielectric barrier discharges at atmospheric pressure
Gessner, C.; Bartels, V.; Betker, T.; Matucha, U.; Penache, C.; Klages, C.-P. | Journal Article |
| 2003 | Atmosphärendruck-Plasmaverfahren im Korrosionsschutz
Eichler, M.; Klages, C.-P.; Gessner, C. | Conference Paper |
| 2003 | Atmospheric pressure PA-CVD of silicon- and carbon-based coatings using dielectric barrier discharges
Klages, C.-P.; Eichler, M.; Thyen, R. | Journal Article |
| 2003 | Atmospheric pressure plasma printing for patterned surface functionalization and coating
Penache, C.; Gessner, C.; Betker, T.; Bartels, V.; Klages, C.-P. | Conference Paper |
| 2003 | Effects of discharge pulsing on the cleaning of surfaces using a dielectric barrier discharge at atmospheric pressure
Kim, Y.-K.; Eichler, M.; Klages, C.-P. | Journal Article |
| 2003 | Patterned surface treatment at atmospheric pressure - plasma printing
Penache, C.; Bartels, V.; Gessner, C.; Klages, C.-P. | Conference Paper |
| 2003 | Polymer surface modification for biomedical purposes by ambient pressure dielectric barrier discharges
Klages, C.-P.; Betker, T.; Gessner, C.; Penache, C. | Conference Paper |
| 2003 | Selected Papers from the 4th International Conference on Coatings on Glass (ICCG), Braunschweig, Germany, November 3- 7, 2002. Editorial preface
Klages, C.-P.; Bräuer, G.; Aegerter, M.A. | Conference Paper, Journal Article |
| 2002 | 4th International Conference on Coatings on Glass 2002. Proceedings
: Klages, C.-P.; Gläser, H.J. | Conference Proceedings |
| 2002 | Beschichtung und Reinigung von Oberflächen mit Atmosphärendruck-Plasmen
Klages, C.-P.; Eichler, M. | Journal Article |
| 2002 | Design and manufacture of spectrally selective reflecting coatings for the use with laser display projection screens
Rickers, C.; Vergöhl, M.; Klages, C.-P. | Journal Article |
| 2001 | Chemische Funktionalisierung von Oberflächen mit Atmosphärendruck-Plasmen
Klages, C.-P.; Eichler, M.; Steen, N. | Conference Paper |
| 2001 | Kohlenstoffbasierte Schichten
Klages, C.-P. | Book Article |
| 2001 | Metallization of polymers by plasma pretreatment followed by an electroplating process
Matthée, T.; Weber, A.; Pöckelmann, R.; Klages, C.-P. | Conference Paper |
| 2001 | Novel coating systems and surface technologies for continuous processing of steel sheet
Schumacher, B.; Müschenborn, W.; Stratmann, M.; Schultrich, B.; Klages, C.-P.; Kretschmer, M.; Seyfert, U.; Förster, F.; Tiller, H.-J. | Journal Article |
| 2000 | Atmospheric pressure plasma deposition of a-C:H films in barrier discharges
Klages, C.-P.; Thyen, R.; Vergöhl, M. | Conference Paper |
| 2000 | Chemical vapor deposition of diamond films
Klages, C.-P. | Book Article |
| 2000 | Cleaning of silicon and steel surfaces using dielectric barrier discharges
Thyen, R.; Höpfner, K.; Kläke, N.; Klages, C.-P. | Journal Article |
| 2000 | Diamond-like carbon films
Klages, C.-P.; Bewilogua, K. | Book Article |
| 2000 | Functional group retention in dbd-based plasma polymerization
Klages, C.-P.; Höpfner, K.; Kläke, N.; Thyen, R. | Conference Paper |
| 2000 | Haftfeste Metallisierung von Kunststoffen durch eine Plasmaaktivierung
Matthee, T.; Pöckelmann, R.; Klages, C.-P. | Journal Article |
| 2000 | Plasma-assisted deposition at atmospheric pressure using dielectric barrier discharges
Klages, C.-P.; Höpfner, K.; Kläke, N.; Thyen, R. | Conference Paper |
| 2000 | Preparation and properties of metal-containing Me-C:H coatings
Klages, C.-P. | Conference Paper |
| 2000 | Substrate bias effects during diamond film nucleation and growth
Klages, C.-P. | Conference Paper |
| 2000 | Surface cleaning and modification of sheet metal using dielectric barrier discharge
Thyen, R.; Höpfner, K.; Kläke, N.; Klages, C.-P. | Conference Paper |
| 2000 | Surface functionalization at atmospheric pressure by DBD-based pulsed plasma polymerization
Klages, C.-P.; Höpfner, K.; Kläke, N.; Thyen, R. | Journal Article |
| 2000 | Wastewater treatment with diamond electrodes
Fryda, M.; Dietz, A.; Herrmann, D.; Hampel, A.; Schäfer, L.; Klages, C.-P.; Perret, A.; Haenni, W.; Comninellis, C.; Gandini, D. | Conference Paper |
| 1999 | Chemical vapour deposition of polycrystalline diamond films on high-speed steel
Schäfer, L.; Fryda, M.; Stolley, T.; Xiang, L.; Klages, C.-P. | Journal Article |
| 1999 | Eigenschaften und Anwendungen von Diamantelektroden
Fryda, M.; Hampel, A.; Herrmann, D.; Schäfer, L.; Klages, C.-P. | Journal Article |
| 1999 | Elektrische Widerstandsschicht
Boettger, E.; Dimigen, H.; Taube, K.; Thyen, R.; Huebsch, H.; Veyhl, R.; Weber, A.; Klages, C.-P. | Patent |
| 1999 | Field emission of nitrogenated amorphous carbon films
Hoffmann, U.; Weber, A.; Klages, C.-P.; Matthee, T. | Journal Article |
| 1999 | Haftfeste Metallisierung von Kunststoffen durch eine Plasmaaktivierung
Matthee, T.; Pöckelmann, R.; Klages, C.-P.; Weber, A.; Busse, J. | Conference Paper |
| 1999 | In situ boron doping of chemical-vapor-deposited diamond films
Jiang, X.; Willich, P.; Paul, M.; Klages, C.-P. | Journal Article |
| 1999 | Lackierbetriebe in Niedersachsen
Kiene, J.; Klages, C.-P.; Vesper, H. | Book |
| 1999 | Large area diamond coatings on planar substrates
Liehr, M.; Schäfer, L.; Fryda, M.; Klages, C.-P. | Conference Paper |
| 1999 | Modification and coating of biomaterial surfaces by glow-discharge processes
Klages, C.-P. | Journal Article |
| 1999 | Modified diamond phases by combining diamond CVD with ion bombardment
Jiang, X.; Gu, C.; Schäfer, L.; Klages, C.-P. | Conference Paper |
| 1999 | Properties and applications of diamond electrodes
Fryda, M.; Herrmann, D.; Schäfer, L.; Klages, C.-P. | Conference Paper |
| 1999 | Properties of diamond electrodes for wastewater treatment
Fryda, M.; Herrmann, D.; Schäfer, L.; Klages, C.-P.; Perret, A.; Haenni, W.; Comninellis, C.; Gandini, D. | Journal Article |
| 1999 | Stabfoermige Elektrode mit einer Korrosionsschutzschicht und Verfahren zur Herstellung derselben
Matthee, T.; Sattler, M.; Schaefer, L.; Klages, C.-P. | Patent |
| 1999 | Untersuchungen zur Abscheidung von Diamantschichten hoher Qualität bei tiefen Temperaturen im Hot-Filament CVD Verfahren
Kröger, R.; Schäfer, L.; Klages, C.-P.; Hampel, A.; Xiang, X.; Morel, C. | Book |
| 1998 | Boron doped diamond/titanium composite electrodes for electrochemical gas generation from aqueous electrolytes
Beck, F.; Krohn, H.; Kaiser, W.; Fryda, M.; Klages, C.-P.; Schäfer, L. | Journal Article |
| 1998 | Carbon based thin film cathodes for field emission displays
Weber, A.; Hoffmann, U.; Klages, C.-P. | Journal Article |
| 1998 | Coalescence and overgrowth of diamond grains for improved heteroepitaxy on silicon (001)
Jiang, X.; Schiffmann, K.I.; Klages, C.-P.; Wittorf, D.; Jia, C.L.; Urban, K.; Jager, W. | Journal Article |
| 1998 | Development of diamond films for particle detector applications
Behnke, T.; Oh, A.; Wagner, A.; Zeuner, W.; Bluhm, A.; Klages, C.-P.; Paul, M.; Schäfer, L. | Journal Article |
| 1998 | Diamant-Compositschichtsystem, Verfahren zu seiner Herstellung und seine Verwendung
Dietz, A.; Bluhm, A.; Schaefer, L.; Klages, C.-P. | Patent |
| 1998 | Diamond Coatings and cBN Coatings for Tools
Klages, C.-P.; Fryda, M.; Schäfer, L.; Dimigen, H.; Matthee, T. | Journal Article |
| 1998 | Effects of ion bombardment on the nucleation and growth of diamond films
Jiang, X.; Klages, C.-P.; Zhang, W.J. | Journal Article |
| 1998 | Electrical and optical properties of amorphous fluorocarbon films prepared by plasma polymerization of perfluoro-1,3-dimethylcyclohexane
Weber, A.; Pöckelmann, R.; Klages, C.-P. | Journal Article |
| 1998 | Electron field emission of amorphous carbon films
Hoffmann, U.; Weber, A.; Löhken, T.; Klages, C.-P.; Spaeth, C.; Richter, F. | Conference Paper |
| 1998 | Hot-filament deposition of diamond
Klages, C.-P.; Schäfer, L. | Book Article |
| 1998 | Influence of the femoral head surface hardness on abrasive wear mechanisms in the combination with polyethylene total hip replacement
Lampe, F.; Grischke, M.; Wimmer, M.A.; Nassutt, R.; Klages, C.-P.; Hille, E.; Schneider, E. | Journal Article |
| 1998 | Photoconductivity of undoped, nitrogen- and boron-doped CVD- and synthetic diamond
Rohrer, E.; Nebel, C.E.; Stutzmann, M.; Floter, A.; Zachai, R.; Jiang, X.; Klages, C.-P. | Journal Article |
| 1998 | Schichtsystem, Verfahren zur Herstellung desselben und Metallsubstrat mit einem derartigen Schichtsystem
Dietz, A.; Weber, A.; Heide, V. von der; Klages, C.-P. | Patent |
| 1998 | Verfahren zur Oberflaechenaktivierung von Fluorpolymeren
Weber, A.; Hoeing, T.; Klages, C.-P. | Patent |
| 1997 | (001)-Textured Growth of Diamond Films on Polycrystalline Diamond Substrates by Bias-assisted Chemical Vapor Deposition
Jiang, X.; Klages, C.-P.; Zhang, W.J. | Journal Article |
| 1997 | Carbon Based Field Emitters for Field Emission Displays
Weber, A.; Hoffmann, U.; Löhken, T.; Klages, C.-P.; Kühn, M.; Spaeth, C. | Conference Paper |
| 1997 | Deposition of SiOx Thin Films by Corona Discharges at Atmospheric Pressure
Thyen, R.; Weber, A.; Klages, C.-P. | Conference Paper |
| 1997 | Diamantschichten für die chemische Industrie
Fryda, M.; Dietz, A.; Matthee, T.; Schäfer, L.; Klages, C.-P. | Journal Article |
| 1997 | Diamond Coatings and cBN Coatings for Tools
Klages, C.-P.; Fryda, M.; Matthee, T.; Schäfer, L.; Dimigen, H. | Conference Paper |
| 1997 | Einsatz der Corona-Entladung für die Abscheidung dünner Schichten
Thyen, R.; Weber, A.; Klages, C.-P. | Conference Paper |
| 1997 | Heteroepitaktisch abgeschiedenes Diamant
Klages, C.-P.; Jiang, X.; Füßer, H.-J.; Hartweg, M.; Zachai, R.; Rösler, M. | Patent |
| 1997 | Heteroepitaxial and textured growth of diamond thin films
Klages, C.-P. | Conference Paper |
| 1997 | Insulating diamond coatings on Tungsten electrodes
Matthée, T.; Schäfer, L.; Schmidt, A.; Klages, C.-P. | Journal Article, Conference Paper |
| 1997 | Ion-bombardment-induced heteroepitaxy and texture in diamond films
Klages, C.-P.; Jiang, X.; Paul, M.; Xia, Y.B.; Zhang, W.J. | Conference Paper |
| 1997 | Metallization of polymers using plasma enhanced chemical vapor deposited titanium nitride as interlayer
Weber, A.; Dietz, A.; Pöckelmann, R.; Klages, C.-P. | Conference Paper |
| 1997 | Neue Elektronenemitter für Feldemissionsdisplays
Weber, A.; Hofmann, U.; Löhken, T.; Klages, C.-P. | Conference Paper |
| 1997 | Piezoresistivity of Polycrystalline p-Type Diamond Films of Various Doping Levels at Different Temperaturesvfg
Wang, W.L.; Jiang, X.; Taube, K.; Klages, C.-P. | Journal Article |
| 1997 | Plasma CVD of high quality titanium nitride using titanium (IV) isopropoxide as precursor
Weber, A.; Pöckelmann, R.; Klages, C.-P. | Journal Article |
| 1997 | Textured Growth of Diamond Films on Polycrystalline Diamond Substrates by Bias-assisted Chemical Vapor Deposition
Zhang, W.J.; Jiang, X.; Klages, C.-P. | Journal Article |
| 1997 | Thermal conductivity of diamond and diamond thin films
Klages, C.-P. | Conference Paper |
| 1997 | Umweltverträgliche Metallisierung von Polymerwerkstoffen
Weber, A.; Dietz, A.; Hippel, I.; Pöckelmann, R.; Klages, C.-P. | Conference Paper |
| 1997 | Verfahren und Vorrichtung zur Aufbringung von antistatischen transparenten Oberflaechenbeschichtungen auf elektrisch isolierende Gegenstaende
Weber, A.; Traus, I.; Jaeger, S.; Klages, C.-P. | Patent |
| 1997 | Verfahren zum Beschichten von Glaskoerpern
Weber, A.; Hoeing, T.; Traus, I.; Thyen, R.; Dimingen, H.; Klages, C.-P. | Patent |
| 1997 | Verfahren zur Herstellung eines Schichtsystems auf Substraten und das mit diesem Verfahren hergestellte Schichtsystem
Weber, A.; Thyen, R.; Dietz, A.; Traus, I.; Klages, C.-P. | Patent |
| 1997 | Verfahren zur Herstellung von Feldemissionselektronenquellen, so hergestellte Feldemissionselektronenquelle und ihre Verwendung
Weber, A.; Dietz, A.; Klages, C.-P. | Patent |
| 1996 | Beschichtungen mit definierter Oberflächenenergie. Herstellung und Bedeutung für die Medizintechnik
Klages, C.-P.; Grischke, M.; Höing, T.; Thyen, R. | Conference Paper |
| 1996 | Deposition of heteroepitaxial diamond films on two inch silicon substrates
Jiang, X.; Paul, M.; Klages, C.-P. | Journal Article, Conference Paper |
| 1996 | Diamond film orientation by ion bombardement during deposition
Jiang, X.; Zhang, W.J.; Paul, M.; Klages, C.-P. | Journal Article |
| 1996 | Enhanced diamond film growth by hot-filament CVD using forced convection
Kröger, R.; Schäfer, L.; Klages, C.-P.; Six, R. | Journal Article |
| 1996 | Entwicklung halbleitender Diamantschichten und deren Qualifikation als Material für aktive elektronische Bauelemente. 3. Zwischenbericht
Jiang, X.; Klages, C.-P.; Paul, M.; Six, R. | Report |
| 1996 | Entwicklung halbleitender Diamantschichten und deren Qualifikation als Material für aktive elektronische Bauelemente. 4. Zwischenbericht
Jiang, X.; Klages, C.-P.; Paul, M.; Six, R. | Report |
| 1996 | Entwicklung von diamantbeschichteten Elektroden für Füllstandsmessungen
Matthee, T.; Dietz, A.; Schäfer, L.; Klages, C.-P. | Journal Article |
| 1996 | Entwicklung von Schichtsystemen für hochohmige Präzisionswiderstände
Klages, C.-P.; Thyen, R.; Veyhl, R.; Weber, A. | Conference Paper |
| 1996 | Heteroepitaxy of diamond on silicon
Jiang, X.; Klages, C.-P. | Journal Article |
| 1996 | Kohlenstoff als Elektronenemitter in Feldemissionsdisplays
Weber, A.; Hoffmann, U.; Klages, C.-P. | Conference Paper |
| 1996 | Plasma-enhanced chemical vapour deposition of thin films by corona discharge at atmospheric pressure
Thyen, R.; Weber, A.; Klages, C.-P. | Conference Paper |
| 1996 | Plasmagestützte Abscheidung von Siliciumoxidschichten bei Atmosphärendruck mittels Barrierenentladung
Thyen, R.; Weber, A.; Klages, C.-P. | Conference Paper |
| 1996 | Recent developments in heteroepitaxial nucleation and growth of diamond on silicon
Jiang, X.; Klages, C.-P. | Journal Article |
| 1996 | Verfahren zur Herstellung von TiN-Schichten und die mit diesem Verfahren hergestellte Schicht
Weber, A.; Poeckelmann, R.; Klages, C.-P. | Patent |
| 1996 | Verfahren zur Herstellung von verschleissfesten farbigen Schichten
Jaeger, S.; Neumann, F.; Klages, C.-P. | Patent |
| 1995 | Aspects of TiN and Ti deposition in an ECR plasma enhanced CVD process
Weber, A.; Nikulski, R.; Klages, C.-P.; Gross, M.E.; Charatan, R.M.; Opilan, R.L.; Brown, L. | Journal Article |
| 1995 | Chemical vapour deposition of polycrystalline diamond films on steel substrates
Schäfer, L.; Bluhm, A.; Sattler, M.; Six, R.; Klages, C.-P. | Conference Paper |
| 1995 | Deposition of high quality TiN using tetra-iso-propoxide titanium in an electron cyclotron resonance plasma process
Weber, A.; Pöckelmann, R.; Klages, C.-P. | Journal Article |
| 1995 | Electroplating of fluoropolymers using ECR plasma deposited TiN as interlayer
Weber, A.; Dietz, A.; Pöckelmann, R.; Klages, C.-P. | Conference Paper |
| 1995 | Electroplating of poly(tetrafluoro-ethylene) using plasma enhanced chemical vapor deposited titanium nitride as interlayer
Weber, A.; Dietz, A.; Pöckelmann, R.; Klages, C.-P. | Journal Article |
| 1995 | Formation mechanism of TiN by reaction of tetrakis(dimethylamido)-titanium with plasma activated nitrogen
Weber, A.; Klages, C.-P.; Gross, M.E.; Charatan, R.M.; Brown, W.L. | Journal Article |
| 1995 | Heteroepitaxy of diamond on silicon
Jiang, X.; Klages, C.-P. | Conference Paper |
| 1995 | Improvement of reproducibility and resistance scattering of high ohmic CrSi thin films
Thyen, R.; Weber, A.; Klages, C.-P.; Veyhl, R. | Conference Paper |
| 1995 | Investigation of high-field conductivity and dielectric strength of nitrogen containing polycrystalline diamond films
Boettger, E.; Bluhm, A.; Jiang, X.; Schäfer, L.; Klages, C.-P. | Journal Article |
| 1995 | Metastable diamond synthesis - principles and applications
Klages, C.-P. | Journal Article |
| 1995 | Piezoresistivity studies of diamond films
Wang, W.L.; Jiang, X.; Klages, C.-P. | Journal Article |
| 1995 | Studies of heteroepitaxial nucleation and growth of diamond on silicon
Jiang, X.; Paul, M.; Klages, C.-P.; Jia, C.L. | Conference Paper |
| 1995 | Tentacle-type ion exchangers for the chromatography of biopolymers based on functionalized plasma polymers
Weber, A.; Stecher, F.; Klages, C.-P.; Müller, E.; Eisenbeiss, F. | Journal Article |
| 1995 | Verfahren zur Herstellung von verschleißfesten farbigen Schichten und deren Verwendung
Jaeger, S.; Klages, C.-P. | Patent |
| 1994 | Approach of selective nucleation and epitaxy of diamond films on Si (100)
Jiang, X.; Boettger, E.; Paul, M.; Klages, C.-P. | Journal Article |
| 1994 | Diamant - nicht nur als Schmuck ein wertvolles Material
Bluhm, A.; Böttger, E.; Fryda, M.; Jiang, X.; Klages, C.-P.; Schäfer, L. | Journal Article |
| 1994 | Diamantbeschichtung komplexer Geometrien - Hochskalierung des Heißdraht-CVD-Prozesses zur Diamantabscheidung
Schäfer, L.; Bluhm, A.; Fryda, M.; Klages, C.-P.; Sattler, M.; Six, R. | Book |
| 1994 | Diamond CVD - a status report
Klages, C.-P. | Conference Paper |
| 1994 | ECR plasma enhanced MOCVD of titanium nitride
Gross, M.E.; Weber, A.; Nikulski, R.; Klages, C.-P.; Charatan, R.M.; Brown, W.L.; Dons, E.; Eaglesham, D.J. | Conference Paper |
| 1994 | High field conductivity of polycrystalline diamond films
Boettger, E.; Jiang, X.; Klages, C.-P. | Journal Article, Conference Paper |
| 1994 | High field conductivity of undoped polycrystalline diamond films
Boettger, E.; Jiang, X.; Klages, C.-P. | Journal Article |
| 1994 | Infrared spectroscopic investigations on h-BN and mixed h/c-BN thin films
Jäger, S.; Bewilogua, K.; Klages, C.-P. | Journal Article |
| 1994 | Investigation of the high-field conductivity and dielectric strength of nitrogen containing polycrystalline diamond films
Böttger, E.; Bluhm, A.; Jiang, X.; Schäfer, L.; Klages, C.-P. | Journal Article |
| 1994 | Investigation on hot-filament diamond CVD for tool application
Schäfer, L.; Klages, C.-P. | Conference Paper |
| 1994 | Investigation on the preparation and properties of organic dye/metal oxide composite thin films
Jäger, S.; Neumann, F.; Klages, C.-P. | Conference Paper |
| 1994 | Low temperature deposition of TiN using tetrakis(dimethylamido)-titanium in an ECR plasma process
Weber, A.; Nikulski, R.; Klages, C.-P.; Gross, M.E.; Brown, W.L.; Dons, E.; Charatan, R.M. | Journal Article |
| 1994 | Metastable diamond synthesis - principles and applications
Klages, C.-P. | Conference Paper |
| 1994 | A new method of diamond CVD with a closed gas circuit
Fryda, M.; Six, R.; Pöckelmann, R.; Klages, C.-P. | Journal Article |
| 1994 | Nucleation and growth of diamond films on silicon
Jiang, X.; Boettger, E.; Paul, M.; klages, C.-P. | Conference Paper |
| 1994 | Nucleation and initial growth phase of diamond thin films on (100) silicon
Jiang, X.; Klages, C.-P.; Schiffmann, K.I. | Journal Article |
| 1994 | Nucleation, growth and properties of heteroepitaxial diamond films
Jiang, X.; Boettger, E.; Paul, M.; Klages, C.-P. | Conference Paper |
| 1994 | Superharte Schichten: Diamant, kubisches Bornitrid und Beta-Kohlenstoffnitrid
Dimigen, H.; Bewilogua, K.; Klages, C.-P. | Conference Paper |
| 1994 | Verfahren zur Herstellung von Diamantschichten
Jiang, X.; Six, R.; Klages, C.-P. | Patent |
| 1993 | Atomic-force-microscopic study of heteroepitaxial diamond nucleation on (100) silicon
Jiang, X.; Schiffmann, K.I.; Westphal, A.; Klages, C.-P. | Journal Article |
| 1993 | The deposition and characterization of β-SiC and diamond/β-SiC composite films
Jiang, X.; Klages, C.-P. | Journal Article, Conference Paper |
| 1993 | Deposition and characterization of diamond epitaxial thin films on silicon substrates
Jiang, X.; Klages, C.-P.; Rösler, M.; Zachai, R.; Hartweg, M.; Füßer, H.-J. | Conference Paper |
| 1993 | Deposition of TiN using tetrakis/dimethylamindo/-titanium in an electron-cyclotron-resonance plasma process
Weber, A.; Nikulkski, R.; Klages, C.-P. | Journal Article |
| 1993 | Diamant-Siliciumcarbid-Mischschicht, Verfahren zu ihrer Herstellung und ihre Verwendung
Jiang, X.; Klages, C.-P. | Patent |
| 1993 | Diamond membrane with controlled stress for submicron lithography
Schäfer, L.; Bluhm, A.; Klages, C.-P.; Löchel, B.; Buchmann, L.-M.; Huber, H.-L. | Journal Article |
| 1993 | Diamond membranes with controlled stress for submicron lithography
Bluhm, A.; Löchel, B.; Buchmann, L.-M.; Huber, H.-L.; Klages, C.-P.; Schäfer, L. | Journal Article, Conference Paper |
| 1993 | ECR plasma deposition of cubic nitride using n-trimethylborazine
Bringmann, U.; Nikulkski, R.; Klages, C.-P.; Weber, A. | Conference Paper |
| 1993 | The effect of substrate bias voltage on nucleation of diamond crystals in a microwave plasma assisted CVD process
Jiang, X.; Six, R.; Zachai, R.; Hartweg, M.; Füßer, H.-J.; Klages, C.-P. | Journal Article, Conference Paper |
| 1993 | Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazine
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P. | Journal Article, Conference Paper |
| 1993 | Epitaxial diamond thin films on (001) silicon substrates
Jiang, X.; Klages, C.-P.; Zachai, R.; Hartweg, M.; Füßer, H.-J. | Journal Article |
| 1993 | Growth of cubic Boron Nitride and Boron-Carbon-Nitrogen coatings using N-Trimethylborazine in an ECR plasma process
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P. | Conference Paper |
| 1993 | Heteroepitaktische Abscheidung von Diamant auf Silicium
Klages, C.-P.; Füßer, H.-J. | Journal Article |
| 1993 | Heteroepitaxial diamond growth on (100) silicon
Jiang, X.; Klages, C.-P. | Journal Article, Conference Paper |
| 1993 | Hot-filament diamond CVD with forced convection - diagnostic and growth experiments
Schäfer, L.; Sattler, M.; Klages, C.-P. | Conference Paper |
| 1993 | Influence of a substrate bias on the formation of cubic boron nitride in an ECR plasma CVD process
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P. | Conference Paper |
| 1993 | Influence of plasma activation on the deposition of Ti, TiN and Cu using metalorganic compounds
Weber, A.; Nikulski, R.; Bringmann, U.; Gernhuber, M.; Pöckelmann, R.; Klages, C.-P. | Conference Paper |
| 1993 | Low temperature deposition of TiN in an ECR plasma enhanced process
Weber, A.; Bringmann, U.; Nikulkski, R.; Pöckelmann, R.; Klages, C.-P.; Gross, M.E.; Brown, W.L.; Charatan, R.M.; Dons, E.; Eaglesham, D.J. | Conference Paper |
| 1993 | Physical chemistry of multi-filament diamond CVD processes
Klages, C.-P.; Sattler, M.; Schäfer, L. | Conference Paper |
| 1993 | Physical chemistry of multi-filament diamond CVD processes
Klages, C.-P.; Sattler, M.; Schäfer, L. | Conference Paper |
| 1993 | Vorrichtung und Verfahren zur Herstellung von Diamantschichten mittels Gasphasenabscheidung
Fryda, M.; Klages, C.-P. | Patent |
| 1992 | Diamond membrane based X-ray masks
Löchel, B.; Huber, H.-L.; Klages, C.-P.; Schäfer, L.; Bluhm, A. | Conference Paper |
| 1992 | Diamond membranes for X-ray masks
Löchel, B.; Schliwinski, H.-J.; Huber, H.-L.; Trube, J.; Klages, C.-P.; Lüthje, H.; Schäfer, L. | Conference Paper |
| 1992 | Influence of a RF plasma on the nucleation of aluminium using n-trimethy lamine-alane -TMAA- as precursor
Bringmann, U.; Klages, C.-P.; Weber, A.; Schiffmann, K.I. | Conference Paper |
| 1992 | Optical applications of polycristalline diamond
Klages, C.-P.; Koidl, P. | Journal Article |
| 1992 | Plasma-deposition of BN, BCN-H and Me-BCN-H films using N-trimethylborazine -MeTi,Nb-
Weber, A.; Bringmann, U.; Klages, C.-P.; Taube, K.; Döllein, G.; Meyer, H.; Weidenbach, G. | Conference Paper |
| 1992 | Structural and mechanical properties of niobium-containing amorphous hydrogenated carbon films (Nb-C:H)
Fryda, M.; Benndorf, C.; Klages, C.-P.; Taube, K. | Journal Article, Conference Paper |
| 1992 | Synthesis of diamond/beta-SiC composite films by microwave plasma assisted chemical vapor deposition
Jiang, X.; Klages, C.-P. | Journal Article, Conference Paper |
| 1992 | Verbundprojekt - Diamantbeschichtung komplexer Geometrien. Teilvorhaben - Hochskalierung des Heißdraht-CVD-Prozesses zur Diamantabscheidung
Bluhm, A.; Sattler, M.; Six, R.; Klages, C.-P.; Schäfer, L. | Conference Paper |
| 1992 | Verbundprojekt - Neue Dünnschichtverfahren durch "molecular engineering" metallorganischer Verbindungen. Teilvorhaben - Untersuchung der Plasmaparameter
Weber, A.; Bringmann, U.; Nikulski, R.; Klages, C.-P. | Conference Paper |
| 1992 | Verfahren zur Abscheidung einer Bor und Stickstoff enthaltenden Schicht
Doellein, G.; Weidenbach, G.; Meyer, H.; Bringmann, U.; Weber, A.; Klages, C.-P. | Patent |
| 1991 | Deposition and properties of diamond thin films
Klages, C.-P. | Conference Paper |
| 1991 | Electrical conductivity and microstructure of metal-containing a-C-H films.
Benndorf, C.; Boettger, E.; Fryda, M.; Haubold, H.G.; Köberle, H.; Klages, C.-P. | Conference Paper |
| 1991 | Growth and properties of diamond films prepared by MPCVD using different oxygen-containing source gases
Schäfer, L.; Klages, C.-P. | Journal Article, Conference Paper |
| 1991 | In-situ measuring of stress development in diamond thin films
Schäfer, L.; Jiang, X.; Klages, C.-P. | Conference Paper |
| 1991 | Microstructure and wear behaviour of metal-containing diamond-like coatings
Dimigen, H.; Klages, C.-P. | Journal Article, Conference Paper |
| 1991 | Upscaling of the hot-filament CVD process for deposition of diamond films on large-scale substrates
Schäfer, L.; Sattler, M.; Klages, C.-P. | Conference Paper |